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Class Information
Number: 414/221
Name: Material or article handling > Apparatus for moving material between zones having different pressures and inhibiting change in pressure gradient therebetween > Including serially arranged valves in path having a vertical component (e.g., airlocks, etc.)
Description: Apparatus wherein the enabling and inhibiting means includes two or more successive valves, located in a path wherein the material moves under the influence of gravity, which cooperate one with another to receive, isolate, and release a quantity of material.


Patents under this class:
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Patent Number Title Of Patent Date Issued
7575220 Curved slit valve door Aug. 18, 2009
7193682 Exposure apparatus and device manufacturing method Mar. 20, 2007
7083161 Method and apparatus for providing vacuum isolation Aug. 1, 2006
7076920 Method of using a combination differential and absolute pressure transducer for controlling a load lock Jul. 18, 2006
6916009 Load-lock device for introducing substrates into a vacuum chamber Jul. 12, 2005
6858119 Mobile plating system and method Feb. 22, 2005
6824617 Input/output valve switching apparatus of semiconductor manufacturing system Nov. 30, 2004
6755980 Process to remove solid slag particles from a mixture of solid slag particles and water Jun. 29, 2004
6742977 Substrate processing device, substrate conveying device, and substrate processing method Jun. 1, 2004
6619901 Method and apparatus for air guidance in a processing chamber Sep. 16, 2003
6551044 Bellows isolation for index platforms Apr. 22, 2003
6517691 Substrate processing system Feb. 11, 2003
6503379 Mobile plating system and method Jan. 7, 2003
6394733 Substrate body transfer apparatus May. 28, 2002
6358377 Apparatus for sputter-coating glass and corresponding method Mar. 19, 2002
6325856 Vacuum treatment equipment Dec. 4, 2001
6319373 Substrate transfer apparatus of substrate processing system Nov. 20, 2001
6315512 Systems and methods for robotic transfer of workpieces between a storage area and a processing chamber Nov. 13, 2001
6315879 Modular deposition system having batch processing and serial thin film deposition Nov. 13, 2001
6309161 Load lock with vertically movable support Oct. 30, 2001
6250869 Three chamber load lock apparatus Jun. 26, 2001
6231290 Processing method and processing unit for substrate May. 15, 2001
6139695 Modular deposition system having batch processing and serial thin film deposition Oct. 31, 2000
6000905 High speed in-vacuum flat panel display handler Dec. 14, 1999
5961269 Three chamber load lock apparatus Oct. 5, 1999
5810930 Photo-chemical vapor deposition apparatus having exchange apparatus of optical window and method of exchanging optical window therewith Sep. 22, 1998
5793050 Ion implantation system for implanting workpieces Aug. 11, 1998
5707198 Method and device for discharging particulate material from a pressurized container Jan. 13, 1998
5470473 Rotary vacuum filtration drum with valved hopper cake treatment means Nov. 28, 1995
5421979 Load-lock drum-type coating apparatus Jun. 6, 1995
5405231 Conveyor with rotary airlock apparatus Apr. 11, 1995
5388537 System for burning refuse-derived fuel Feb. 14, 1995
5364225 Method of printed circuit panel manufacture Nov. 15, 1994
5308989 Fluid flow control method and apparatus for an ion implanter May. 3, 1994
5275215 Vacuum fill system Jan. 4, 1994
5234037 Vacuum fill system Aug. 10, 1993
5226781 Process and installation for transferring products from a contaminated enclosure into a second enclosure without contaminating the latter Jul. 13, 1993
5176189 Device for transport of material between chambers at different pressures and process for operation of this device Jan. 5, 1993
5171541 Fluidized bed discharge process Dec. 15, 1992
5147168 Loading and unloading airlock apparatus for a vacuum treatment chamber Sep. 15, 1992
5131797 Swipe transfer assembly Jul. 21, 1992
5067218 Vacuum wafer transport and processing system and method using a plurality of wafer transport arms Nov. 26, 1991
5066186 Dust discharging apparatus for a furnace Nov. 19, 1991
4983188 Apparatus for relieving a lock chamber for ash from pressure Jan. 8, 1991
4948979 Vacuum device for handling workpieces Aug. 14, 1990
4943457 Vacuum slice carrier Jul. 24, 1990
4927312 Chip gates with air lock May. 22, 1990
4886592 Apparatus on the carousel principle for coating substrates Dec. 12, 1989
4862649 Material transfer system Sep. 5, 1989
4857160 High vacuum processing system and method Aug. 15, 1989

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