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Class Information
Number: 382/149
Name: Image analysis > Applications > Manufacturing or product inspection > Inspection of semiconductor device or printed circuit board > Fault or defect detection
Description: Subject matter wherein a device is inspected for defects relating to dimensional tolerances, surface irregularities, etc.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7398172 |
Method and system of providing a dynamic sampling plan for integrated metrology |
Jul. 8, 2008 |
| 7388979 |
Method and apparatus for inspecting pattern defects |
Jun. 17, 2008 |
| 7385689 |
Method and apparatus for inspecting substrate pattern |
Jun. 10, 2008 |
| 7383156 |
Apparatus for inspecting wafer surface, method for inspecting wafer surface, apparatus for judging defective wafer, method for judging defective wafer, and apparatus for processing information |
Jun. 3, 2008 |
| 7379580 |
Method for detecting defects |
May. 27, 2008 |
| 7375829 |
Method for inspecting an insulator with a library of optic images |
May. 20, 2008 |
| 7376260 |
Method for post-OPC multi layer overlay quality inspection |
May. 20, 2008 |
| 7369253 |
Systems and methods for measuring sample surface flatness of continuously moving samples |
May. 6, 2008 |
| 7369236 |
Defect detection through image comparison using relative measures |
May. 6, 2008 |
| 7369129 |
Automated user interface testing |
May. 6, 2008 |
| 7366344 |
Edge normal process |
Apr. 29, 2008 |
| 7362916 |
Radiation imaging method, radiation imaging apparatus, computer program and computer-readable recording medium |
Apr. 22, 2008 |
| 7359999 |
Inputting method and device with a flat input having sensor capable of coordinate touch input wherein display is switchable based on touch pressure |
Apr. 15, 2008 |
| 7358517 |
Method and apparatus for imager quality testing |
Apr. 15, 2008 |
| 7356177 |
Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus |
Apr. 8, 2008 |
| 7356787 |
Alternative methodology for defect simulation and system |
Apr. 8, 2008 |
| 7352890 |
Method for analyzing circuit pattern defects and a system thereof |
Apr. 1, 2008 |
| 7349575 |
Pattern inspection method and apparatus, and pattern alignment method |
Mar. 25, 2008 |
| 7346207 |
Image defect inspection method, image defect inspection apparatus, and appearance inspection apparatus |
Mar. 18, 2008 |
| 7343034 |
Method of inspecting threaded fasteners and a system therefor |
Mar. 11, 2008 |
| 7340086 |
Inspection method and device |
Mar. 4, 2008 |
| 7336815 |
Image defect inspection method, image defect inspection apparatus, and appearance inspection apparatus |
Feb. 26, 2008 |
| 7336850 |
Method for concealing dark defect in image sensor |
Feb. 26, 2008 |
| 7332255 |
Overlay box structure for measuring process induced line shortening effect |
Feb. 19, 2008 |
| 7330581 |
Image defect inspection method, image defect inspection apparatus and appearance inspection apparatus |
Feb. 12, 2008 |
| 7330042 |
Substrate inspection system, substrate inspection method, and substrate inspection apparatus |
Feb. 12, 2008 |
| 7330583 |
Integrated visual imaging and electronic sensing inspection systems |
Feb. 12, 2008 |
| 7327870 |
Method for inspecting a region of interest |
Feb. 5, 2008 |
| 7324685 |
Inspection systems and methods |
Jan. 29, 2008 |
| 7313288 |
Defect pixel correction in an image sensor |
Dec. 25, 2007 |
| 7295696 |
Automatic optical inspection system and method |
Nov. 13, 2007 |
| 7295695 |
Defect detection via multiscale wavelets-based algorithms |
Nov. 13, 2007 |
| 7289656 |
Systems and methods for determining inconsistency characteristics of a composite structure |
Oct. 30, 2007 |
| 7289660 |
Image data file management system and method |
Oct. 30, 2007 |
| 7289661 |
Apparatus and method for inspecting a substrate |
Oct. 30, 2007 |
| 7289657 |
Method of inspecting photo-mask |
Oct. 30, 2007 |
| 7286284 |
Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection |
Oct. 23, 2007 |
| 7283659 |
Apparatus and methods for searching through and analyzing defect images and wafer maps |
Oct. 16, 2007 |
| 7279258 |
Method and arrangement for controlling focus parameters of an exposure tool |
Oct. 9, 2007 |
| 7272254 |
System and method for analyzing and identifying flaws in a manufactured part |
Sep. 18, 2007 |
| 7269280 |
Method and its apparatus for inspecting a pattern |
Sep. 11, 2007 |
| 7266235 |
Pattern inspection method and apparatus |
Sep. 4, 2007 |
| 7265662 |
Apparatus and method for inspecting containers |
Sep. 4, 2007 |
| 7263216 |
Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof |
Aug. 28, 2007 |
| 7263215 |
Circuit and method for correction of defect pixel |
Aug. 28, 2007 |
| 7261984 |
Exposure pattern or mask and inspection method and manufacture method for the same |
Aug. 28, 2007 |
| 7257247 |
Mask defect analysis system |
Aug. 14, 2007 |
| 7248732 |
Pattern inspection method and inspection apparatus |
Jul. 24, 2007 |
| 7245387 |
Three-dimensional measuring instrument |
Jul. 17, 2007 |
| 7242797 |
Method and apparatus for mapping defects on the light transmissive support surface of a document scanning or photocopying device |
Jul. 10, 2007 |
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