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Class Information
Number: 414/936
Name: Material or article handling > Associated with semiconductor wafer handling > Including wafer orienting means
Description: A collection of art including means the sole function of which is to move a wafer or group of wafers to effect a change in the orientation thereof (e.g., to align a wafer flat, etc.).
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618225 |
Six-bar linkage positioning mechanism |
Nov. 17, 2009 |
| 7611322 |
Processing thin wafers |
Nov. 3, 2009 |
| 7551978 |
System for carrying an item |
Jun. 23, 2009 |
| 7547181 |
Substrate position correcting method and apparatus using either substrate radius or center of rotation correction adjustment sum |
Jun. 16, 2009 |
| 7499767 |
Methods and apparatus for positioning a substrate relative to a support stage |
Mar. 3, 2009 |
| 7482555 |
Substrate transportation device (air) |
Jan. 27, 2009 |
| 7476960 |
System and method for improved auto-boating |
Jan. 13, 2009 |
| 7458762 |
Apparatus and method for positioning semiconductor substrate |
Dec. 2, 2008 |
| 7422411 |
Gripping mechanisms, apparatus and methods |
Sep. 9, 2008 |
| 7384228 |
Insertion device, lithographic apparatus with said insertion device and device manufacturing method |
Jun. 10, 2008 |
| 7357842 |
Cluster tool architecture for processing a substrate |
Apr. 15, 2008 |
| 7354335 |
CMP apparatus and load cup mechanism |
Apr. 8, 2008 |
| 7346415 |
Semiconductor wafer positioning method, and apparatus using the same |
Mar. 18, 2008 |
| 7329079 |
Semiconductor wafer processing machine |
Feb. 12, 2008 |
| 7329299 |
Plate-shaped work piece transporting apparatus |
Feb. 12, 2008 |
| 7322787 |
Devices and methods for reversing, transporting, and processing substrates |
Jan. 29, 2008 |
| 7314344 |
Substrate-transporting device |
Jan. 1, 2008 |
| 7292909 |
Substrate processing apparatus and management method |
Nov. 6, 2007 |
| 7287951 |
Device and method for the harmonized positioning of wafer disks |
Oct. 30, 2007 |
| 7250084 |
Downward mechanism for support pins |
Jul. 31, 2007 |
| 7240580 |
Single degree of freedom axis positioner |
Jul. 10, 2007 |
| 7214283 |
Working range setting method for bonding device for fabricating liquid crystal display devices |
May. 8, 2007 |
| 7181314 |
Industrial robot with controlled flexibility and simulated force for automated assembly |
Feb. 20, 2007 |
| 7179334 |
System and method for performing semiconductor processing on substrate being processed |
Feb. 20, 2007 |
| 7158857 |
Method and apparatus for aligning a cassette |
Jan. 2, 2007 |
| 7153087 |
Centering mechanism, centering unit, semiconductor manufacturing apparatus, and centering method |
Dec. 26, 2006 |
| 7153088 |
Method and apparatus for transferring a semiconductor substrate |
Dec. 26, 2006 |
| 7151981 |
Methods and apparatus for positioning a substrate relative to a support stage |
Dec. 19, 2006 |
| 7139638 |
Substrate processing unit, method for detecting the position of a substrate and substrate processing apparatus |
Nov. 21, 2006 |
| 7108476 |
Method and device for changing a semiconductor wafer position |
Sep. 19, 2006 |
| 7097410 |
Methods and apparatus for controlled-angle wafer positioning |
Aug. 29, 2006 |
| 7089677 |
Method for calibrating alignment mark positions on substrates |
Aug. 15, 2006 |
| 7052229 |
Alignment of semiconductor wafers and other articles |
May. 30, 2006 |
| 7044703 |
Automatic guided vehicle, automatic guided vehicle system and wafer carrying method |
May. 16, 2006 |
| 7039501 |
Method for determining a position of a robot |
May. 2, 2006 |
| 7008802 |
Method and apparatus to correct water drift |
Mar. 7, 2006 |
| 7008884 |
Transfer robot and inspection method for thin substrate |
Mar. 7, 2006 |
| 7004716 |
Device and method for aligning disk-shaped substrates |
Feb. 28, 2006 |
| 6986636 |
Device for positioning disk-shaped objects |
Jan. 17, 2006 |
| 6973370 |
Substrate processing apparatus and method for adjusting a substrate transfer position |
Dec. 6, 2005 |
| 6961639 |
Apparatus and process for identification of characters inscribed on a semiconductor wafer containing an orientation mark |
Nov. 1, 2005 |
| 6935830 |
Alignment of semiconductor wafers and other articles |
Aug. 30, 2005 |
| 6932557 |
Gripping mechanisms, apparatus, and methods |
Aug. 23, 2005 |
| 6934661 |
Wafer edge detector |
Aug. 23, 2005 |
| 6932558 |
Wafer aligner |
Aug. 23, 2005 |
| 6927181 |
Transfer robot and inspection method for thin substrate |
Aug. 9, 2005 |
| 6925355 |
Substrate transfer device |
Aug. 2, 2005 |
| 6925356 |
Method and apparatus for aligning a cassette |
Aug. 2, 2005 |
| 6916147 |
Substrate storage cassette with substrate alignment feature |
Jul. 12, 2005 |
| 6914337 |
Calibration wafer and kit |
Jul. 5, 2005 |
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