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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
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Class Information
Number: 414/226.05
Name: Material or article handling > Apparatus for charging a load holding or supporting element from a source, and means for transporting and presenting element to a working, treating, or inspecting station > Transporting means is a horizontally rotated arm
Description: Subject matter wherein the load transporting means includes a projecting member which supports the load at one end and turns about its vertical axis.


Patents under this class:
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Patent Number Title Of Patent Date Issued
7518699 Cassette for containing liquid crystal display device Apr. 14, 2009
7390458 High throughput processing system and method of using Jun. 24, 2008
7364028 Glass substrate transporting facility Apr. 29, 2008
7270510 Device and method for transporting wafer-shaped articles Sep. 18, 2007
7013198 Robotic carousel workstation Mar. 14, 2006
6979165 Reduced footprint tool for automated processing of microelectronic substrates Dec. 27, 2005
6930762 Master transport apparatus Aug. 16, 2005
6896466 Substrate processing apparatus May. 24, 2005
6811370 Wafer handling robot having X-Y stage for wafer handling and positioning Nov. 2, 2004
6772493 Workpiece changing system Aug. 10, 2004
6736590 Lifting device for substrates May. 18, 2004
6729834 Wafer manipulating and centering apparatus May. 4, 2004
6705816 Wafer transport mechanism Mar. 16, 2004
6675666 Substrate transportation apparatus Jan. 13, 2004
6560510 Simultaneous auto-loading tower May. 6, 2003
6549825 Alignment apparatus Apr. 15, 2003
6517691 Substrate processing system Feb. 11, 2003
6375403 Loading and unloading station for semiconductor processing installations Apr. 23, 2002
6371716 Apparatus and method for unloading substrates Apr. 16, 2002
6371713 Substrate processing apparatus Apr. 16, 2002
6353466 Apparatus for testing an LCD Mar. 5, 2002
6350097 Method and apparatus for processing wafers Feb. 26, 2002
6341929 Cover apparatus of machine tool Jan. 29, 2002
6341928 Pallet changer apparatus Jan. 29, 2002
6319373 Substrate transfer apparatus of substrate processing system Nov. 20, 2001
6290448 Lifting device (pallet device) with pivotal arm Sep. 18, 2001
6210093 Transfer apparatus for a plurality of objects Apr. 3, 2001
6155773 Substrate clamping apparatus Dec. 5, 2000
6116100 Method for automatically assembling a sample cup having a weighted ring on top of a planar sample therewithin and delivering it to a test apparatus Sep. 12, 2000
6085125 Prealigner and planarity teaching station Jul. 4, 2000
5923915 Method and apparatus for processing resist Jul. 13, 1999
5882403 System for providing a controlled deposition on wafers Mar. 16, 1999
5879460 System for providing a controlled deposition on wafers Mar. 9, 1999
5851296 Vacuum processing apparatus and method Dec. 22, 1998
5836735 Robot powered pass thru port for automated cartridge library Nov. 17, 1998
5755546 Apparatus for loading billets and, if necessary, pressing discs into horizontal metal extrusion presses May. 26, 1998
5730574 Transfer apparatus for and method of transferring substrate Mar. 24, 1998
5697751 Wafer transfer apparatus and method Dec. 16, 1997
5697752 Overhead transfer clamp actuator and linkage Dec. 16, 1997
5249663 Apparatus to load workpieces Oct. 5, 1993
5186595 Apparatus for loading and unloading a workpiece Feb. 16, 1993
5064051 Methods of and apparatus for transferring plate-like articles from one location to another Nov. 12, 1991
5024747 Wafer coating system Jun. 18, 1991
4739872 Automated parts handling apparatus Apr. 26, 1988
4714397 Automatic parts feeder Dec. 22, 1987
4627787 Chip selection in automatic assembly of integrated circuit Dec. 9, 1986
4584045 Apparatus for conveying a semiconductor wafer Apr. 22, 1986
4548536 Working apparatus with track following motion Oct. 22, 1985
4490090 Apparatus for transporting frames Dec. 25, 1984
4343584 Apparatus for sequentially transporting containers Aug. 10, 1982

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