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Browse by Category: Main > Optical & Optics
Class Information
Number: 382/145
Name: Image analysis > Applications > Manufacturing or product inspection > Inspection of semiconductor device or printed circuit board
Description: Subject matter wherein semiconductor wafers, chips, or similar materials or an insulating board on which circuit has been printed are inspected for defect detection, dimension checking, mark reading, or other conditions.










Sub-classes under this class:

Class Number Class Name Patents
382/151 Alignment, registration, or position determination 795
382/148 At plural magnifications or resolutions 127
382/149 Fault or defect detection 984
382/147 Inspecting printed circuit boards 386
382/146 Measuring external leads 128


Patents under this class:

Patent Number Title Of Patent Date Issued
8532949 Computer-implemented methods and systems for classifying defects on a specimen Sep. 10, 2013
8532366 Position detecting method Sep. 10, 2013
8526709 Methods and apparatus for detecting multiple objects Sep. 3, 2013
8526708 Measurement of critical dimensions of semiconductor wafers Sep. 3, 2013
8526707 Method of inspecting a mask Sep. 3, 2013
8520077 Color-unevenness inspection apparatus and method Aug. 27, 2013
8515155 Pattern generating apparatus and pattern shape evaluating apparatus Aug. 20, 2013
8515153 System and method of image processing, and scanning electron microscope Aug. 20, 2013
8509516 Circuit pattern examining apparatus and circuit pattern examining method Aug. 13, 2013
8507856 Pattern measuring method and pattern measuring device Aug. 13, 2013
8503789 Method and system for measuring deflection angle of a camera lens Aug. 6, 2013
8501376 System and method for test pattern for lithography process Aug. 6, 2013
8498471 Method for identifying a wafer serial number Jul. 30, 2013
8498470 Method and system for evaluating an object Jul. 30, 2013
8494802 Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a wafer Jul. 23, 2013
8492058 Photolithography method including technique of determining distribution of energy of exposure light passing through slit of exposure apparatus Jul. 23, 2013
RE44353 System and method for assigning analysis parameters to vision detector using a graphical interface Jul. 9, 2013
8483476 Photovoltaic cell manufacturing Jul. 9, 2013
8478808 Approximate calculation of 2D matrix entries via GPU Jul. 2, 2013
8478022 Failure analysis method, apparatus, and program for semiconductor integrated circuit Jul. 2, 2013
8472695 Method and apparatus for failure analysis of semiconductor integrated circuit devices Jun. 25, 2013
8467592 Substrate media distortion analysis Jun. 18, 2013
8461527 Scanning electron microscope and method for processing an image obtained by the scanning electron microscope Jun. 11, 2013
8452075 Range pattern matching for hotspots containing vias and incompletely specified range patterns May. 28, 2013
8452074 Apparatus and method for pattern inspection May. 28, 2013
8447097 Calibration apparatus and method for assisting accuracy confirmation of parameter for three-dimensional measurement May. 21, 2013
8447095 Harmonic resist model for use in a lithographic apparatus and a device manufacturing method May. 21, 2013
8442300 Specified position identifying method and specified position measuring apparatus May. 14, 2013
8428337 Apparatus for detecting micro-cracks in wafers and method therefor Apr. 23, 2013
8428336 Inspecting method, inspecting system, and method for manufacturing electronic devices Apr. 23, 2013
8426223 Wafer edge inspection Apr. 23, 2013
8422762 Abnormality detecting apparatus for detecting abnormality at interface portion of contact arm Apr. 16, 2013
8422761 Defect and critical dimension analysis systems and methods for a semiconductor lithographic process Apr. 16, 2013
8422760 System for monitoring haze of a photomask Apr. 16, 2013
8421803 Information display system and information display method for quality control of component-mounted substrate Apr. 16, 2013
8421585 Alarm apparatus and manufacturing method Apr. 16, 2013
8417019 Image correction system and method Apr. 9, 2013
8416402 Method and apparatus for inspecting defects Apr. 9, 2013
8411928 Scatterometry method and device for inspecting patterned medium Apr. 2, 2013
8410440 Specimen observation method Apr. 2, 2013
8401274 Image processing apparatus and method Mar. 19, 2013
8401273 Apparatus for evaluating degradation of pattern features Mar. 19, 2013
8401272 Patterned wafer defect inspection system and method Mar. 19, 2013
8400503 Method and apparatus for automatic application and monitoring of a structure to be applied onto a substrate Mar. 19, 2013
8392009 Advanced process control with novel sampling policy Mar. 5, 2013
8391634 Illumination estimation for images Mar. 5, 2013
8390808 Enhanced OVL dummy field enabling "on-the-fly" OVL measurement methods Mar. 5, 2013
8385627 Method and apparatus for inspecting defects of semiconductor device Feb. 26, 2013
8384029 Cross-section systems and methods Feb. 26, 2013
8379964 Detecting semiconductor substrate anomalies Feb. 19, 2013











 
 
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