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Class Information
Number: 378/34
Name: X-ray or gamma ray systems or devices > Specific application > Lithography
Description: Subject matter including the projection of an X-ray image upon an X-ray sensitive resist usually through a patterned mask.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7615837 |
Lithography device for semiconductor circuit pattern generation |
Nov. 10, 2009 |
| 7614787 |
Marking apparatus used in a process for producing multi-layered printed circuit board |
Nov. 10, 2009 |
| 7612353 |
Lithographic apparatus, contaminant trap, and device manufacturing method |
Nov. 3, 2009 |
| 7613538 |
Compensation for distortion in contact lithography |
Nov. 3, 2009 |
| 7609805 |
Mask used for LIGA process, method of manufacturing the mask, and method of manufacturing microstructure using LIGA process |
Oct. 27, 2009 |
| 7608367 |
Vitreous carbon mask substrate for X-ray lithography |
Oct. 27, 2009 |
| 7605385 |
Electro-less discharge extreme ultraviolet light source |
Oct. 20, 2009 |
| 7596420 |
Device manufacturing method and computer program product |
Sep. 29, 2009 |
| 7586113 |
EUV illumination system |
Sep. 8, 2009 |
| 7583433 |
Multi mirror system for an illumination system |
Sep. 1, 2009 |
| 7576343 |
Method and apparatus for generating laser produced plasma |
Aug. 18, 2009 |
| 7557529 |
Stage unit and exposure apparatus |
Jul. 7, 2009 |
| 7554648 |
Blind devices and methods for providing continuous thermophoretic protection of lithographic reticle |
Jun. 30, 2009 |
| 7545483 |
Optical element unit for exposure processes |
Jun. 9, 2009 |
| 7545481 |
Lithographic apparatus and device manufacturing method |
Jun. 9, 2009 |
| 7545478 |
Lithographic apparatus, thermal conditioning system, and method for manufacturing a device |
Jun. 9, 2009 |
| 7541603 |
Radiation system and lithographic apparatus comprising the same |
Jun. 2, 2009 |
| 7542127 |
Lithographic apparatus and method for manufacturing a device |
Jun. 2, 2009 |
| 7538852 |
Exposure apparatus and device manufacturing method |
May. 26, 2009 |
| 7532308 |
Lithographic apparatus and device manufacturing method |
May. 12, 2009 |
| 7532309 |
Immersion lithography system and method having an immersion fluid containment plate for submerging the substrate to be imaged in immersion fluid |
May. 12, 2009 |
| 7528929 |
Lithographic apparatus and device manufacturing method |
May. 5, 2009 |
| 7528395 |
Radiation source, lithographic apparatus and device manufacturing method |
May. 5, 2009 |
| 7525635 |
Contamination barrier and lithographic apparatus |
Apr. 28, 2009 |
| 7525640 |
Lithographic apparatus and device manufacturing method |
Apr. 28, 2009 |
| 7518705 |
Lithographic apparatus and device manufacturing method |
Apr. 14, 2009 |
| 7518708 |
Liquid-immersion exposure method and liquid-immersion exposure apparatus |
Apr. 14, 2009 |
| 7511797 |
Lithography system, control system and device manufacturing method |
Mar. 31, 2009 |
| 7508580 |
8-mirror microlithography projection objective |
Mar. 24, 2009 |
| 7502095 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Mar. 10, 2009 |
| 7495744 |
Exposure method, exposure apparatus, and method for producing device |
Feb. 24, 2009 |
| 7490985 |
Semiconductor integrated circuit arrangement device and method |
Feb. 17, 2009 |
| 7485881 |
Lithographic apparatus, illumination system, filter system and method for cooling a support of such a filter system |
Feb. 3, 2009 |
| 7483119 |
Exposure method, substrate stage, exposure apparatus, and device manufacturing method |
Jan. 27, 2009 |
| 7476887 |
EUV light source optical elements |
Jan. 13, 2009 |
| 7474729 |
Soft X-ray microscope |
Jan. 6, 2009 |
| 7471371 |
Exposure apparatus and device fabrication method |
Dec. 30, 2008 |
| 7470033 |
Reflection-type projection-optical systems, and exposure apparatus comprising same |
Dec. 30, 2008 |
| 7468781 |
Exposure apparatus |
Dec. 23, 2008 |
| 7469058 |
Method and system for a maskless lithography rasterization technique based on global optimization |
Dec. 23, 2008 |
| 7465943 |
Controlling the flow through the collector during cleaning |
Dec. 16, 2008 |
| 7462841 |
Lithographic apparatus, device manufacturing method, and use of a radiation collector |
Dec. 9, 2008 |
| 7462842 |
Device, EUV lithographic device and method for preventing and cleaning contamination on optical elements |
Dec. 9, 2008 |
| 7460212 |
Collector configured of mirror shells |
Dec. 2, 2008 |
| RE40586 |
Reduced striae extreme ultra violet elements |
Nov. 25, 2008 |
| 7456931 |
Device manufacturing method, computer program product and lithographic apparatus |
Nov. 25, 2008 |
| 7456928 |
Systems and methods for controlling ambient pressure during processing of microfeature workpieces, including during immersion lithography |
Nov. 25, 2008 |
| 7453071 |
Contamination barrier and lithographic apparatus comprising same |
Nov. 18, 2008 |
| 7449692 |
Charged particle beam apparatus |
Nov. 11, 2008 |
| 7450301 |
Reflective projection lens for EUV-photolithography |
Nov. 11, 2008 |
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