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Class Information
Number: 378/34
Name: X-ray or gamma ray systems or devices > Specific application > Lithography
Description: Subject matter including the projection of an X-ray image upon an X-ray sensitive resist usually through a patterned mask.










Sub-classes under this class:

Class Number Class Name Patents
378/35 Pattern mask 557


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16

Patent Number Title Of Patent Date Issued
8576376 Imaging optical system and projection exposure system for microlithography Nov. 5, 2013
8542346 Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations Sep. 24, 2013
8525973 Method and apparatus for printing periodic patterns Sep. 3, 2013
8497977 Optical integrator, illumination optical system, exposure apparatus, and device manufacturing method Jul. 30, 2013
8467032 Exposure apparatus and electronic device manufacturing method Jun. 18, 2013
8411815 Grazing incidence collector for laser produced plasma sources Apr. 2, 2013
8368032 Radiation source, lithographic apparatus, and device manufacturing method Feb. 5, 2013
8351748 Mask-less method and structure for patterning photosensitive material using optical fibers Jan. 8, 2013
8335038 Apparatus for measuring aerial image of EUV mask Dec. 18, 2012
8335039 Method of measuring aerial image of EUV mask Dec. 18, 2012
8300205 Apparatus and method for washing alignment film printing mask and method for fabricating a liquid crystal display device Oct. 30, 2012
8289499 Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby Oct. 16, 2012
8229062 Transmission mask with differential attenuation to improve ISO-dense proximity Jul. 24, 2012
8153994 Cooling systems and methods for grazing incidence EUV lightography collectors Apr. 10, 2012
8144830 Reflective optical element for EUV lithography device Mar. 27, 2012
8121254 Optical element, exposure apparatus using this, and device manufacturing method Feb. 21, 2012
8121396 Assessing critical dimension and overlay tolerance Feb. 21, 2012
8111900 Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle Feb. 7, 2012
8101930 Method of increasing the operation lifetime of a collector optics arranged in an irradiation device Jan. 24, 2012
8103984 System and method for compressed design phase contour data Jan. 24, 2012
8064730 Device manufacturing method, orientation determination method and lithographic apparatus Nov. 22, 2011
8050380 Zone-optimized mirrors and optical systems using same Nov. 1, 2011
8051391 Method for layout of random via arrays in the presence of strong pitch restrictions Nov. 1, 2011
7919596 Method of arranging ferritin and method of arranging inorganic particles Apr. 5, 2011
7903780 X-ray ablation of hyaluronan hydrogels Mar. 8, 2011
7897941 Lithographic apparatus, device manufacturing method, and use of a radiation collector Mar. 1, 2011
7885387 Extreme ultraviolet light and X-ray source target and manufacturing method thereof Feb. 8, 2011
7880153 Extreme ultra violet light source apparatus Feb. 1, 2011
RE42065 Illumination system particularly for microlithography Jan. 25, 2011
7872245 Systems and methods for target material delivery in a laser produced plasma EUV light source Jan. 18, 2011
7873935 Method of manufacturing a mask Jan. 18, 2011
7872244 Lithographic apparatus and device manufacturing method Jan. 18, 2011
7871744 Near-field exposure apparatus and near-field exposure method Jan. 18, 2011
7863591 Radiation system and lithographic apparatus comprising the same Jan. 4, 2011
7859648 Passivation of multi-layer mirror for extreme ultraviolet lithography Dec. 28, 2010
7842936 Lithography system and projection method Nov. 30, 2010
7821714 Apparatus and method for measuring aerial image of EUV mask Oct. 26, 2010
7812329 System managing gas flow between chambers of an extreme ultraviolet (EUV) photolithography apparatus Oct. 12, 2010
RE41667 Illumination system particularly for microlithography Sep. 14, 2010
7787099 Apparatus and method for washing alignment film printing mask and method for fabricating a liquid crystal display device Aug. 31, 2010
7773196 Projection-optical systems and exposure apparatus comprising same Aug. 10, 2010
7767983 Exposure device Aug. 3, 2010
7741622 Exposure device Jun. 22, 2010
7737418 Debris mitigation system and lithographic apparatus Jun. 15, 2010
RE41362 Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby Jun. 1, 2010
7714305 Lithographic apparatus and device manufacturing method May. 11, 2010
7696492 Radiation system and lithographic apparatus Apr. 13, 2010
7687788 Debris prevention system, radiation system, and lithographic apparatus Mar. 30, 2010
7678458 Bonding silicon silicon carbide to glass ceramics Mar. 16, 2010
7663127 EUV debris mitigation filter and method for fabricating semiconductor dies using same Feb. 16, 2010

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