| |
 |
|
Class Information
Number: 382/151
Name: Image analysis > Applications > Manufacturing or product inspection > Inspection of semiconductor device or printed circuit board > Alignment, registration, or position determination
Description: Subject matter wherein semiconductor or other electrical component devices are inspected to determine position or alignment with respect to a process mask or during installation.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7620269 |
Edge-based correlation image registration for multispectral imaging |
Nov. 17, 2009 |
| 7620250 |
Shape matching method for indexing and retrieving multimedia data |
Nov. 17, 2009 |
| 7613598 |
Global shape definition method for scatterometry |
Nov. 3, 2009 |
| 7602491 |
Optical gain approach for enhancement of overlay and alignment systems performance |
Oct. 13, 2009 |
| 7602959 |
Visual inspection apparatus and method of inspecting display panel using the visual inspection apparatus |
Oct. 13, 2009 |
| 7596274 |
Method of inspecting unevenness of partition surface of honeycomb structure and inspecting device |
Sep. 29, 2009 |
| 7593571 |
Component edge detecting method, computer-readable recording medium and component inspection apparatus |
Sep. 22, 2009 |
| 7590276 |
System and method for programming interrupting operations during moving image acquisition sequences in a vision system |
Sep. 15, 2009 |
| 7590280 |
Position detection apparatus and exposure apparatus |
Sep. 15, 2009 |
| 7583834 |
Laser etched fiducials in roll-roll display |
Sep. 1, 2009 |
| 7580558 |
Screen printing apparatus |
Aug. 25, 2009 |
| 7570796 |
Methods and systems for utilizing design data in combination with inspection data |
Aug. 4, 2009 |
| 7570800 |
Methods and systems for binning defects detected on a specimen |
Aug. 4, 2009 |
| 7570801 |
Device suitable for placing components on a substrate |
Aug. 4, 2009 |
| 7565002 |
Wafer surface observation apparatus |
Jul. 21, 2009 |
| 7556899 |
System for controlling an overlay, method for controlling overlay, and method for manufacturing a semiconductor device |
Jul. 7, 2009 |
| 7557921 |
Apparatus and methods for optically monitoring the fidelity of patterns produced by photolitographic tools |
Jul. 7, 2009 |
| 7545497 |
Alignment routine for optically based tools |
Jun. 9, 2009 |
| 7539338 |
Bump inspection apparatus and method for IC component, bump forming method for IC component, and mounting method for IC component |
May. 26, 2009 |
| 7528953 |
Target acquisition and overlay metrology based on two diffracted orders imaging |
May. 5, 2009 |
| 7526114 |
Analysis, secure access to, and transmission of array images |
Apr. 28, 2009 |
| 7519448 |
Method for determining position of semiconductor wafer, and apparatus using the same |
Apr. 14, 2009 |
| 7508515 |
System and method for manufacturing printed circuit boards employing non-uniformly modified images |
Mar. 24, 2009 |
| 7508974 |
Electronic component products and method of manufacturing electronic component products |
Mar. 24, 2009 |
| 7508976 |
Local process variation correction for overlay measurement |
Mar. 24, 2009 |
| 7487438 |
Method and apparatus for recognizing a digitized form, extracting information from a filled-in form, and generating a corrected filled-in form |
Feb. 3, 2009 |
| 7483591 |
Image transfer apparatus with streak removal system |
Jan. 27, 2009 |
| 7480404 |
Method and system for positioning articles with respect to a processing tool |
Jan. 20, 2009 |
| 7476473 |
Process control method, a method for forming monitor marks, a mask for process control, and a semiconductor device manufacturing method |
Jan. 13, 2009 |
| 7477774 |
Choice of reference markings for enabling fast estimating of the position of an imaging device |
Jan. 13, 2009 |
| 7474104 |
Wafer-to-wafer alignments |
Jan. 6, 2009 |
| 7463791 |
Method for automatic alignment of tilt series in an electron microscope |
Dec. 9, 2008 |
| 7463773 |
Fast high precision matching method |
Dec. 9, 2008 |
| 7462814 |
Methods and systems for lithography process control |
Dec. 9, 2008 |
| 7460704 |
Device for stabilizing a workpiece during processing |
Dec. 2, 2008 |
| 7442930 |
Method for correcting distortions in electron backscatter diffraction patterns |
Oct. 28, 2008 |
| 7436993 |
Apparatus and method for detecting defects in periodic pattern on object |
Oct. 14, 2008 |
| 7437207 |
Method and apparatus for automatically processing multiple applications in a predetermined order to affect multi-application sequencing |
Oct. 14, 2008 |
| 7433509 |
Method for automatic de-skewing of multiple layer wafer for improved pattern recognition |
Oct. 7, 2008 |
| 7428329 |
Pickup image processing device of electronic part mounting device and pickup image processing method |
Sep. 23, 2008 |
| 7418125 |
Position detection technique |
Aug. 26, 2008 |
| 7415150 |
Photomask image registration in scanning electron microscope imagery |
Aug. 19, 2008 |
| 7410737 |
System and method for process variation monitor |
Aug. 12, 2008 |
| 7412094 |
System and method for editing a hand-drawn table in ink input |
Aug. 12, 2008 |
| 7409653 |
Sub-resolution alignment of images |
Aug. 5, 2008 |
| 7406191 |
Inspection data producing method and board inspection apparatus using the method |
Jul. 29, 2008 |
| 7397941 |
Method and apparatus for electron beam inspection of repeated patterns |
Jul. 8, 2008 |
| 7391513 |
Lithographic apparatus and device manufacturing method using overlay measurement quality indication |
Jun. 24, 2008 |
| 7382913 |
Method and apparatus for guiding placement of vehicle service fixtures |
Jun. 3, 2008 |
| 7382914 |
Method for aligning two objects, method for detecting superimposing state of two objects, and apparatus for aligning two objects |
Jun. 3, 2008 |
|
|
|
