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Class Information
Number: 384/12
Name: Bearings > Linear bearing > Fluid bearing
Description: Subject matter wherein fluid under pressure is used to support an element in whole or in part during relative rectilinear movement.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7624661 |
Supporting unit, and moving table device and linear-motion guiding device that use the supporting unit |
Dec. 1, 2009 |
| 7566997 |
Gas bearing system |
Jul. 28, 2009 |
| 7530778 |
High-Performance non-contact support platforms |
May. 12, 2009 |
| 7531816 |
Vacuum conveying apparatus and charged particle beam equipment with the same |
May. 12, 2009 |
| 7497014 |
Sliding bearing and method for the manufacture thereof |
Mar. 3, 2009 |
| 7458158 |
Method of making a sliding bearing |
Dec. 2, 2008 |
| 7311036 |
Pneumatic cylinder |
Dec. 25, 2007 |
| 7311444 |
Hydrostatic bearing for linear motion guidance |
Dec. 25, 2007 |
| 7290931 |
Vacuum pre-loaded pneumatic bearing with onboard vacuum generator |
Nov. 6, 2007 |
| 7287906 |
Hydrostatic bearing for linear motion guidance |
Oct. 30, 2007 |
| 7284907 |
Gas bearing system |
Oct. 23, 2007 |
| 7284906 |
Exhaust apparatus and control method for same, and vacuum-use hydrostatic bearing |
Oct. 23, 2007 |
| 7275870 |
Air bearing structure and linear driving device using said air bearing structure |
Oct. 2, 2007 |
| 7275871 |
Fluid dynamic bearing structure and method of adjusting bearing gap |
Oct. 2, 2007 |
| 7255478 |
Transporting apparatus |
Aug. 14, 2007 |
| 7249889 |
Sliding guide apparatus |
Jul. 31, 2007 |
| 7232257 |
Hydrostatic bearing and stage apparatus using same |
Jun. 19, 2007 |
| 7232286 |
Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber |
Jun. 19, 2007 |
| 7207720 |
Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method |
Apr. 24, 2007 |
| 7189002 |
Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for hydrostatic gas bearing device |
Mar. 13, 2007 |
| 7168358 |
Static pressure sliding block |
Jan. 30, 2007 |
| 7144160 |
Hydrodynamic bearing apparatus and stage apparatus using the same |
Dec. 5, 2006 |
| 7140775 |
Sliding guide apparatus |
Nov. 28, 2006 |
| 7101080 |
Hydrostatic pressure linear guide device |
Sep. 5, 2006 |
| 7093979 |
Aerostatic bearing |
Aug. 22, 2006 |
| 7059607 |
Positioning apparatus |
Jun. 13, 2006 |
| 7052182 |
Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for the hydrostatic gas bearing device |
May. 30, 2006 |
| 7018103 |
Active vibration damping in a machine tool |
Mar. 28, 2006 |
| 6990737 |
Fluid bearings and vacuum chucks and methods for producing same |
Jan. 31, 2006 |
| 6903056 |
Fluid bearing unit and lubricating oil composition for bearing |
Jun. 7, 2005 |
| 6872002 |
Bearing material for porous hydrostatic gas bearing and porous hydrostatic gas bearing using the same |
Mar. 29, 2005 |
| 6735867 |
Method of making a static pressure air bearing |
May. 18, 2004 |
| 6732610 |
Slide apparatus and its stage mechanism for use in vacuum |
May. 11, 2004 |
| 6655838 |
Shuttle compensated hydrostatic bearing |
Dec. 2, 2003 |
| 6644856 |
Hydrostatic bearing device |
Nov. 11, 2003 |
| 6629778 |
Fluid pressure bearing |
Oct. 7, 2003 |
| 6526870 |
Fluid pressure cylinder |
Mar. 4, 2003 |
| 6510755 |
Slide apparatus and its stage mechanism for use in vacuum |
Jan. 28, 2003 |
| 6502987 |
Precision air bearing slide and stage assembly for controlled linear motion |
Jan. 7, 2003 |
| 6499880 |
Static pressure air bearing |
Dec. 31, 2002 |
| 6491435 |
Linear robot |
Dec. 10, 2002 |
| 6474867 |
Shuttle compensated hydrostatic bearing |
Nov. 5, 2002 |
| 6471404 |
Bearing with cooperating inner and outer shells |
Oct. 29, 2002 |
| 6467960 |
Air bearing linear guide for use in a vacuum |
Oct. 22, 2002 |
| 6454641 |
Hydrostatic fluid bearing support with adjustable inlet heights |
Sep. 24, 2002 |
| 6456776 |
Configuration for detecting mail items |
Sep. 24, 2002 |
| 6443618 |
Particulate free air bearing and seal |
Sep. 3, 2002 |
| 6434922 |
Track sliding facilitating method and device for a wire stranding machine |
Aug. 20, 2002 |
| 6428210 |
Precision air bearing slide and stage assembly for controlled linear motion |
Aug. 6, 2002 |
| 6419394 |
Method and device to control the movement accuracy of a unit moving linearly on hydro (air) static slides |
Jul. 16, 2002 |
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