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Browse by Category: Main > Electrical & Energy
Class Information
Number: 392/416
Name: Electric resistance heating devices > Heating devices (class 219 subclass 200) > Radiant heater > With chamber
Description: Subject matter wherein the heating device is located in an enclosed cavity.










Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16

Patent Number Title Of Patent Date Issued
8693857 Irradiance pulse heat-treating methods and apparatus Apr. 8, 2014
8691676 Substrate heat treating apparatus, temperature control method of substrate heat treating apparatus, manufacturing method of semiconductor device, temperature control program of substrate heat Apr. 8, 2014
8692161 Furnace system with case integrated cooling system Apr. 8, 2014
8692168 Infrared heating panels, systems and methods Apr. 8, 2014
8693855 Infra-red heater assembly Apr. 8, 2014
8693856 Apparatus and methods for vacuum-compatible substrate thermal management Apr. 8, 2014
8676044 Dynamic sauna Mar. 18, 2014
8669496 System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy Mar. 11, 2014
8666237 Cooker and controlling method for the same Mar. 4, 2014
8658947 Rapid conductive cooling using a secondary process plane Feb. 25, 2014
8637792 Conveyor oven with adjustable air vents Jan. 28, 2014
8624165 Heat treatment apparatus for heating substrate by irradiating substrate with flashes of light Jan. 7, 2014
8618446 Substrate support with substrate heater and symmetric RF return Dec. 31, 2013
8618442 Nozzle housing assembly Dec. 31, 2013
8610033 Rapid thermal process reactor utilizing a low profile dome Dec. 17, 2013
8584612 UV lamp assembly of degas chamber having rotary shutters Nov. 19, 2013
8588593 Dynamic sauna Nov. 19, 2013
8582962 Substrate processing chamber with dielectric barrier discharge lamp assembly Nov. 12, 2013
8571396 Rapid thermal firing IR conveyor furnace having high intensity heating section Oct. 29, 2013
8569647 Heat treatment apparatus Oct. 29, 2013
8563900 Charcoal smoke-far infrared ray radiating oven Oct. 22, 2013
8552346 Methods and apparatus for controlling temperature of a multi-zone heater in an process chamber Oct. 8, 2013
8541717 Device for remotely detonating explosives Sep. 24, 2013
8538249 Broiler for cooking appliances Sep. 17, 2013
8521013 Temperature sensing device and heating device Aug. 27, 2013
8498526 Wire mesh thermal radiative element and use in a radiative oven Jul. 30, 2013
8467668 Infrared room heater system Jun. 18, 2013
8457479 Rapid thermal processing apparatus and method of manufacture of semiconductor device Jun. 4, 2013
8455293 Method for processing solar cell substrates Jun. 4, 2013
8450652 Apparatus for thermally treating semiconductor substrates May. 28, 2013
8450658 Semiconductor processing apparatus May. 28, 2013
8452166 Apparatus and method for measuring radiation energy during thermal processing May. 28, 2013
8440941 Heat treatment apparatus, heat treatment method and method for manufacturing semiconductor device May. 14, 2013
8426323 Substrate processing apparatus, substrate annealing method, and semiconductor device manufacturing method Apr. 23, 2013
8428448 Walking beam type heat treatment apparatus Apr. 23, 2013
8367983 Apparatus including heating source reflective filter for pyrometry Feb. 5, 2013
8367976 Laser heating of aqueous samples on a micro-optical-electro-mechanical system Feb. 5, 2013
8367975 Temperature adjustment method Feb. 5, 2013
8357878 UV LED based lamp for compact UV curing lamp assemblies Jan. 22, 2013
8355624 Susceptor for heat treatment and heat treatment apparatus Jan. 15, 2013
8346068 Substrate rotating and oscillating apparatus for rapid thermal process Jan. 1, 2013
8314368 Silver reflectors for semiconductor processing chambers Nov. 20, 2012
8315510 Light emitting type heat treatment apparatus Nov. 20, 2012
8309421 Dual-bulb lamphead control methodology Nov. 13, 2012
8298372 Quartz window having gas feed and processing equipment incorporating same Oct. 30, 2012
8294068 Rapid thermal processing lamphead with improved cooling Oct. 23, 2012
8295691 Heat treatment apparatus Oct. 23, 2012
8283607 Apparatus including heating source reflective filter for pyrometry Oct. 9, 2012
8254767 Method and apparatus for extended temperature pyrometry Aug. 28, 2012
8253075 Heat treatment apparatus, heater, and method for manufacturing the heater Aug. 28, 2012

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