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Class Information
Number: 414/805
Name: Material or article handling > Process > Of moving material between zones having different pressures and inhibiting change in pressure gradient therebetween
Description: Process of moving or enabling gravitational movement of material from a region having a particular pressure to a region having another pressure and preventing or significantly retarding any change in the pressure differential between the regions.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7611319 |
Methods and apparatus for identifying small lot size substrate carriers |
Nov. 3, 2009 |
| 7611322 |
Processing thin wafers |
Nov. 3, 2009 |
| 7600960 |
Method for transfer of particulate solid products between zones of different pressure |
Oct. 13, 2009 |
| 7521089 |
Method and apparatus for controlling the movement of CVD reaction byproduct gases to adjacent process chambers |
Apr. 21, 2009 |
| 7467916 |
Semiconductor-manufacturing apparatus equipped with cooling stage and semiconductor-manufacturing method using same |
Dec. 23, 2008 |
| 7458763 |
Mid-entry load lock for semiconductor handling system |
Dec. 2, 2008 |
| 7445415 |
Direct tool loading |
Nov. 4, 2008 |
| 7422406 |
Stacked process modules for a semiconductor handling system |
Sep. 9, 2008 |
| 7409257 |
System and method for moving substrates in and out of a manufacturing process |
Aug. 5, 2008 |
| 7371683 |
Method for carrying object to be processed |
May. 13, 2008 |
| 7331751 |
Vacuum processing method |
Feb. 19, 2008 |
| 7273339 |
Powder transport method and apparatus |
Sep. 25, 2007 |
| 7249925 |
System and method for reticle protection and transport |
Jul. 31, 2007 |
| 7232286 |
Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber |
Jun. 19, 2007 |
| 7214027 |
Wafer handler method and system |
May. 8, 2007 |
| 7141809 |
Method for reciprocating a workpiece through an ion beam |
Nov. 28, 2006 |
| 7135691 |
Reciprocating drive for scanning a workpiece through an ion beam |
Nov. 14, 2006 |
| 7077614 |
Sorting/storage device for wafers and method for handling thereof |
Jul. 18, 2006 |
| 7074000 |
Method and apparatus for undocking substrate pod with door status check |
Jul. 11, 2006 |
| 7066703 |
Chuck transport method and system |
Jun. 27, 2006 |
| 7059817 |
Wafer handling apparatus and method |
Jun. 13, 2006 |
| 7021881 |
Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections |
Apr. 4, 2006 |
| 6996453 |
Substrate processing apparatus and method of processing substrate while controlling for contamination in substrate transfer module |
Feb. 7, 2006 |
| 6991416 |
System and method for reticle protection and transport |
Jan. 31, 2006 |
| 6970770 |
Cluster tool and method for controlling transport |
Nov. 29, 2005 |
| 6930050 |
Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing |
Aug. 16, 2005 |
| 6926012 |
Method for supercritical processing of multiple workpieces |
Aug. 9, 2005 |
| 6918731 |
Fast swap dual substrate transport for load lock |
Jul. 19, 2005 |
| 6899507 |
Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections |
May. 31, 2005 |
| 6877946 |
Wafer transport apparatus |
Apr. 12, 2005 |
| 6848882 |
Apparatus and method for positioning a cassette pod onto a loadport by an overhead hoist transport system |
Feb. 1, 2005 |
| 6833035 |
Semiconductor processing system with wafer container docking and loading station |
Dec. 21, 2004 |
| 6821082 |
Wafer management system and methods for managing wafers |
Nov. 23, 2004 |
| 6796763 |
Clean box, clean transfer method and system |
Sep. 28, 2004 |
| 6715978 |
Interbay transfer interface between an automated material handling system and a stocker |
Apr. 6, 2004 |
| 6705828 |
Vacuum processing apparatus and semiconductor manufacturing line using the same |
Mar. 16, 2004 |
| 6663332 |
System for the treatment of wafers |
Dec. 16, 2003 |
| 6638672 |
Exposure apparatus, coating/developing apparatus, method of transferring a substrate, method of producing a device, semiconductor production factory, and method of maintaining an exposure appa |
Oct. 28, 2003 |
| 6609869 |
Transfer chamber with integral loadlock and staging station |
Aug. 26, 2003 |
| 6592318 |
Docking cart with integrated load port |
Jul. 15, 2003 |
| 6575687 |
Wafer transport system |
Jun. 10, 2003 |
| 6568899 |
Wafer processing system including a robot |
May. 27, 2003 |
| 6517304 |
Method for transporting substrates and a semiconductor manufacturing apparatus using the method |
Feb. 11, 2003 |
| 6510365 |
Carrier system positioning method |
Jan. 21, 2003 |
| 6494670 |
Three chamber load lock apparatus |
Dec. 17, 2002 |
| 6481945 |
Method and device for transferring wafers |
Nov. 19, 2002 |
| 6481955 |
Vacuum treatment equipment |
Nov. 19, 2002 |
| 6454519 |
Dual cassette load lock |
Sep. 24, 2002 |
| 6435809 |
Dual arm linear hand-off wafer transfer assembly |
Aug. 20, 2002 |
| 6431807 |
Wafer processing architecture including single-wafer load lock with cooling unit |
Aug. 13, 2002 |
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