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Class Information
Number: 372/59
Name: Coherent light generators > Particular active media > Gas > Gas maintenance (e.g., purification, replenishment, etc.)
Description: Subject matter including means for maintaining the operational level of the active medium.










Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8681832 System and method for high accuracy gas inject in a two chamber gas discharge laser system Mar. 25, 2014
8649413 High-power laser focusing apparatus with pressurized housing and aerodynamic window Feb. 11, 2014
8585224 Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination Nov. 19, 2013
8576891 Gas laser oscillator and gas exchange method for gas laser oscillator Nov. 5, 2013
8416828 Catalyst module for high repetition rate CO.sub.2 lasers Apr. 9, 2013
8382301 Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination Feb. 26, 2013
8295316 Method and system for managing light source operation Oct. 23, 2012
8130810 Lasers Mar. 6, 2012
7873093 Method and apparatus for carrying out a laser operation and use of a quick-change filter in such a laser operation Jan. 18, 2011
7835414 Laser gas injection system Nov. 16, 2010
7819945 Metal fluoride trap Oct. 26, 2010
7664154 Gas laser oscillator and gas laser beam machine Feb. 16, 2010
7595463 Laser processing machine with monitoring of gas atmosphere and operating gases Sep. 29, 2009
7580439 Gas laser oscillator Aug. 25, 2009
7551661 Gas laser oscillator Jun. 23, 2009
7529285 Frequency stabilised gas laser May. 5, 2009
7522650 Gas discharge laser chamber improvements Apr. 21, 2009
7496126 Gas laser oscillator and method of measuring laser gas replacement amount Feb. 24, 2009
7469000 Gas lasers including nanoscale catalysts and methods for producing such lasers Dec. 23, 2008
7372887 Excimer laser device, laser gas exchange method and partial gas exchange quantity calculation method May. 13, 2008
7342948 Blower used for laser oscillator Mar. 11, 2008
7339972 Laser filament imager Mar. 4, 2008
7277464 Method and apparatus for controlling the output of a gas discharge laser system Oct. 2, 2007
7266137 Laser gas replenishment method Sep. 4, 2007
7239656 Closed-loop purging system for laser Jul. 3, 2007
7203216 Timing control for two-chamber gas discharge laser system Apr. 10, 2007
7158554 Methods and apparatus for regenerating fuels in a solid generator chemical oxygen iodine laser Jan. 2, 2007
7149237 Laser oscillator Dec. 12, 2006
7130324 Axial flow type gas laser oscillator Oct. 31, 2006
7088751 Solid-state laser apparatus Aug. 8, 2006
7085302 Laser apparatus, exposure apparatus and method Aug. 1, 2006
7075963 Tunable laser with stabilized grating Jul. 11, 2006
7061961 Very narrow band, two chamber, high rep-rate gas discharge laser system Jun. 13, 2006
7023893 Low-pressure axial direction excitation type F.sub.2 laser oscillator Apr. 4, 2006
7023895 Integrated dual source recycling system for chemical laser weapon systems Apr. 4, 2006
6985508 Very narrow band, two chamber, high reprate gas discharge laser system Jan. 10, 2006
6973112 Passive gas flow management and filtration device for use in an excimer or transverse discharge laser Dec. 6, 2005
6963595 Automatic gas control system for a gas discharge laser Nov. 8, 2005
6940886 Laser oscillator Sep. 6, 2005
6932944 High efficiency scrubber for waste gas abatement Aug. 23, 2005
6931046 High power laser having a trivalent liquid host Aug. 16, 2005
6922428 Gas laser apparatus for lithography Jul. 26, 2005
6914927 Laser discharge chamber passivation by plasma Jul. 5, 2005
6882674 Four KHz gas discharge laser system Apr. 19, 2005
6879617 Two stage laser system Apr. 12, 2005
6868106 Resonator optics for high power UV lasers Mar. 15, 2005
6865210 Timing control for two-chamber gas discharge laser system Mar. 8, 2005
6859482 Modular gas laser discharge unit Feb. 22, 2005
6842473 Water getter devices for laser amplifiers and process for the manufacture thereof Jan. 11, 2005
6839372 Gas discharge ultraviolet laser with enclosed beam path with added oxidizer Jan. 4, 2005

1 2 3 4 5 6










 
 
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