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Class Information
Number: 414/217
Name: Material or article handling > Apparatus for moving material between zones having different pressures and inhibiting change in pressure gradient therebetween
Description: Apparatus comprising means to move or enable gravity movement of material from a region having a particular pressure to a region having another pressure and prevent or significantly retard any change in the pressure differential between the regions.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618225 |
Six-bar linkage positioning mechanism |
Nov. 17, 2009 |
| 7618226 |
Semiconductor substrate transfer apparatus and semiconductor substrate processing apparatus equipped with the same |
Nov. 17, 2009 |
| 7614840 |
Wafer processing apparatus having dust proof function |
Nov. 10, 2009 |
| 7611124 |
Vacuum processing apparatus |
Nov. 3, 2009 |
| 7611322 |
Processing thin wafers |
Nov. 3, 2009 |
| 7611319 |
Methods and apparatus for identifying small lot size substrate carriers |
Nov. 3, 2009 |
| 7607879 |
Substrate processing apparatus with removable component module |
Oct. 27, 2009 |
| 7607880 |
Wafer processing apparatus having dust proof function |
Oct. 27, 2009 |
| 7605718 |
Monitoring device for transport pods |
Oct. 20, 2009 |
| 7597523 |
Variable lot size load port |
Oct. 6, 2009 |
| 7591624 |
Reticle storage pod (RSP) transport system utilizing FOUP adapter plate |
Sep. 22, 2009 |
| 7591625 |
Carrying mechanism, a carrying device and a vacuum processing apparatus |
Sep. 22, 2009 |
| 7592261 |
Method for suppressing charging of component in vacuum processing chamber of plasma processing system and plasma processing system |
Sep. 22, 2009 |
| 7585144 |
Variable lot size load port |
Sep. 8, 2009 |
| 7585142 |
Substrate handling chamber with movable substrate carrier loading platform |
Sep. 8, 2009 |
| 7585141 |
Load lock system for ion beam processing |
Sep. 8, 2009 |
| 7581916 |
Sample introduction and transfer system and method |
Sep. 1, 2009 |
| 7578650 |
Quick swap load port |
Aug. 25, 2009 |
| 7575406 |
Substrate processing apparatus |
Aug. 18, 2009 |
| 7559730 |
Cassette device for accepting substrates |
Jul. 14, 2009 |
| 7558645 |
Overhead travelling carriage system |
Jul. 7, 2009 |
| 7537425 |
Wafer processing apparatus having dust proof function |
May. 26, 2009 |
| 7534080 |
Vacuum processing and transfer system |
May. 19, 2009 |
| 7531816 |
Vacuum conveying apparatus and charged particle beam equipment with the same |
May. 12, 2009 |
| 7507264 |
Transport apparatus |
Mar. 24, 2009 |
| 7496423 |
Method of achieving high productivity fault tolerant photovoltaic factory with batch array transfer robots |
Feb. 24, 2009 |
| 7490714 |
Transport device, in particular for use in a vacuum chamber |
Feb. 17, 2009 |
| 7470098 |
Detecting apparatus and detecting method |
Dec. 30, 2008 |
| 7467916 |
Semiconductor-manufacturing apparatus equipped with cooling stage and semiconductor-manufacturing method using same |
Dec. 23, 2008 |
| 7458763 |
Mid-entry load lock for semiconductor handling system |
Dec. 2, 2008 |
| 7452174 |
Load-lock and semiconductor device manufacturing equipment comprising the same |
Nov. 18, 2008 |
| 7446872 |
Positioning apparatus and positioning method using the same |
Nov. 4, 2008 |
| 7438514 |
Wafer transfer system |
Oct. 21, 2008 |
| 7438175 |
Linear vacuum deposition system |
Oct. 21, 2008 |
| 7428958 |
Substrate conveyor apparatus, substrate conveyance method and exposure apparatus |
Sep. 30, 2008 |
| 7422406 |
Stacked process modules for a semiconductor handling system |
Sep. 9, 2008 |
| 7419346 |
Integrated system for tool front-end workpiece handling |
Sep. 2, 2008 |
| 7407358 |
Interback-type substrate processing device |
Aug. 5, 2008 |
| 7399154 |
Vacuum processing system being able to carry process object into and out of vacuum chamber |
Jul. 15, 2008 |
| 7396199 |
Substrate processing apparatus and substrate processing method |
Jul. 8, 2008 |
| 7387484 |
Wafer positioning systems and methods thereof |
Jun. 17, 2008 |
| 7384228 |
Insertion device, lithographic apparatus with said insertion device and device manufacturing method |
Jun. 10, 2008 |
| 7384484 |
Substrate processing method, substrate processing apparatus and substrate processing system |
Jun. 10, 2008 |
| 7381969 |
Load lock control |
Jun. 3, 2008 |
| 7381673 |
Composite material, wafer holding member and method for manufacturing the same |
Jun. 3, 2008 |
| 7377736 |
Cylinder, load port using it, and production system |
May. 27, 2008 |
| 7374386 |
Fast swap dual substrate transport for load lock |
May. 20, 2008 |
| 7375041 |
Transfer chamber for cluster system |
May. 20, 2008 |
| 7367769 |
Semiconductor production system, cluster tool, control method of semiconductor production system and maintenance method of cluster tool |
May. 6, 2008 |
| 7360985 |
Wafer processing apparatus including clean box stopping mechanism |
Apr. 22, 2008 |
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