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Class Information
Number: 382/145
Name: Image analysis > Applications > Manufacturing or product inspection > Inspection of semiconductor device or printed circuit board
Description: Subject matter wherein semiconductor wafers, chips, or similar materials or an insulating board on which circuit has been printed are inspected for defect detection, dimension checking, mark reading, or other conditions.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 8326018 |
Fast pattern matching |
Dec. 4, 2012 |
| 8319962 |
Mask making decision for manufacturing (DFM) on mask quality control |
Nov. 27, 2012 |
| 8318391 |
Process window signature patterns for lithography process control |
Nov. 27, 2012 |
| 8311316 |
Defect inspecting method, defect inspecting apparatus, and storage medium storing defect inspection program |
Nov. 13, 2012 |
| 8311315 |
Pattern inspection method and apparatus |
Nov. 13, 2012 |
| 8311314 |
Pattern measuring method and pattern measuring device |
Nov. 13, 2012 |
| 8307310 |
Pattern generating method, method of manufacturing semiconductor device, computer program product, and pattern-shape-determination-parameter generating method |
Nov. 6, 2012 |
| 8306311 |
Method and system for automated ball-grid array void quantification |
Nov. 6, 2012 |
| 8306310 |
Apparatus and method for pattern inspection |
Nov. 6, 2012 |
| 8306309 |
Method and apparatus for detecting mechanical defects in a semiconductor device, particularly in a solar cell arrangement |
Nov. 6, 2012 |
| 8304724 |
Microstructured pattern inspection method |
Nov. 6, 2012 |
| 8295584 |
Pattern measurement methods and pattern measurement equipment |
Oct. 23, 2012 |
| 8295581 |
Method and apparatus for detecting defects in optical components |
Oct. 23, 2012 |
| 8290243 |
System and method for inspection |
Oct. 16, 2012 |
| 8290242 |
Defect inspection apparatus and defect inspection method |
Oct. 16, 2012 |
| 8290239 |
Automatic repair of electric circuits |
Oct. 16, 2012 |
| 8290238 |
Method and apparatus for locating objects |
Oct. 16, 2012 |
| 8285031 |
Pattern inspection apparatus and method |
Oct. 9, 2012 |
| 8285030 |
Determining calibration parameters for a lithographic process |
Oct. 9, 2012 |
| 8283630 |
Method and apparatus for measuring dimension of circuit pattern formed on substrate by using scanning electron microscope |
Oct. 9, 2012 |
| 8275188 |
System and method for inspecting chips in a tray |
Sep. 25, 2012 |
| 8270703 |
Defect inspection apparatus, defect inspection method, and manufacture method for semiconductor device |
Sep. 18, 2012 |
| 8264535 |
Method and apparatus for analyzing a group of photolithographic masks |
Sep. 11, 2012 |
| 8264534 |
Method and apparatus for processing the image data of the surface of a wafer recorded by at least one camera |
Sep. 11, 2012 |
| 8263296 |
Lithographic apparatus and device manufacturing method |
Sep. 11, 2012 |
| 8260035 |
Threshold determination in an inspection system |
Sep. 4, 2012 |
| 8260034 |
Multi-modal data analysis for defect identification |
Sep. 4, 2012 |
| 8260031 |
Pattern inspection apparatus, pattern inspection method, and computer-readable recording medium storing a program |
Sep. 4, 2012 |
| 8260029 |
Pattern shape inspection method and apparatus thereof |
Sep. 4, 2012 |
| 8254663 |
Ultrafine lithography pattern inspection using multi-stage TDI image sensors with false image removability |
Aug. 28, 2012 |
| 8254662 |
System for monitoring foreign particles, process processing apparatus and method of electronic commerce |
Aug. 28, 2012 |
| 8254661 |
System and method for generating spatial signatures |
Aug. 28, 2012 |
| 8253077 |
Substrate processing method, computer-readable storage medium and substrate processing system |
Aug. 28, 2012 |
| 8249354 |
System and method for finding edge points of an object |
Aug. 21, 2012 |
| 8249331 |
Method and system for evaluating an object |
Aug. 21, 2012 |
| 8243273 |
Enhanced OVL dummy field enabling "on-the-fly" OVL measurement methods |
Aug. 14, 2012 |
| 8238645 |
Inspection system and a method for detecting defects based upon a reference frame |
Aug. 7, 2012 |
| 8233699 |
Inspection system and a method for detecting defects based upon a reference frame |
Jul. 31, 2012 |
| 8233697 |
Method and device for generating digital still pictures of wafer-shaped elements during a production process |
Jul. 31, 2012 |
| 8233696 |
Simultaneous wafer ID reading |
Jul. 31, 2012 |
| 8233039 |
Microscope image pickup system |
Jul. 31, 2012 |
| 8229206 |
Photomask inspection method |
Jul. 24, 2012 |
| 8229205 |
Pattern matching method in manufacturing semiconductor memory devices |
Jul. 24, 2012 |
| 8224605 |
Inspection standard setting device, inspection standard setting method and process inspection device |
Jul. 17, 2012 |
| 8224070 |
Three-dimensional measuring device |
Jul. 17, 2012 |
| 8224061 |
Method, program product, and apparatus for performing a model based coloring process for pattern decomposition for use in a multiple exposure process |
Jul. 17, 2012 |
| 8223403 |
Inspection apparatus, inspection method and manufacturing method of mask for exposure, and mask for exposure |
Jul. 17, 2012 |
| 8219940 |
Method and apparatus for removing dummy features from a data structure |
Jul. 10, 2012 |
| 8219215 |
Electronic device properties control |
Jul. 10, 2012 |
| 8213739 |
Method and system of performing detection on an imaging device |
Jul. 3, 2012 |
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