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Class Information
Number: 414/217
Name: Material or article handling > Apparatus for moving material between zones having different pressures and inhibiting change in pressure gradient therebetween
Description: Apparatus comprising means to move or enable gravity movement of material from a region having a particular pressure to a region having another pressure and prevent or significantly retard any change in the pressure differential between the regions.

Sub-classes under this class:

Class Number Class Name Patents
414/217.1 For carrying standarized mechanical interface (smif) type 204
414/218 Including screw conveyor 39
414/221 Including serially arranged valves in path having a vertical component (e.g., airlocks, etc.) 96
414/219 Including trap chamber having horizontal axis of rotation 54

Patents under this class:

Patent Number Title Of Patent Date Issued
8702365 Substrate processing apparatus and method for transferring substrate for the apparatus Apr. 22, 2014
8684650 Methods for introduction of a reactive material into a vacuum chamber Apr. 1, 2014
8672603 Auto-sequencing inline processing apparatus Mar. 18, 2014
8668422 Low cost high throughput processing platform Mar. 11, 2014
8662812 Load lock fast pump vent Mar. 4, 2014
8662811 Substrate processing apparatus Mar. 4, 2014
8656858 Device and method for chemically and electrolytically treating work pieces using a conveyor system to transport work pieces between treatment tanks Feb. 25, 2014
8651790 Warehouse storage system Feb. 18, 2014
8651789 Substrate processing apparatus Feb. 18, 2014
8641351 Robot and instruction method thereof Feb. 4, 2014
8636458 Integrated post-exposure bake track Jan. 28, 2014
8628289 Material handling and storage/warehouse system Jan. 14, 2014
8628288 Substrate transport apparatus with active edge gripper Jan. 14, 2014
8623765 Processed object processing apparatus, processed object processing method, pressure control method, processed object transfer method, and transfer apparatus Jan. 7, 2014
8616821 Integrated apparatus to assure wafer quality and manufacturability Dec. 31, 2013
8616820 Double dual slot load lock chamber Dec. 31, 2013
8608422 Particle sticking prevention apparatus and plasma processing apparatus Dec. 17, 2013
8606400 Robot system Dec. 10, 2013
8602706 Substrate processing apparatus Dec. 10, 2013
8588950 Substrate processing apparatus Nov. 19, 2013
8574366 Vacuum processing apparatus Nov. 5, 2013
8569718 Charged particle beam system Oct. 29, 2013
8562272 Substrate load and unload mechanisms for high throughput Oct. 22, 2013
8562271 Compact substrate transport system Oct. 22, 2013
8550031 Cluster tool architecture for processing a substrate Oct. 8, 2013
8545165 High speed substrate aligner apparatus Oct. 1, 2013
8545160 Substrate transfer apparatus and substrate transfer method Oct. 1, 2013
8545159 Apparatus having conveyor and method of transferring substrate using the same Oct. 1, 2013
8540473 Load port Sep. 24, 2013
8534976 Apparatus for providing a rotation carrier magazine, and method of operating thereof Sep. 17, 2013
8534975 Substrate transport apparatus and method for manufacturing magnetic recording medium Sep. 17, 2013
8523507 Semiconductor manufacturing systems Sep. 3, 2013
8523138 Vacuum processing apparatus Sep. 3, 2013
8522958 Vacuum processing apparatus Sep. 3, 2013
8505212 Method for reconditioning or processing a FCR APG-68 tactical radar unit Aug. 13, 2013
8500382 Airflow management for particle abatement in semiconductor manufacturing equipment Aug. 6, 2013
8499784 Lock valve in particular for a strip processing unit Aug. 6, 2013
8491248 Loadlock designs and methods for using same Jul. 23, 2013
8489237 High throughput method of in transit wafer position correction in a system using multiple robots Jul. 16, 2013
8489227 Transport method and transport apparatus Jul. 16, 2013
8486222 Substrate processing apparatus and method of manufacturing a semiconductor device Jul. 16, 2013
8480346 Apparatus for loading and unloading semiconductor substrate platelets Jul. 9, 2013
8473095 Substrate processing apparatus, method of displaying error of substrate processing apparatus and transfer control method Jun. 25, 2013
8469650 Method of controlling pressure in a wafer transfer system Jun. 25, 2013
8459922 Manipulator auto-teach and position correction system Jun. 11, 2013
8459625 Device for securing vehicle body to conveyor carrier Jun. 11, 2013
8454294 Minimum contact area wafer clamping with gas flow for rapid wafer cooling Jun. 4, 2013
8454293 Substrate loading and unloading station with buffer Jun. 4, 2013
8444363 Substrate processing apparatus May. 21, 2013
8443513 Substrate processing apparatus May. 21, 2013

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