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Browse by Category: Main > Optical & Optics
Class Information
Number: 382/144
Name: Image analysis > Applications > Manufacturing or product inspection > Mask inspection (e.g., semiconductor photomask)
Description: Subject matter wherein photomasks for semiconductor or printed circuit board fabrication are scanned for defects, holes, etc.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8709682 Mask and method for forming the mask Apr. 29, 2014
8703364 Method for repairing photomask Apr. 22, 2014
8705838 Method for mask inspection for mask design and mask production Apr. 22, 2014
8705839 Electronic devices for defect detection Apr. 22, 2014
8707222 Lithography mask functional optimization and spatial frequency analysis Apr. 22, 2014
8687044 Depth camera compatibility Apr. 1, 2014
8682466 Automatic virtual metrology for semiconductor wafer result prediction Mar. 25, 2014
8682059 Harmonic resist model for use in a lithographic apparatus and a device manufacturing method Mar. 25, 2014
8675948 Mask inspection apparatus and mask inspection method Mar. 18, 2014
8673522 Method for manufacturing photomask and photomask manufactured using the same Mar. 18, 2014
8670605 Identification method of data point distribution area on coordinate plane and recording medium Mar. 11, 2014
8659801 Image forming apparatus and image forming method determining correct pixel value of target pixel subject to interpolation Feb. 25, 2014
8644588 Photo-mask and wafer image reconstruction Feb. 4, 2014
8644589 Method and apparatus for performing model-based OPC for pattern decomposed features Feb. 4, 2014
8639018 Systems and methods for imaging multiple sides of objects Jan. 28, 2014
8639019 Method and apparatus for inspecting pattern defects Jan. 28, 2014
8627239 Mask fabrication supporting method, mask blank providing method, and mask blank dealing system Jan. 7, 2014
8624971 TDI sensor modules with localized driving and signal processing circuitry for high speed inspection Jan. 7, 2014
8623576 Time differential reticle inspection Jan. 7, 2014
8620064 Method for imaging workpiece surfaces at high robot transfer speeds with reduction or prevention of motion-induced distortion Dec. 31, 2013
8615126 Method for performing pattern decomposition based on feature pitch Dec. 24, 2013
8609304 Method of manufacturing a transfer mask and method of manufacturing a semiconductor device Dec. 17, 2013
8609307 Thin film evaluation method, mask blank, and transfer mask Dec. 17, 2013
8611637 Wafer plane detection of lithographically significant contamination photomask defects Dec. 17, 2013
8606017 Method for inspecting localized image and system thereof Dec. 10, 2013
8605986 Burr detecting apparatus and burr detection method thereof Dec. 10, 2013
8605985 Pattern measurement apparatus and pattern measurement method Dec. 10, 2013
8594416 Image processing apparatus, image processing method, and computer program Nov. 26, 2013
8594963 In-line inspection yield prediction system Nov. 26, 2013
8588508 Method or matching high-numerical aperture scanners Nov. 19, 2013
8588509 Efficient scanning for EM based target localization Nov. 19, 2013
8589830 Method and apparatus for enhanced optical proximity correction Nov. 19, 2013
8559697 Mask inspection apparatus and image generation method Oct. 15, 2013
8538128 Method for determining the location of an additive in an article Sep. 17, 2013
8538129 Mask program defect test Sep. 17, 2013
8538130 CD metrology system and method of classifying similar structural elements Sep. 17, 2013
8532812 System and method for identifying defects of surfaces due to machining processes Sep. 10, 2013
8526707 Method of inspecting a mask Sep. 3, 2013
8520077 Color-unevenness inspection apparatus and method Aug. 27, 2013
8515154 Verification method for repairs on photolithography masks Aug. 20, 2013
8515153 System and method of image processing, and scanning electron microscope Aug. 20, 2013
8507856 Pattern measuring method and pattern measuring device Aug. 13, 2013
8509516 Circuit pattern examining apparatus and circuit pattern examining method Aug. 13, 2013
8501376 System and method for test pattern for lithography process Aug. 6, 2013
8498468 Mask inspection Jul. 30, 2013
8498469 Full-field mask error enhancement function Jul. 30, 2013
8488867 Inspection device for disk-shaped substrate Jul. 16, 2013
8488866 Method of inspecting mask pattern and mask pattern inspection apparatus Jul. 16, 2013
8488864 Emission analysis device, method and system Jul. 16, 2013
8478073 Microscope system and method Jul. 2, 2013

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