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Class Information
Number: 372/76
Name: Coherent light generators > Particular pumping means > Pumping with optical or radiant energy > Plasma
Description: Subject matter in which the pumping means is an ionized gas of sufficient temperature to radiate electromagnetic energy.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8658967 Optically pumping to sustain plasma Feb. 25, 2014
8643840 Cell for light source Feb. 4, 2014
8461560 LPP EUV light source drive laser system Jun. 11, 2013
8462826 Laser device Jun. 11, 2013
8442091 Microchannel laser having microplasma gain media May. 14, 2013
8432949 High-power, high-throughput microwave discharge singlet oxygen generator for advanced electrical oxygen-iodine lasers Apr. 30, 2013
8384991 Saturable absorber using a fiber taper embedded in a nanostructure/polymer composite and lasers using the same Feb. 26, 2013
8368040 Radiation system and lithographic apparatus Feb. 5, 2013
8270449 Liquid supply devices and liquid cartridges Sep. 18, 2012
8259771 Initiating laser-sustained plasma Sep. 4, 2012
8253123 Method and device for generating EUV radiation or soft X-rays with enhanced efficiency Aug. 28, 2012
7817699 High-power, high-throughput microwave discharge singlet oxygen generator for advanced electrical oxygen-iodine lasers Oct. 19, 2010
7800086 Arrangement for radiation generation by means of a gas discharge Sep. 21, 2010
7738752 Optical waveguide system Jun. 15, 2010
7528395 Radiation source, lithographic apparatus and device manufacturing method May. 5, 2009
7489718 Matched impedance controlled avalanche driver Feb. 10, 2009
7427766 Method and apparatus for producing extreme ultraviolet radiation or soft X-ray radiation Sep. 23, 2008
7420191 Discharge radiation source, in particular UV radiation Sep. 2, 2008
7308007 Increased laser output energy and average power at wavelengths below 35 nm Dec. 11, 2007
7215697 Matched impedance controlled avalanche driver May. 8, 2007
7190872 Semiconductor optical amplifier and optical module using the same Mar. 13, 2007
7072370 Arrangement for generating pulsed currents with a high repetition rate and high current strength for gas discharge pumped radiation sources Jul. 4, 2006
6956885 Electromagnetic radiation generation using a laser produced plasma Oct. 18, 2005
6931049 Laser plasma generation method and system Aug. 16, 2005
6924600 Laser plasma generation method and structure thereof Aug. 2, 2005
6914927 Laser discharge chamber passivation by plasma Jul. 5, 2005
6529539 Molecular light emission device Mar. 4, 2003
6498832 Electrode configuration for extreme-UV electrical discharge source Dec. 24, 2002
6356618 Extreme-UV electrical discharge source Mar. 12, 2002
6185234 Laser oscillation device Feb. 6, 2001
6167065 Compact discharge pumped soft x-ray laser Dec. 26, 2000
6061379 Pulsed x-ray laser amplifier May. 9, 2000
5953360 All metal electrode sealed gas laser Sep. 14, 1999
5832007 Apparatus for and method of generating X-ray laser Nov. 3, 1998
5544191 Metal vapor laser capable of cold operation Aug. 6, 1996
5400357 Gas laser in particular CO.sub.2 laser Mar. 21, 1995
5394411 Method for producing high intensity optical through x-ray waveguide and applications Feb. 28, 1995
5381432 Gas laser oscillator Jan. 10, 1995
5345465 Apparatus and method for guiding an electric discharge Sep. 6, 1994
5335238 Apparatus and method for guiding an electric discharge with a magnetic field Aug. 2, 1994
5293573 Stripline laser including electrically conducting mirror Mar. 8, 1994
5107510 Apparatus and method for burst-mode operation of a pulsed laser Apr. 21, 1992
5003544 X-ray laser Mar. 26, 1991
4942580 X-ray laser with enhanced x-ray gain through photodepopulation Jul. 17, 1990
4939744 Method and apparatus for producing a photopumped VUV laser in MO6+ ion-containing plasma Jul. 3, 1990
4937832 Methods and apparatus for producing soft x-ray laser in a capillary discharge plasma Jun. 26, 1990
4926428 Method and apparatus for sensing the wavelength of a laser beam May. 15, 1990
4890294 Plasma apparatus Dec. 26, 1989
4889605 Plasma pinch system Dec. 26, 1989
4870653 Traveling-wave laser-produced-plasma energy source for photoionization laser pumping and lasers incorporating said Sep. 26, 1989

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