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Browse by Category: Main > Optical & Optics
Class Information
Number: 382/149
Name: Image analysis > Applications > Manufacturing or product inspection > Inspection of semiconductor device or printed circuit board > Fault or defect detection
Description: Subject matter wherein a device is inspected for defects relating to dimensional tolerances, surface irregularities, etc.










Sub-classes under this class:

Class Number Class Name Patents
382/150 Faulty soldering 133


Patents under this class:
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Patent Number Title Of Patent Date Issued
8093912 Microwave device for controlling material Jan. 10, 2012
8090185 Method for optical inspection, detection and visualization of defects on disk-shaped objects Jan. 3, 2012
8090186 Pattern inspection apparatus, pattern inspection method, and manufacturing method of semiconductor device Jan. 3, 2012
8090188 Apparatus including defect correcting system which repeats a correcting of a reticle pattern defect and a correcting method using the apparatus Jan. 3, 2012
8090190 Method and apparatus for reviewing defects Jan. 3, 2012
8090191 Method and apparatus for inspection and fault analysis Jan. 3, 2012
8086041 Pattern evaluation method, pattern matching method and computer readable medium Dec. 27, 2011
8086024 Defect detection apparatus, defect detection method and computer program Dec. 27, 2011
8086023 Defect detection apparatus, defect detection method and computer program Dec. 27, 2011
8081814 Linear pattern detection method and apparatus Dec. 20, 2011
8073241 Defect source analysis method, defect source analysis apparatus, and method of manufacturing semiconductor device Dec. 6, 2011
8073242 SEM system and a method for producing a recipe Dec. 6, 2011
8067752 Semiconductor testing method and semiconductor tester Nov. 29, 2011
8068212 Lithographic apparatus configured to compensate for variations in a critical dimension of projected features due to heating of optical elements Nov. 29, 2011
8063908 System, method, and computer program product for validating a graphics processor design Nov. 22, 2011
8060835 Three dimensional defect mapping Nov. 15, 2011
8059886 Adaptive signature detection Nov. 15, 2011
8057967 Process window signature patterns for lithography process control Nov. 15, 2011
8055056 Method of detecting defects of patterns on a semiconductor substrate and apparatus for performing the same Nov. 8, 2011
8055057 Method for detecting defects in a substrate having a semiconductor device thereon Nov. 8, 2011
8055059 Method and system for determining a defect during sample inspection involving charged particle beam imaging Nov. 8, 2011
8050489 Autoradiography-based differential wear mapping Nov. 1, 2011
8045789 Method and apparatus for inspecting defect of pattern formed on semiconductor device Oct. 25, 2011
8045788 Product setup sharing for multiple inspection systems Oct. 25, 2011
8045786 Waferless recipe optimization Oct. 25, 2011
8043772 Manufacturing method and manufacturing system of semiconductor device Oct. 25, 2011
8040503 Method of inspecting a semiconductor device and an apparatus thereof Oct. 18, 2011
8041106 Methods and systems for detecting defects on a reticle Oct. 18, 2011
8041443 Surface defect data display and management system and a method of displaying and managing a surface defect data Oct. 18, 2011
8036445 Pattern matching method, program and semiconductor device manufacturing method Oct. 11, 2011
8036447 Inspection apparatus for inspecting patterns of a substrate Oct. 11, 2011
8036845 Method of correcting coordinates, and defect review apparatus Oct. 11, 2011
8031968 Image processing apparatus and image processing program Oct. 4, 2011
8031931 Printed fourier filtering in optical inspection tools Oct. 4, 2011
8019144 Pattern image correcting apparatus, pattern inspection apparatus, and pattern image correcting method Sep. 13, 2011
8019333 Apparatus and methods for product acceptance testing on a wireless device Sep. 13, 2011
8014973 Distance histogram for nearest neighbor defect classification Sep. 6, 2011
8014587 Pattern test method of testing, in only specific region, defect of pattern on sample formed by charged beam lithography apparatus Sep. 6, 2011
8014586 Apparatus and methods for container inspection Sep. 6, 2011
8010315 Multi-modality inspection method with data validation and data fusion Aug. 30, 2011
8005292 Method and apparatus for inspecting pattern defects Aug. 23, 2011
8000826 Predicting IC manufacturing yield by considering both systematic and random intra-die process variations Aug. 16, 2011
8000520 Apparatus and method for testing image sensor wafers to identify pixel defects Aug. 16, 2011
8000519 Method of metal pattern inspection verification Aug. 16, 2011
8000501 Method and product for detecting abnormalities Aug. 16, 2011
7995829 Method and apparatus for inspecting components Aug. 9, 2011
7995833 Method of alignment for efficient defect review Aug. 9, 2011
7991787 Applying search engine technology to HCM employee searches Aug. 2, 2011
7991217 Defect classifier using classification recipe based on connection between rule-based and example-based classifiers Aug. 2, 2011
7983469 Systems and methods for determining inconsistency characteristics of a composite structure Jul. 19, 2011

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