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Class Information
Number: 414/935
Name: Material or article handling > Associated with semiconductor wafer handling
Description: A collection of art disclosing useful subject matter utilized in the handling of flat, sheetlike semiconductor wafers.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7614840 |
Wafer processing apparatus having dust proof function |
Nov. 10, 2009 |
| 7611124 |
Vacuum processing apparatus |
Nov. 3, 2009 |
| 7611319 |
Methods and apparatus for identifying small lot size substrate carriers |
Nov. 3, 2009 |
| 7611322 |
Processing thin wafers |
Nov. 3, 2009 |
| 7607879 |
Substrate processing apparatus with removable component module |
Oct. 27, 2009 |
| 7607880 |
Wafer processing apparatus having dust proof function |
Oct. 27, 2009 |
| 7597531 |
Method of controlling mover device |
Oct. 6, 2009 |
| 7585141 |
Load lock system for ion beam processing |
Sep. 8, 2009 |
| 7585686 |
Method and apparatus for processing a wafer |
Sep. 8, 2009 |
| 7575406 |
Substrate processing apparatus |
Aug. 18, 2009 |
| 7577487 |
Methods and apparatus for a band to band transfer module |
Aug. 18, 2009 |
| 7563043 |
Coating/developing apparatus and substrate transfer method |
Jul. 21, 2009 |
| 7551265 |
Contact material and system for ultra-clean applications |
Jun. 23, 2009 |
| 7549811 |
Substrate treating apparatus |
Jun. 23, 2009 |
| 7537108 |
Methods and apparatus for transporting substrate carriers |
May. 26, 2009 |
| 7537425 |
Wafer processing apparatus having dust proof function |
May. 26, 2009 |
| 7532004 |
Inspection device for inspecting thin plate container and method of inspecting thin plate container |
May. 12, 2009 |
| 7521089 |
Method and apparatus for controlling the movement of CVD reaction byproduct gases to adjacent process chambers |
Apr. 21, 2009 |
| 7506752 |
Methods and apparatus for transporting substrate carriers |
Mar. 24, 2009 |
| 7504794 |
Planar motor |
Mar. 17, 2009 |
| 7503762 |
Substrate processing apparatus and substrate processing method |
Mar. 17, 2009 |
| 7497633 |
Substrate processing apparatus and substrate processing method |
Mar. 3, 2009 |
| 7497912 |
Substrate processing apparatus |
Mar. 3, 2009 |
| 7499767 |
Methods and apparatus for positioning a substrate relative to a support stage |
Mar. 3, 2009 |
| 7494107 |
Gate valve for plus-atmospheric pressure semiconductor process vessels |
Feb. 24, 2009 |
| 7490650 |
Workpiece processing device |
Feb. 17, 2009 |
| 7490878 |
ESD safe vacuum wand tip |
Feb. 17, 2009 |
| 7482555 |
Substrate transportation device (air) |
Jan. 27, 2009 |
| 7476960 |
System and method for improved auto-boating |
Jan. 13, 2009 |
| 7462814 |
Methods and systems for lithography process control |
Dec. 9, 2008 |
| 7457680 |
Conveyance method for transporting objects |
Nov. 25, 2008 |
| 7453160 |
Simplified wafer alignment |
Nov. 18, 2008 |
| 7445689 |
Substrate processing method and substrate processing system |
Nov. 4, 2008 |
| 7445119 |
Chip receptacle, method for fabricating a chip receptacle and chip transport container |
Nov. 4, 2008 |
| 7416405 |
Vertical type of thermal processing apparatus and method of using the same |
Aug. 26, 2008 |
| 7406360 |
Method for detecting transfer shift of transfer mechanism and semiconductor processing equipment |
Jul. 29, 2008 |
| 7394520 |
Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock |
Jul. 1, 2008 |
| 7377736 |
Cylinder, load port using it, and production system |
May. 27, 2008 |
| 7367446 |
Methods and apparatus for transporting substrate carriers |
May. 6, 2008 |
| 7357846 |
Substrate processing apparatus and substrate processing method |
Apr. 15, 2008 |
| 7344349 |
Pod cover removing-installing apparatus |
Mar. 18, 2008 |
| 7336015 |
Method of manipulating wafers |
Feb. 26, 2008 |
| 7335277 |
Vacuum processing apparatus |
Feb. 26, 2008 |
| 7331751 |
Vacuum processing method |
Feb. 19, 2008 |
| 7329299 |
Plate-shaped work piece transporting apparatus |
Feb. 12, 2008 |
| 7329947 |
Heat treatment jig for semiconductor substrate |
Feb. 12, 2008 |
| 7313452 |
Substrate transfer controlling apparatus and substrate transferring method |
Dec. 25, 2007 |
| 7313262 |
Apparatus for visualization of process chamber conditions |
Dec. 25, 2007 |
| 7293642 |
Methods and apparatus for transporting substrate carriers |
Nov. 13, 2007 |
| 7292909 |
Substrate processing apparatus and management method |
Nov. 6, 2007 |
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