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Class Information
Number: 414/222.02
Name: Material or article handling > Apparatus for charging a load holding or supporting element from a source, and means for transporting and presenting element to a working, treating, or inspecting station > Condition responsive control of transporting means
Description: Subject matter including means for sensing (a) a change in the transported article or (b) a change in (a) the mode of operation of the transporting means or (b) the article-working, treating, or inspecting apparatus and in response to the change, controlling the transporting of the article or controlling the operation of the transporting means (e.g., means for stopping the transporting means if the article is not properly positioned at the station).
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7251354 |
Electronic component inspection apparatus |
Jul. 31, 2007 |
| 7179334 |
System and method for performing semiconductor processing on substrate being processed |
Feb. 20, 2007 |
| 7155813 |
Programmer systems |
Jan. 2, 2007 |
| 7137309 |
High precision gas bearing split-axis stage for transport and constraint of large flat flexible media during processing |
Nov. 21, 2006 |
| 7077019 |
High precision gas bearing split-axis stage for transport and constraint of large flat flexible media during processing |
Jul. 18, 2006 |
| 7062344 |
Fabrication system and fabrication method |
Jun. 13, 2006 |
| 6945258 |
Substrate processing apparatus and method |
Sep. 20, 2005 |
| 6926489 |
Latch sensor for pod transport gripper |
Aug. 9, 2005 |
| 6877220 |
Method for feeding a component |
Apr. 12, 2005 |
| 6835040 |
Laser cutting plate conveyor |
Dec. 28, 2004 |
| 6830651 |
Load port capable of coping with different types of cassette containing substrates to be processed |
Dec. 14, 2004 |
| 6763281 |
Apparatus for alignment of automated workpiece handling systems |
Jul. 13, 2004 |
| 6616401 |
Part-supplying tray feeder and method of picking-up parts in the tray |
Sep. 9, 2003 |
| 6542786 |
Apparatus and method for feeding electronic components |
Apr. 1, 2003 |
| 6536559 |
Goods lift |
Mar. 25, 2003 |
| 6530734 |
Methods and apparatus for positive wafer process status identification during semiconductor wafer processing |
Mar. 11, 2003 |
| 6429016 |
System and method for sample positioning in a robotic system |
Aug. 6, 2002 |
| 6405610 |
Wafer inspection apparatus |
Jun. 18, 2002 |
| 6332751 |
Transfer device centering method and substrate processing apparatus |
Dec. 25, 2001 |
| 6197117 |
Wafer out-of-pocket detector and susceptor leveling tool |
Mar. 6, 2001 |
| 6183831 |
Hard disk vapor lube |
Feb. 6, 2001 |
| 6178361 |
Automatic modular wafer substrate handling device |
Jan. 23, 2001 |
| 6146077 |
Wafer transfer system of semiconductor fabricating equipment using a serial number detecting device |
Nov. 14, 2000 |
| 6145648 |
Method and system for continuously processing successive workpieces along a production line |
Nov. 14, 2000 |
| 6050389 |
Carrier apparatus with more than one carrier belts and processing apparatus therewith |
Apr. 18, 2000 |
| 6019564 |
Semiconductor device transporting and handling apparatus |
Feb. 1, 2000 |
| 6000900 |
Wafer cassette conveying system |
Dec. 14, 1999 |
| 5961722 |
Apparatus for establishing reference coordinates for a point on a component |
Oct. 5, 1999 |
| 5944475 |
Rotated, orthogonal load compatible front-opening interface |
Aug. 31, 1999 |
| 5921459 |
Modular robotic welding station |
Jul. 13, 1999 |
| 5838042 |
DMOS device structure, and related manufacturing process |
Nov. 17, 1998 |
| 5834706 |
Method and apparatus for verifying the contents of packages delivered to or leaving a warehouse |
Nov. 10, 1998 |
| 5820679 |
Fabrication system and method having inter-apparatus transporter |
Oct. 13, 1998 |
| 5805472 |
Test handler for semiconductor devices |
Sep. 8, 1998 |
| 5788448 |
Processing apparatus |
Aug. 4, 1998 |
| 5642298 |
Wafer testing and self-calibration system |
Jun. 24, 1997 |
| 5562382 |
Substrate transport apparatus and substrate transport path adjustment method |
Oct. 8, 1996 |
| 5536128 |
Method and apparatus for carrying a variety of products |
Jul. 16, 1996 |
| 5473258 |
Probe apparatus for carrying away dust created by probe testing |
Dec. 5, 1995 |
| 5436848 |
Method of and device for transporting semiconductor substrate in semiconductor processing system |
Jul. 25, 1995 |
| 5388945 |
Fully automated and computerized conveyor based manufacturing line architectures adapted to pressurized sealable transportable containers |
Feb. 14, 1995 |
| 5297434 |
Method of and apparatus for measuring workpieces |
Mar. 29, 1994 |
| 5250239 |
Process and apparatus for controlling the movements of an injection mold and a handling device |
Oct. 5, 1993 |
| 5214969 |
Automatic testing of a plurality of smoking articles |
Jun. 1, 1993 |
| 5121826 |
Apparatus for and method of transporting groups of laps or empty lap tubes |
Jun. 16, 1992 |
| 5084829 |
Robot machining system having supply and discharge conveyor belts and pallets |
Jan. 28, 1992 |
| RE33780 |
Components feeding apparatus |
Dec. 31, 1991 |
| 5061144 |
Resist process apparatus |
Oct. 29, 1991 |
| 5052875 |
Automated envelope handling system |
Oct. 1, 1991 |
| 5018936 |
Electronic parts engaging apparatus |
May. 28, 1991 |
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