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Class Information
Number: 384/12
Name: Bearings > Linear bearing > Fluid bearing
Description: Subject matter wherein fluid under pressure is used to support an element in whole or in part during relative rectilinear movement.

Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8608382 Static-pressure bearing apparatus and stage comprising static-pressure bearing apparatus Dec. 17, 2013
8568032 Clean room-suitable linear guide Oct. 29, 2013
8556509 Active compensating hydrostatic bearing and hydrostatic bearing module using the same Oct. 15, 2013
8550718 Linear slide table Oct. 8, 2013
8529130 Aerostatic bearing arrangement and associated electrostatic preloading unit, particularly for vacuum application Sep. 10, 2013
8468690 Holding member for use in test and method for manufacturing same Jun. 25, 2013
8333512 Self-compensating hydrostatic planar bearing device and method thereof Dec. 18, 2012
8297842 Air guide Oct. 30, 2012
8282281 Air bearing with consideration of high-frequency resonances Oct. 9, 2012
8277123 Fluid bearing structure and method of forming bearing concaves in fluid bearing structure Oct. 2, 2012
8279408 Object support positioning device and lithographic apparatus Oct. 2, 2012
8267582 Table guided by aerostatic bearing elements for vacuum application Sep. 18, 2012
8191227 Methods of processing a substrate using a flat surface air bearing assembly Jun. 5, 2012
8167491 Hydrostatic mounting May. 1, 2012
8136992 Hydrostatic mounting Mar. 20, 2012
8043007 Hydrostatic profile rail guide Oct. 25, 2011
8001691 Method for manufacturing hydrodynamic bearing and shaft Aug. 23, 2011
7978307 Gas bearing, and lithographic apparatus provided with such a bearing Jul. 12, 2011
7946767 Hydrostatic bearing and stage apparatus May. 24, 2011
7922392 Hydrostatic profile rail guide Apr. 12, 2011
7845853 Hydrostatic bearing Dec. 7, 2010
7802920 Static-pressure gas bearing mechanism Sep. 28, 2010
7785009 Slide guiding device Aug. 31, 2010
7780424 Self leveling dynamically stable radial bearing Aug. 24, 2010
7722256 Flat surface air bearing assembly May. 25, 2010
7682081 Sliding bearing with improved surface topography Mar. 23, 2010
7682082 Compact surface self-compensated hydrostatic bearings Mar. 23, 2010
7682546 Disk alignment apparatus and method for patterned media production Mar. 23, 2010
7651272 Method of assembling air bearing, air bearing and linear drive unit equipped with the same Jan. 26, 2010
7624661 Supporting unit, and moving table device and linear-motion guiding device that use the supporting unit Dec. 1, 2009
7566997 Gas bearing system Jul. 28, 2009
7531816 Vacuum conveying apparatus and charged particle beam equipment with the same May. 12, 2009
7530778 High-Performance non-contact support platforms May. 12, 2009
7497014 Sliding bearing and method for the manufacture thereof Mar. 3, 2009
7458158 Method of making a sliding bearing Dec. 2, 2008
7311444 Hydrostatic bearing for linear motion guidance Dec. 25, 2007
7311036 Pneumatic cylinder Dec. 25, 2007
7290931 Vacuum pre-loaded pneumatic bearing with onboard vacuum generator Nov. 6, 2007
7287906 Hydrostatic bearing for linear motion guidance Oct. 30, 2007
7284906 Exhaust apparatus and control method for same, and vacuum-use hydrostatic bearing Oct. 23, 2007
7284907 Gas bearing system Oct. 23, 2007
7275871 Fluid dynamic bearing structure and method of adjusting bearing gap Oct. 2, 2007
7275870 Air bearing structure and linear driving device using said air bearing structure Oct. 2, 2007
7255478 Transporting apparatus Aug. 14, 2007
7249889 Sliding guide apparatus Jul. 31, 2007
7232257 Hydrostatic bearing and stage apparatus using same Jun. 19, 2007
7232286 Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber Jun. 19, 2007
7207720 Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method Apr. 24, 2007
7189002 Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for hydrostatic gas bearing device Mar. 13, 2007
7168358 Static pressure sliding block Jan. 30, 2007

1 2 3 4 5

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