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Class Information
Number: 372/59
Name: Coherent light generators > Particular active media > Gas > Gas maintenance (e.g., purification, replenishment, etc.)
Description: Subject matter including means for maintaining the operational level of the active medium.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6674780 |
Gas drawing/refilling and sealing structure for gas laser |
Jan. 6, 2004 |
| 6671303 |
Closed-loop purging system for laser |
Dec. 30, 2003 |
| 6650681 |
Sealed exhaust chemical oxygen-iodine laser system |
Nov. 18, 2003 |
| 6647049 |
Iodine on-demand system for a chemical laser |
Nov. 11, 2003 |
| 6609540 |
Method and apparatus for supplying fluorine gas |
Aug. 26, 2003 |
| 6603786 |
Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube |
Aug. 5, 2003 |
| 6603790 |
Gas laser and a dedusting unit thereof |
Aug. 5, 2003 |
| 6577663 |
Narrow bandwidth oscillator-amplifier system |
Jun. 10, 2003 |
| 6567450 |
Very narrow band, two chamber, high rep rate gas discharge laser system |
May. 20, 2003 |
| 6549555 |
Gas performance control system for gas discharge lasers |
Apr. 15, 2003 |
| 6546037 |
Molecular fluorine laser with spectral linewidth of less than 1 pm |
Apr. 8, 2003 |
| 6539043 |
Discharge-pumped excimer laser device |
Mar. 25, 2003 |
| 6539042 |
Ultra pure component purge system for gas discharge laser |
Mar. 25, 2003 |
| 6529533 |
Beam parameter monitoring unit for a molecular fluorine (F2) laser |
Mar. 4, 2003 |
| 6526085 |
Performance control system and method for gas discharge lasers |
Feb. 25, 2003 |
| 6526084 |
Detection of F2-concentration for power stabilization of an F2-157 NM excimer laser by using red laser emission of F-atom |
Feb. 25, 2003 |
| 6522679 |
Gas laser discharge unit |
Feb. 18, 2003 |
| 6504861 |
Laser gas replenishment method |
Jan. 7, 2003 |
| 6504860 |
Purge monitoring system for gas discharge laser |
Jan. 7, 2003 |
| 6490307 |
Method and procedure to automatically stabilize excimer laser output parameters |
Dec. 3, 2002 |
| 6490306 |
Molecular fluorine laser with spectral linewidth of less than 1 pm |
Dec. 3, 2002 |
| 6490308 |
Laser gas replenishment method |
Dec. 3, 2002 |
| 6480517 |
Shadow device for a gas laser |
Nov. 12, 2002 |
| 6466602 |
Gas discharge laser long life electrodes |
Oct. 15, 2002 |
| 6404795 |
Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption lines |
Jun. 11, 2002 |
| 6389052 |
Laser gas replenishment method |
May. 14, 2002 |
| 6363094 |
Gas discharge laser electrode with reduced sensitivity to adverse boundary layer effects |
Mar. 26, 2002 |
| 6345065 |
F2-laser with line selection |
Feb. 5, 2002 |
| 6331994 |
Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube |
Dec. 18, 2001 |
| 6330267 |
Performance control system and method for gas discharge lasers |
Dec. 11, 2001 |
| 6330260 |
F2 laser with visible red and IR control |
Dec. 11, 2001 |
| 6320892 |
Energy efficient lithography laser |
Nov. 20, 2001 |
| 6310903 |
Gas laser device and integrated gas purifying means |
Oct. 30, 2001 |
| 6263007 |
Pulsed discharge gas laser having non-integral supply reservoir |
Jul. 17, 2001 |
| 6243406 |
Gas performance control system for gas discharge lasers |
Jun. 5, 2001 |
| 6243405 |
Very stable excimer or molecular fluorine laser |
Jun. 5, 2001 |
| 6219367 |
Method for determining life of laser light source |
Apr. 17, 2001 |
| 6219368 |
Beam delivery system for molecular fluorine (F2) laser |
Apr. 17, 2001 |
| 6215808 |
Laser apparatus, exposure apparatus, lithography system, method for producing circuit elements, gas supply system and gas supply method |
Apr. 10, 2001 |
| 6212214 |
Performance control system and method for gas discharge lasers |
Apr. 3, 2001 |
| 6195372 |
Cryogenically-cooled solid-state lasers |
Feb. 27, 2001 |
| 6151349 |
Automatic fluorine control system |
Nov. 21, 2000 |
| 6151350 |
Gas laser |
Nov. 21, 2000 |
| 6130904 |
Gas supplementation method of excimer laser apparatus |
Oct. 10, 2000 |
| 6111905 |
Method and device for purifying gas |
Aug. 29, 2000 |
| 6104735 |
Gas discharge laser with magnetic bearings and magnetic reluctance centering for fan drive assembly |
Aug. 15, 2000 |
| 6069909 |
Excimer laser with improved window mount |
May. 30, 2000 |
| 6060031 |
Method for neutralizing acid gases from laser exhaust |
May. 9, 2000 |
| 6049557 |
High power photolytic iodine laser |
Apr. 11, 2000 |
| 6034978 |
Gas discharge laser with gas temperature control |
Mar. 7, 2000 |
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