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Class Information
Number: 414/222.13
Name: Material or article handling > Apparatus for charging a load holding or supporting element from a source, and means for transporting and presenting element to a working, treating, or inspecting station > Transporting means carries load to at least one of a plurality of fixed stations
Description: Subject matter wherein the load is transported by the transporting means and presented at least to one of many stationary stations.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7534080 |
Vacuum processing and transfer system |
May. 19, 2009 |
| 7390458 |
High throughput processing system and method of using |
Jun. 24, 2008 |
| 7096770 |
Optical recording medium-manufacturing apparatus |
Aug. 29, 2006 |
| 7076865 |
Manufacturing system and method |
Jul. 18, 2006 |
| 7068003 |
System to determine proper wafer alignment |
Jun. 27, 2006 |
| 7066703 |
Chuck transport method and system |
Jun. 27, 2006 |
| 6991710 |
Apparatus for manually and automatically processing microelectronic workpieces |
Jan. 31, 2006 |
| 6926489 |
Latch sensor for pod transport gripper |
Aug. 9, 2005 |
| 6896466 |
Substrate processing apparatus |
May. 24, 2005 |
| 6889818 |
Wafer blade contact monitor |
May. 10, 2005 |
| 6800803 |
Semiconductor manufacturing method and apparatus |
Oct. 5, 2004 |
| 6746198 |
Substrate transfer shuttle |
Jun. 8, 2004 |
| 6745637 |
Self-supporting adaptable metrology device |
Jun. 8, 2004 |
| 6719877 |
Gluing device for auxiliary door seals |
Apr. 13, 2004 |
| 6688840 |
Transport apparatus and method |
Feb. 10, 2004 |
| 6662465 |
Vacuum processing apparatus |
Dec. 16, 2003 |
| 6652215 |
Rotary deblistering apparatus |
Nov. 25, 2003 |
| 6637998 |
Self evacuating micro environment system |
Oct. 28, 2003 |
| 6625899 |
Vacuum processing apparatus |
Sep. 30, 2003 |
| 6560510 |
Simultaneous auto-loading tower |
May. 6, 2003 |
| 6517692 |
Apparatus for flow-line treatment of articles in an artificial medium |
Feb. 11, 2003 |
| 6517691 |
Substrate processing system |
Feb. 11, 2003 |
| 6511315 |
Substrate processing apparatus |
Jan. 28, 2003 |
| 6505415 |
Vacuum processing apparatus |
Jan. 14, 2003 |
| 6487793 |
Vacuum processing apparatus and operating method therefor |
Dec. 3, 2002 |
| 6488778 |
Apparatus and method for controlling wafer environment between thermal clean and thermal processing |
Dec. 3, 2002 |
| 6484414 |
Vacuum processing apparatus |
Nov. 26, 2002 |
| 6484415 |
Vacuum processing apparatus |
Nov. 26, 2002 |
| 6473989 |
Conveying system for a vacuum processing apparatus |
Nov. 5, 2002 |
| 6467186 |
Transferring device for a vacuum processing apparatus and operating method therefor |
Oct. 22, 2002 |
| 6446353 |
Vacuum processing apparatus |
Sep. 10, 2002 |
| 6371713 |
Substrate processing apparatus |
Apr. 16, 2002 |
| 6364592 |
Small footprint carrier front end loader |
Apr. 2, 2002 |
| RE37470 |
Substrate processing apparatus and substrate processing method |
Dec. 18, 2001 |
| 6315879 |
Modular deposition system having batch processing and serial thin film deposition |
Nov. 13, 2001 |
| 6312519 |
Transferring device for optical discs being processed in a disc manufacturing assembly, disc manufacturing assembly incorporating the transferring device, and associated transferring method |
Nov. 6, 2001 |
| 6287067 |
Processing unit and processing unit structure by assembling thereof |
Sep. 11, 2001 |
| 6283692 |
Apparatus for storing and moving a cassette |
Sep. 4, 2001 |
| 6270306 |
Wafer aligner in center of front end frame of vacuum system |
Aug. 7, 2001 |
| 6236902 |
Apparatus and method for retaining a device for processing |
May. 22, 2001 |
| 6190103 |
Wafer transfer device and method |
Feb. 20, 2001 |
| 6139695 |
Modular deposition system having batch processing and serial thin film deposition |
Oct. 31, 2000 |
| 6136168 |
Clean transfer method and apparatus therefor |
Oct. 24, 2000 |
| 6113694 |
Substrate treatment apparatus |
Sep. 5, 2000 |
| 6053687 |
Cost effective modular-linear wafer processing |
Apr. 25, 2000 |
| 6008636 |
Test system with robot arm for delivering a device under test |
Dec. 28, 1999 |
| 5996241 |
Semiconductor wafer processing system with immersion module |
Dec. 7, 1999 |
| 5972110 |
Resist processing system |
Oct. 26, 1999 |
| 5964561 |
Compact apparatus and method for storing and loading semiconductor wafer carriers |
Oct. 12, 1999 |
| 5915396 |
Substrate processing apparatus |
Jun. 29, 1999 |
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