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Class Information
Number: 382/145
Name: Image analysis > Applications > Manufacturing or product inspection > Inspection of semiconductor device or printed circuit board
Description: Subject matter wherein semiconductor wafers, chips, or similar materials or an insulating board on which circuit has been printed are inspected for defect detection, dimension checking, mark reading, or other conditions.

Sub-classes under this class:

Class Number Class Name Patents
382/151 Alignment, registration, or position determination 795
382/148 At plural magnifications or resolutions 127
382/149 Fault or defect detection 984
382/147 Inspecting printed circuit boards 386
382/146 Measuring external leads 128

Patents under this class:

Patent Number Title Of Patent Date Issued
8710997 Method and device for the detection of defects or correction of defects in machines Apr. 29, 2014
8705840 Defect inspection device and defect inspection method Apr. 22, 2014
8694929 Method and apparatus for the position determination of structures on a mask for microlithography Apr. 8, 2014
8682059 Harmonic resist model for use in a lithographic apparatus and a device manufacturing method Mar. 25, 2014
8675949 Reviewed defect selection processing method, defect review method, reviewed defect selection processing tool, and defect review tool Mar. 18, 2014
8670605 Identification method of data point distribution area on coordinate plane and recording medium Mar. 11, 2014
8655050 Pattern generating apparatus and pattern shape evaluating apparatus Feb. 18, 2014
8655049 Identification method of data point distribution area on coordinate plane and recording medium Feb. 18, 2014
8653846 Electronic device mounting apparatus and method of mounting electronic device Feb. 18, 2014
8645875 Method for quantifying the manufacturing complexity of electrical designs Feb. 4, 2014
8644590 Method of measuring measurement target Feb. 4, 2014
8644588 Photo-mask and wafer image reconstruction Feb. 4, 2014
8643835 Active planar autofocus Feb. 4, 2014
8639018 Systems and methods for imaging multiple sides of objects Jan. 28, 2014
8634634 Defect observation method and defect observation apparatus Jan. 21, 2014
8630479 Methods and systems for improved localized feature quantification in surface metrology tools Jan. 14, 2014
8630478 Method and apparatus for locating objects Jan. 14, 2014
8627239 Mask fabrication supporting method, mask blank providing method, and mask blank dealing system Jan. 7, 2014
8624971 TDI sensor modules with localized driving and signal processing circuitry for high speed inspection Jan. 7, 2014
8620063 Polarization imaging Dec. 31, 2013
8615126 Method for performing pattern decomposition based on feature pitch Dec. 24, 2013
8611639 Semiconductor device property extraction, generation, visualization, and monitoring methods Dec. 17, 2013
8611638 Pattern inspection method and pattern inspection apparatus Dec. 17, 2013
8594963 In-line inspection yield prediction system Nov. 26, 2013
8594457 Correlation image detection Nov. 26, 2013
8594416 Image processing apparatus, image processing method, and computer program Nov. 26, 2013
8589830 Method and apparatus for enhanced optical proximity correction Nov. 19, 2013
8588510 Image processing apparatus and image processing method Nov. 19, 2013
8588509 Efficient scanning for EM based target localization Nov. 19, 2013
8587778 Light irradiation apparatus, component image pickup apparatus, and component mounting apparatus Nov. 19, 2013
8577124 Method and apparatus of pattern inspection and semiconductor inspection system using the same Nov. 5, 2013
8577123 Method and system for evaluating contact elements Nov. 5, 2013
8577119 Wafer surface observing method and apparatus Nov. 5, 2013
8571301 Alignment method and examination apparatus Oct. 29, 2013
8571299 Identifying defects Oct. 29, 2013
8565510 Methods for reading a feature pattern from a packaged die Oct. 22, 2013
8565509 Circuit pattern inspecting apparatus, management system including circuit pattern inspecting apparatus, and method for inspecting circuit pattern Oct. 22, 2013
8559697 Mask inspection apparatus and image generation method Oct. 15, 2013
8559001 Inspection guided overlay metrology Oct. 15, 2013
8558831 Method and program for drawing distribution area of data points on coordinate plane Oct. 15, 2013
8553970 System and method for generating spatial signatures Oct. 8, 2013
8548224 Method for inspecting measurement object Oct. 1, 2013
8548223 Inspection system and method Oct. 1, 2013
8547430 System and method for marking discrepancies in image of object Oct. 1, 2013
8547429 Apparatus and method for monitoring semiconductor device manufacturing process Oct. 1, 2013
8542229 Identification method of data point distribution area on coordinate plane and recording medium Sep. 24, 2013
8538167 Designating corridors to provide estimates of structures Sep. 17, 2013
8538165 Image measuring apparatus, program, and teaching method of image measuring apparatus Sep. 17, 2013
8538130 CD metrology system and method of classifying similar structural elements Sep. 17, 2013
8538128 Method for determining the location of an additive in an article Sep. 17, 2013

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