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Class Information
Number: 382/148
Name: Image analysis > Applications > Manufacturing or product inspection > Inspection of semiconductor device or printed circuit board > At plural magnifications or resolutions
Description: Subject matter wherein inspection is performed at more than one image magnification or resolution.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7602961 |
Reference data generating method, pattern defect checking apparatus, pattern defect checking method, reference data generating program, and semiconductor device manufacturing method |
Oct. 13, 2009 |
| 7602959 |
Visual inspection apparatus and method of inspecting display panel using the visual inspection apparatus |
Oct. 13, 2009 |
| 7598490 |
SEM-type reviewing apparatus and a method for reviewing defects using the same |
Oct. 6, 2009 |
| 7590276 |
System and method for programming interrupting operations during moving image acquisition sequences in a vision system |
Sep. 15, 2009 |
| 7580557 |
Method of design analysis of existing integrated circuits |
Aug. 25, 2009 |
| 7526119 |
Pattern inspection apparatus |
Apr. 28, 2009 |
| 7505616 |
System and method for reconstructing a diagnostic trajectory |
Mar. 17, 2009 |
| 7471816 |
Virtual resolution enhancement in diagnostic imaging using FEA |
Dec. 30, 2008 |
| 7440606 |
Defect detector and defect detection method |
Oct. 21, 2008 |
| 7423743 |
Method and an apparatus for measuring positions of contact elements of an electronic component |
Sep. 9, 2008 |
| 7406191 |
Inspection data producing method and board inspection apparatus using the method |
Jul. 29, 2008 |
| 7391894 |
System and method for remote navigation of a specimen |
Jun. 24, 2008 |
| 7389004 |
Image processing apparatus |
Jun. 17, 2008 |
| 7349129 |
Controller for photosensor array with multiple different sensor areas |
Mar. 25, 2008 |
| 7277197 |
Image communication apparatus and image communication method |
Oct. 2, 2007 |
| 7173732 |
Image processing method |
Feb. 6, 2007 |
| 7149342 |
Device and method for investigating predetermined areas of printed circuit boards |
Dec. 12, 2006 |
| 7113630 |
PICA system detector calibration |
Sep. 26, 2006 |
| 7050622 |
Image comparison apparatus, image comparison method, and program for causing computer to execute image comparison |
May. 23, 2006 |
| 7020323 |
Pattern defect inspection apparatus and method |
Mar. 28, 2006 |
| 6990227 |
Method for printed circuit board inspection |
Jan. 24, 2006 |
| 6974653 |
Methods for critical dimension and focus mapping using critical dimension test marks |
Dec. 13, 2005 |
| 6937959 |
Method of determining the distance of projection points on the surface of a printing form |
Aug. 30, 2005 |
| 6922483 |
Methods for measuring DMD low frequency spatial uniformity |
Jul. 26, 2005 |
| 6913861 |
Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device |
Jul. 5, 2005 |
| 6874131 |
Method and system for client-less viewing of scalable documents |
Mar. 29, 2005 |
| 6867753 |
Virtual image registration in augmented display field |
Mar. 15, 2005 |
| 6810728 |
Kit-based wire evaluation |
Nov. 2, 2004 |
| 6775420 |
Methods and systems for improving display resolution using sub-pixel sampling and visual error compensation |
Aug. 10, 2004 |
| 6741732 |
Exposure method and device manufacturing method using this exposure method |
May. 25, 2004 |
| 6674888 |
Tuning method for a processing machine |
Jan. 6, 2004 |
| 6614923 |
Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof |
Sep. 2, 2003 |
| 6597381 |
User interface for automated optical inspection systems |
Jul. 22, 2003 |
| 6553137 |
METHOD OF INCREASING OVERLAY ACCURACY IN AN EXPOSURE STEP AND OVERLAY DISPLACEMENT MEASURING DEVICE FOR DETERMINING OPTIMUM MEASUREMENT FOCUS PLANE BY VARIATION IN MAGNITUDES OF DISPLACEMENT O |
Apr. 22, 2003 |
| 6504947 |
Method and apparatus for multi-level rounding and pattern inspection |
Jan. 7, 2003 |
| 6470101 |
Image reading method |
Oct. 22, 2002 |
| 6449585 |
Wafer sidewall inspection system and method |
Sep. 10, 2002 |
| 6389180 |
Resolution conversion system and method |
May. 14, 2002 |
| 6360005 |
Apparatus and method for microscopic inspection of articles |
Mar. 19, 2002 |
| 6347150 |
Method and system for inspecting a pattern |
Feb. 12, 2002 |
| 6342916 |
Method and apparatus for mounting electronic components |
Jan. 29, 2002 |
| 6219442 |
Apparatus and method for measuring distortion of a visible pattern on a substrate by viewing predetermined portions thereof |
Apr. 17, 2001 |
| 6173071 |
Apparatus and method for processing video data in automatic optical inspection |
Jan. 9, 2001 |
| 6157732 |
Image processing system and method using subsampling with constraints such as time and uncertainty constraints |
Dec. 5, 2000 |
| 5995648 |
Image processing system and method using subsampling with constraints such as time and uncertainty constraints |
Nov. 30, 1999 |
| 5784484 |
Device for inspecting printed wiring boards at different resolutions |
Jul. 21, 1998 |
| 5764536 |
Method and device to establish viewing zones and to inspect products using viewing zones |
Jun. 9, 1998 |
| 5717780 |
Checking apparatus for flat type display panels |
Feb. 10, 1998 |
| 5619429 |
Apparatus and method for inspection of a patterned object by comparison thereof to a reference |
Apr. 8, 1997 |
| 5608539 |
Image processing method and apparatus thereof |
Mar. 4, 1997 |
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