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Class Information
Number: 382/145
Name: Image analysis > Applications > Manufacturing or product inspection > Inspection of semiconductor device or printed circuit board
Description: Subject matter wherein semiconductor wafers, chips, or similar materials or an insulating board on which circuit has been printed are inspected for defect detection, dimension checking, mark reading, or other conditions.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618755 |
Method and system for automatically detecting exposed substrates having a high probability for defocused exposure fields |
Nov. 17, 2009 |
| 7616804 |
Wafer edge inspection and metrology |
Nov. 10, 2009 |
| 7607824 |
Method of analyzing electrical connection and test system |
Oct. 27, 2009 |
| 7602960 |
System and method for measuring thin film thickness variations and for compensating for the variations |
Oct. 13, 2009 |
| 7598490 |
SEM-type reviewing apparatus and a method for reviewing defects using the same |
Oct. 6, 2009 |
| 7593596 |
Phase unwrapping method, program, and interference measurement apparatus |
Sep. 22, 2009 |
| 7593565 |
All surface data for use in substrate inspection |
Sep. 22, 2009 |
| 7588870 |
Dual layer workpiece masking and manufacturing process |
Sep. 15, 2009 |
| 7590278 |
Measurement of corner roundness |
Sep. 15, 2009 |
| 7586596 |
Field folding optical method for imaging system |
Sep. 8, 2009 |
| 7586608 |
Wafer-level testing of optical and optoelectronic chips |
Sep. 8, 2009 |
| 7583376 |
Method and device for examination of nonuniformity defects of patterns |
Sep. 1, 2009 |
| 7581203 |
Method and apparatus for manufacturing multiple circuit patterns using a multiple project mask |
Aug. 25, 2009 |
| 7580557 |
Method of design analysis of existing integrated circuits |
Aug. 25, 2009 |
| 7580124 |
Dual stage defect region identification and defect detection method and apparatus |
Aug. 25, 2009 |
| 7577288 |
Sample inspection apparatus, image alignment method, and program-recorded readable recording medium |
Aug. 18, 2009 |
| 7577287 |
Early error detection during fabrication of reticles |
Aug. 18, 2009 |
| 7570795 |
Multi-region autofocus tool and mode |
Aug. 4, 2009 |
| 7570796 |
Methods and systems for utilizing design data in combination with inspection data |
Aug. 4, 2009 |
| 7570797 |
Methods and systems for generating an inspection process for an inspection system |
Aug. 4, 2009 |
| 7570798 |
Method of manufacturing ball array devices using an inspection apparatus having one or more cameras and ball array devices produced according to the method |
Aug. 4, 2009 |
| 7571423 |
Optimized photomasks for photolithography |
Aug. 4, 2009 |
| 7565002 |
Wafer surface observation apparatus |
Jul. 21, 2009 |
| 7560940 |
Method and installation for analyzing an integrated circuit |
Jul. 14, 2009 |
| 7556896 |
Inspection method and photomask |
Jul. 7, 2009 |
| 7553678 |
Method for detecting semiconductor manufacturing conditions |
Jun. 30, 2009 |
| 7555358 |
Process and method for continuous, non lot-based integrated circuit manufacturing |
Jun. 30, 2009 |
| 7551768 |
Image recognition apparatus and method for surface discrimination using reflected light |
Jun. 23, 2009 |
| 7547560 |
Defect identification system and method for repairing killer defects in semiconductor devices |
Jun. 16, 2009 |
| 7541201 |
Apparatus and methods for determining overlay of structures having rotational or mirror symmetry |
Jun. 2, 2009 |
| 7542082 |
Method and apparatus for correcting a defective pixel |
Jun. 2, 2009 |
| 7539583 |
Method and system for defect detection |
May. 26, 2009 |
| 7539338 |
Bump inspection apparatus and method for IC component, bump forming method for IC component, and mounting method for IC component |
May. 26, 2009 |
| 7539328 |
Surface position measuring method and apparatus |
May. 26, 2009 |
| 7535000 |
Method and system for identifying events in FIB |
May. 19, 2009 |
| 7532749 |
Light processing apparatus |
May. 12, 2009 |
| 7529421 |
Optical proximity correction in raster scan printing based on corner matching templates |
May. 5, 2009 |
| 7529399 |
Game machine circuit board case inspection method, and game board or game machine inspection method |
May. 5, 2009 |
| 7525089 |
Method of measuring a critical dimension of a semiconductor device and a related apparatus |
Apr. 28, 2009 |
| 7526405 |
Statistical signatures used with multivariate statistical analysis for fault detection and isolation and abnormal condition prevention in a process |
Apr. 28, 2009 |
| 7523439 |
Determining position accuracy of double exposure lithography using optical metrology |
Apr. 21, 2009 |
| 7521679 |
Inspection method and inspection system using charged particle beam |
Apr. 21, 2009 |
| 7522664 |
Remote live video inspection |
Apr. 21, 2009 |
| 7512260 |
Substrate inspection method and apparatus |
Mar. 31, 2009 |
| 7512271 |
Dynamically reconfigurable signal processing circuit, pattern recognition apparatus, and image processing apparatus |
Mar. 31, 2009 |
| 7508974 |
Electronic component products and method of manufacturing electronic component products |
Mar. 24, 2009 |
| 7507961 |
Method and apparatus of pattern inspection and semiconductor inspection system using the same |
Mar. 24, 2009 |
| 7508973 |
Method of inspecting defects |
Mar. 24, 2009 |
| 7498181 |
Method of preparing an integrated circuit die for imaging |
Mar. 3, 2009 |
| 7492940 |
Mask defect analysis system |
Feb. 17, 2009 |
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