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Class Information
Number: 382/145
Name: Image analysis > Applications > Manufacturing or product inspection > Inspection of semiconductor device or printed circuit board
Description: Subject matter wherein semiconductor wafers, chips, or similar materials or an insulating board on which circuit has been printed are inspected for defect detection, dimension checking, mark reading, or other conditions.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7397940 |
Object positioning method for a lithographic projection apparatus |
Jul. 8, 2008 |
| 7394926 |
Magnified machine vision user interface |
Jul. 1, 2008 |
| 7394069 |
Large-field scanning of charged particles |
Jul. 1, 2008 |
| 7391036 |
Sample surface inspection apparatus and method |
Jun. 24, 2008 |
| 7388978 |
Apparatus and methods for the inspection of objects |
Jun. 17, 2008 |
| 7389007 |
Semiconductor memory apparatus |
Jun. 17, 2008 |
| 7382940 |
Fast bus image coprocessing |
Jun. 3, 2008 |
| 7383156 |
Apparatus for inspecting wafer surface, method for inspecting wafer surface, apparatus for judging defective wafer, method for judging defective wafer, and apparatus for processing information |
Jun. 3, 2008 |
| 7379579 |
Imaging apparatus |
May. 27, 2008 |
| 7379838 |
Programmable image computer |
May. 27, 2008 |
| 7375829 |
Method for inspecting an insulator with a library of optic images |
May. 20, 2008 |
| 7372632 |
Apparatus and methods for the inspection of microvias in printed circuit boards |
May. 13, 2008 |
| 7371489 |
Photomask, method for detecting pattern defect of the same, and method for making pattern using the same |
May. 13, 2008 |
| 7368208 |
Measuring phase errors on phase shift masks |
May. 6, 2008 |
| 7369236 |
Defect detection through image comparison using relative measures |
May. 6, 2008 |
| 7369237 |
Substrate processing apparatus and substrate processing system |
May. 6, 2008 |
| 7367010 |
Designing method and device for phase shift mask |
Apr. 29, 2008 |
| 7366620 |
Evaluation method of fine pattern feature, its equipment, and method of semiconductor device fabrication |
Apr. 29, 2008 |
| 7366343 |
Pattern inspection method and apparatus |
Apr. 29, 2008 |
| 7366342 |
Simultaneous computation of multiple points on one or multiple cut lines |
Apr. 29, 2008 |
| 7365324 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
Apr. 29, 2008 |
| 7366341 |
Electronic assembly video inspection system |
Apr. 29, 2008 |
| 7362428 |
Highly sensitive defect detection method |
Apr. 22, 2008 |
| 7359577 |
Differential method for layer-to-layer registration |
Apr. 15, 2008 |
| 7359546 |
Defect inspection apparatus and defect inspection method |
Apr. 15, 2008 |
| 7359545 |
Method and system to compensate for lamp intensity differences in a photolithographic inspection tool |
Apr. 15, 2008 |
| 7359544 |
Automatic supervised classifier setup tool for semiconductor defects |
Apr. 15, 2008 |
| 7354684 |
Test pattern and method of evaluating the transfer properties of a test pattern |
Apr. 8, 2008 |
| 7352891 |
Position detecting method |
Apr. 1, 2008 |
| 7352892 |
System and method for shape reconstruction from optical images |
Apr. 1, 2008 |
| 7349106 |
Apparatus and method for thin-layer metrology |
Mar. 25, 2008 |
| 7346207 |
Image defect inspection method, image defect inspection apparatus, and appearance inspection apparatus |
Mar. 18, 2008 |
| 7345254 |
Die sorting apparatus and method |
Mar. 18, 2008 |
| 7343271 |
Incorporation of a phase map into fast model-based optical proximity correction simulation kernels to account for near and mid-range flare |
Mar. 11, 2008 |
| 7340085 |
Rotating prism component inspection system |
Mar. 4, 2008 |
| 7340088 |
Mask close-on image capturing device |
Mar. 4, 2008 |
| 7340087 |
Edge inspection |
Mar. 4, 2008 |
| 7336815 |
Image defect inspection method, image defect inspection apparatus, and appearance inspection apparatus |
Feb. 26, 2008 |
| 7333650 |
Defect inspection apparatus |
Feb. 19, 2008 |
| 7330582 |
Bonding program |
Feb. 12, 2008 |
| 7330581 |
Image defect inspection method, image defect inspection apparatus and appearance inspection apparatus |
Feb. 12, 2008 |
| 7327870 |
Method for inspecting a region of interest |
Feb. 5, 2008 |
| 7327871 |
Defect inspecting method, defect inspecting apparatus and inspection machine |
Feb. 5, 2008 |
| 7323681 |
Image enhancement by sub-pixel imaging |
Jan. 29, 2008 |
| 7324682 |
System and method for excluding extraneous features from inspection operations performed by a machine vision inspection system |
Jan. 29, 2008 |
| 7324683 |
Bonding pattern discrimination device |
Jan. 29, 2008 |
| 7324684 |
Bonding apparatus |
Jan. 29, 2008 |
| 7321681 |
Bonding pattern discrimination program |
Jan. 22, 2008 |
| 7321680 |
Graphic contour extracting method, pattern inspecting method, program and pattern inspecting system |
Jan. 22, 2008 |
| 7317522 |
Verification of non-recurring defects in pattern inspection |
Jan. 8, 2008 |
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