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Class Information
Number: 392/418
Name: Electric resistance heating devices > Heating devices (class 219 subclass 200) > Radiant heater > With support for workpiece
Description: Subject matter wherein the radiant heater includes structural means to position a workpiece with respect to a base or structure.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7616872 |
Temperature measurement and heat-treating methods and systems |
Nov. 10, 2009 |
| 7608802 |
Heating device for heating semiconductor wafers in thermal processing chambers |
Oct. 27, 2009 |
| 7598150 |
Compensation techniques for substrate heating processes |
Oct. 6, 2009 |
| 7554059 |
Heater unit and semiconductor manufacturing apparatus including the same |
Jun. 30, 2009 |
| 7528347 |
Cooling device and heat treating device using the same |
May. 5, 2009 |
| 7528349 |
Temperature stabilization for substrate processing |
May. 5, 2009 |
| 7525068 |
Heating system of batch type reaction chamber and method thereof |
Apr. 28, 2009 |
| 7522823 |
Thermal processing apparatus, thermal processing method, and substrate processing apparatus |
Apr. 21, 2009 |
| 7509035 |
Lamp array for thermal processing exhibiting improved radial uniformity |
Mar. 24, 2009 |
| 7491913 |
Bake apparatus for use in spin-coating equipment |
Feb. 17, 2009 |
| 7489858 |
Heater assembly |
Feb. 10, 2009 |
| 7466907 |
Annealing process and device of semiconductor wafer |
Dec. 16, 2008 |
| 7453051 |
System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy |
Nov. 18, 2008 |
| 7432475 |
Vertical heat treatment device and method controlling the same |
Oct. 7, 2008 |
| 7429718 |
Heating and cooling of substrate support |
Sep. 30, 2008 |
| 7429717 |
Multizone heater for furnace |
Sep. 30, 2008 |
| 7404670 |
Analytical furnace with predictive temperature control |
Jul. 29, 2008 |
| 7402778 |
Oven for controlled heating of compounds at varying temperatures |
Jul. 22, 2008 |
| 7398014 |
Enhanced rapid thermal processing apparatus and method |
Jul. 8, 2008 |
| 7393797 |
Method for thermal processing a semiconductor wafer |
Jul. 1, 2008 |
| 7389903 |
Device and method for soldering contacts on semiconductor chips |
Jun. 24, 2008 |
| 7381928 |
Thermal processing apparatus and thermal processing method |
Jun. 3, 2008 |
| 7378618 |
Rapid conductive cooling using a secondary process plane |
May. 27, 2008 |
| 7371997 |
Thermal processing apparatus and thermal processing method |
May. 13, 2008 |
| 7371998 |
Thermal wafer processor |
May. 13, 2008 |
| 7358462 |
Apparatus and method for reducing stray light in substrate processing chambers |
Apr. 15, 2008 |
| 7351936 |
Method and apparatus for preventing baking chamber exhaust line clog |
Apr. 1, 2008 |
| 7346273 |
Substrate processing equipment |
Mar. 18, 2008 |
| 7335267 |
Heat treating apparatus having rotatable heating unit |
Feb. 26, 2008 |
| 7335858 |
Toaster using infrared heating for reduced toasting time |
Feb. 26, 2008 |
| 7332691 |
Cooling plate, bake unit, and substrate treating apparatus |
Feb. 19, 2008 |
| 7324745 |
Seat trim heater |
Jan. 29, 2008 |
| 7321722 |
Method for thermal processing a semiconductor wafer |
Jan. 22, 2008 |
| 7317172 |
Bake system |
Jan. 8, 2008 |
| 7311779 |
Heating apparatus to heat wafers using water and plate with turbolators |
Dec. 25, 2007 |
| 7312422 |
Semiconductor batch heating assembly |
Dec. 25, 2007 |
| 7274867 |
System and method for determining the temperature of a semiconductor wafer |
Sep. 25, 2007 |
| 7274006 |
Heater |
Sep. 25, 2007 |
| 7262390 |
Apparatus and adjusting technology for uniform thermal processing |
Aug. 28, 2007 |
| 7256370 |
Vacuum thermal annealer |
Aug. 14, 2007 |
| 7238920 |
Modular bat warming system |
Jul. 3, 2007 |
| 7239804 |
Cooling device, and apparatus and method for manufacturing image display panel using cooling device |
Jul. 3, 2007 |
| 7218847 |
Heating unit for heating a workpiece with light-absorbing heat conducting layer |
May. 15, 2007 |
| 7211769 |
Heating chamber and method of heating a wafer |
May. 1, 2007 |
| 7204887 |
Wafer holding, wafer support member, wafer boat and heat treatment furnace |
Apr. 17, 2007 |
| 7197239 |
Seat dewrinkling method and apparatus |
Mar. 27, 2007 |
| 7184657 |
Enhanced rapid thermal processing apparatus and method |
Feb. 27, 2007 |
| 7173216 |
LED heat lamp arrays for CVD heating |
Feb. 6, 2007 |
| 7166187 |
Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling |
Jan. 23, 2007 |
| 7159535 |
Apparatus for heating and curing powder coatings on porous wood products |
Jan. 9, 2007 |
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