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Class Information
Number: 392/416
Name: Electric resistance heating devices > Heating devices (class 219 subclass 200) > Radiant heater > With chamber
Description: Subject matter wherein the heating device is located in an enclosed cavity.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7619184 |
Multi-parameter process and control method |
Nov. 17, 2009 |
| 7616872 |
Temperature measurement and heat-treating methods and systems |
Nov. 10, 2009 |
| 7608802 |
Heating device for heating semiconductor wafers in thermal processing chambers |
Oct. 27, 2009 |
| 7601933 |
Heat processing apparatus and heat processing method |
Oct. 13, 2009 |
| 7570876 |
Method and system for loading substrate supports into a substrate holder |
Aug. 4, 2009 |
| 7560669 |
Method of thermal treatment of components |
Jul. 14, 2009 |
| 7552529 |
Method for assembling electronic circuits |
Jun. 30, 2009 |
| 7554059 |
Heater unit and semiconductor manufacturing apparatus including the same |
Jun. 30, 2009 |
| 7534977 |
Heat treatment apparatus and method of manufacturing a semiconductor device |
May. 19, 2009 |
| 7528347 |
Cooling device and heat treating device using the same |
May. 5, 2009 |
| 7528349 |
Temperature stabilization for substrate processing |
May. 5, 2009 |
| 7528348 |
Apparatus and method for measuring the temperature of substrates |
May. 5, 2009 |
| 7527497 |
Heat treating apparatus, heat treating method, and storage medium |
May. 5, 2009 |
| 7525068 |
Heating system of batch type reaction chamber and method thereof |
Apr. 28, 2009 |
| 7522822 |
Halogen lamp assembly with integrated heat sink |
Apr. 21, 2009 |
| 7509035 |
Lamp array for thermal processing exhibiting improved radial uniformity |
Mar. 24, 2009 |
| 7501607 |
Apparatuses and methods for suppressing thermally-induced motion of a workpiece |
Mar. 10, 2009 |
| 7491913 |
Bake apparatus for use in spin-coating equipment |
Feb. 17, 2009 |
| 7489858 |
Heater assembly |
Feb. 10, 2009 |
| 7466907 |
Annealing process and device of semiconductor wafer |
Dec. 16, 2008 |
| 7453051 |
System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy |
Nov. 18, 2008 |
| 7432475 |
Vertical heat treatment device and method controlling the same |
Oct. 7, 2008 |
| 7429717 |
Multizone heater for furnace |
Sep. 30, 2008 |
| 7429718 |
Heating and cooling of substrate support |
Sep. 30, 2008 |
| 7414224 |
Backside rapid thermal processing of patterned wafers |
Aug. 19, 2008 |
| 7409850 |
Systems and methods for maximizing heat transfer efficiency to and minimizing thermal gradients in an analytic column |
Aug. 12, 2008 |
| 7402782 |
Baking device and baking method of baking a chemically amplified resist film containing an acid (H.sup.+) generator before exposure but after development |
Jul. 22, 2008 |
| 7393797 |
Method for thermal processing a semiconductor wafer |
Jul. 1, 2008 |
| 7383875 |
Heating/cooling method, manufacturing method of image displaying apparatus, heating/cooling apparatus, and heating/cooling processing apparatus |
Jun. 10, 2008 |
| 7381928 |
Thermal processing apparatus and thermal processing method |
Jun. 3, 2008 |
| 7378618 |
Rapid conductive cooling using a secondary process plane |
May. 27, 2008 |
| 7371998 |
Thermal wafer processor |
May. 13, 2008 |
| 7358462 |
Apparatus and method for reducing stray light in substrate processing chambers |
Apr. 15, 2008 |
| 7351936 |
Method and apparatus for preventing baking chamber exhaust line clog |
Apr. 1, 2008 |
| 7347901 |
Thermally zoned substrate holder assembly |
Mar. 25, 2008 |
| 7335267 |
Heat treating apparatus having rotatable heating unit |
Feb. 26, 2008 |
| 7335858 |
Toaster using infrared heating for reduced toasting time |
Feb. 26, 2008 |
| 7332691 |
Cooling plate, bake unit, and substrate treating apparatus |
Feb. 19, 2008 |
| RE40052 |
Heat treatment apparatus |
Feb. 12, 2008 |
| 7327947 |
Heat treating apparatus and method |
Feb. 5, 2008 |
| 7327948 |
Cast pedestal with heating element and coaxial heat exchanger |
Feb. 5, 2008 |
| 7323663 |
Multi-purpose oven using infrared heating for reduced cooking time |
Jan. 29, 2008 |
| 7321722 |
Method for thermal processing a semiconductor wafer |
Jan. 22, 2008 |
| 7317870 |
Pulsed processing semiconductor heating methods using combinations of heating sources |
Jan. 8, 2008 |
| 7317172 |
Bake system |
Jan. 8, 2008 |
| 7312422 |
Semiconductor batch heating assembly |
Dec. 25, 2007 |
| 7285758 |
Rapid thermal processing lamp and method for manufacturing the same |
Oct. 23, 2007 |
| 7283734 |
Rapid thermal processing apparatus and method of manufacture of semiconductor device |
Oct. 16, 2007 |
| 7274867 |
System and method for determining the temperature of a semiconductor wafer |
Sep. 25, 2007 |
| 7274006 |
Heater |
Sep. 25, 2007 |
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