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Class Information
Number: 372/58
Name: Coherent light generators > Particular active media > Gas > With means for controlling gas flow
Description: Subject matter having means for moving gas through an activation area.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6532246 |
Excimer laser apparatus |
Mar. 11, 2003 |
| 6526084 |
Detection of F2-concentration for power stabilization of an F2-157 NM excimer laser by using red laser emission of F-atom |
Feb. 25, 2003 |
| 6526085 |
Performance control system and method for gas discharge lasers |
Feb. 25, 2003 |
| 6519273 |
Magnetic bearing and circulation fan apparatus |
Feb. 11, 2003 |
| 6504860 |
Purge monitoring system for gas discharge laser |
Jan. 7, 2003 |
| 6504861 |
Laser gas replenishment method |
Jan. 7, 2003 |
| 6493370 |
Laser gas replenishment method |
Dec. 10, 2002 |
| 6490305 |
Beam delivery system for molecular fluorine (F2) laser |
Dec. 3, 2002 |
| 6490306 |
Molecular fluorine laser with spectral linewidth of less than 1 pm |
Dec. 3, 2002 |
| 6487229 |
Beam delivery system for molecular fluorine (F2) laser |
Nov. 26, 2002 |
| 6477193 |
Extreme repetition rate gas discharge laser with improved blower motor |
Nov. 5, 2002 |
| 6477192 |
Device for on-line control of output power of vacuum-UV laser |
Nov. 5, 2002 |
| 6473445 |
Gas laser |
Oct. 29, 2002 |
| 6466599 |
Discharge unit for a high repetition rate excimer or molecular fluorine laser |
Oct. 15, 2002 |
| 6463084 |
Device for on-line control of output power of vacuum-UV laser |
Oct. 8, 2002 |
| 6459717 |
Continuous wave all gas phase iodine laser (AGIL) |
Oct. 1, 2002 |
| 6430205 |
Discharge unit for a high repetition rate excimer or molecular fluorine laser |
Aug. 6, 2002 |
| 6414979 |
Gas discharge laser with blade-dielectric electrode |
Jul. 2, 2002 |
| 6414978 |
Discharge unit for a high repetition rate excimer or molecular fluorine laser |
Jul. 2, 2002 |
| 6404795 |
Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption lines |
Jun. 11, 2002 |
| 6404794 |
Excimer laser apparatus |
Jun. 11, 2002 |
| 6389052 |
Laser gas replenishment method |
May. 14, 2002 |
| 6370173 |
Heat sink for hand-held, high power laser |
Apr. 9, 2002 |
| 6370174 |
Injection seeded F2 lithography laser |
Apr. 9, 2002 |
| 6363094 |
Gas discharge laser electrode with reduced sensitivity to adverse boundary layer effects |
Mar. 26, 2002 |
| 6359922 |
Single chamber gas discharge laser with line narrowed seed beam |
Mar. 19, 2002 |
| 6337872 |
Once through fan for excimer laser apparatus |
Jan. 8, 2002 |
| 6331994 |
Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube |
Dec. 18, 2001 |
| 6330267 |
Performance control system and method for gas discharge lasers |
Dec. 11, 2001 |
| 6330260 |
F2 laser with visible red and IR control |
Dec. 11, 2001 |
| 6327290 |
Beam delivery system for molecular fluorine (F2) laser |
Dec. 4, 2001 |
| 6316744 |
Machining head and process for the surface machining of workpieces by means of a laser beam |
Nov. 13, 2001 |
| 6317447 |
Electric discharge laser with acoustic chirp correction |
Nov. 13, 2001 |
| 6310903 |
Gas laser device and integrated gas purifying means |
Oct. 30, 2001 |
| 6240117 |
Fluorine control system with fluorine monitor |
May. 29, 2001 |
| 6219367 |
Method for determining life of laser light source |
Apr. 17, 2001 |
| 6215808 |
Laser apparatus, exposure apparatus, lithography system, method for producing circuit elements, gas supply system and gas supply method |
Apr. 10, 2001 |
| 6215806 |
Excimer laser generator provided with a laser chamber with a fluoride passivated inner surface |
Apr. 10, 2001 |
| 6212211 |
Shock wave dissipating laser chamber |
Apr. 3, 2001 |
| 6212214 |
Performance control system and method for gas discharge lasers |
Apr. 3, 2001 |
| 6208675 |
Blower assembly for a pulsed laser system incorporating ceramic bearings |
Mar. 27, 2001 |
| 6195378 |
Twisted blade tangential fan for excimer laser |
Feb. 27, 2001 |
| 6188709 |
Aerodynamic electrode support bar |
Feb. 13, 2001 |
| 6175583 |
Metal vapour laser |
Jan. 16, 2001 |
| 6169758 |
Laser output detector |
Jan. 2, 2001 |
| 6151349 |
Automatic fluorine control system |
Nov. 21, 2000 |
| 6144686 |
Tangential fan with cutoff assembly and vibration control for electric discharge laser |
Nov. 7, 2000 |
| 6061375 |
Laser irradiation system and application thereof |
May. 9, 2000 |
| 6061376 |
Tangential fan for excimer laser |
May. 9, 2000 |
| 6034984 |
Tangential fan with cutoff assembly and vibration control for electric discharge laser |
Mar. 7, 2000 |
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