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Class Information
Number: 372/58
Name: Coherent light generators > Particular active media > Gas > With means for controlling gas flow
Description: Subject matter having means for moving gas through an activation area.










Patents under this class:
1 2 3 4 5 6 7 8 9 10

Patent Number Title Of Patent Date Issued
7203216 Timing control for two-chamber gas discharge laser system Apr. 10, 2007
7194015 Laser oscillating apparatus and laser working machine Mar. 20, 2007
7190708 Annealed copper alloy electrodes for fluorine containing gas discharge lasers Mar. 13, 2007
7158553 Master oscillator/power amplifier excimer laser system with pulse energy and pointing control Jan. 2, 2007
7139301 Laser spectral engineering for lithographic process Nov. 21, 2006
7130324 Axial flow type gas laser oscillator Oct. 31, 2006
7116695 Laser output light pulse beam parameter transient correction system Oct. 3, 2006
7095773 Injection locking type or MOPA type of laser device Aug. 22, 2006
7088759 Resonator box to laser cavity interface for chemical laser Aug. 8, 2006
7085302 Laser apparatus, exposure apparatus and method Aug. 1, 2006
7075963 Tunable laser with stabilized grating Jul. 11, 2006
7068697 Adjustable flow guide to accommodate electrode erosion in a gas discharge laser Jun. 27, 2006
7061961 Very narrow band, two chamber, high rep-rate gas discharge laser system Jun. 13, 2006
7035306 Method of assaying fluorite sample and method of producing fluorite crystal Apr. 25, 2006
7031364 Gas laser device and exposure apparatus using the same Apr. 18, 2006
7016388 Laser lithography light source with beam delivery Mar. 21, 2006
6985508 Very narrow band, two chamber, high reprate gas discharge laser system Jan. 10, 2006
6973111 Injection locking type or MOPA type of gas laser device Dec. 6, 2005
6973112 Passive gas flow management and filtration device for use in an excimer or transverse discharge laser Dec. 6, 2005
6965624 Laser gas replenishment method Nov. 15, 2005
6963595 Automatic gas control system for a gas discharge laser Nov. 8, 2005
6937635 High rep-rate laser with improved electrodes Aug. 30, 2005
6931046 High power laser having a trivalent liquid host Aug. 16, 2005
6924600 Laser plasma generation method and structure thereof Aug. 2, 2005
6922428 Gas laser apparatus for lithography Jul. 26, 2005
6920170 Orthogonally excited-type laser oscillator Jul. 19, 2005
6914919 Six to ten KHz, or greater gas discharge laser system Jul. 5, 2005
6914927 Laser discharge chamber passivation by plasma Jul. 5, 2005
6898229 Gas circulation fan for excimer laser apparatus May. 24, 2005
6882674 Four KHz gas discharge laser system Apr. 19, 2005
6879617 Two stage laser system Apr. 12, 2005
6865210 Timing control for two-chamber gas discharge laser system Mar. 8, 2005
6847672 Laser gas supply path structure in an exposure apparatus Jan. 25, 2005
6847671 Blower for gas laser Jan. 25, 2005
6839372 Gas discharge ultraviolet laser with enclosed beam path with added oxidizer Jan. 4, 2005
6839373 Ultra-narrow band flourine laser apparatus Jan. 4, 2005
6834069 Molecular fluorine laser with intracavity polarization enhancer Dec. 21, 2004
6826221 Laser oscillator Nov. 30, 2004
6819698 Energy monitor for F2 molecular fluorine laser and method of energy stabilization Nov. 16, 2004
6819699 Arf excimer laser device, scanning type exposure device and ultraviolet laser device Nov. 16, 2004
6813301 Structure of reflux fan for excimer laser apparatus Nov. 2, 2004
6804286 Gas laser device Oct. 12, 2004
6804285 Gas supply path structure for a gas laser Oct. 12, 2004
6801554 Laser oscillating apparatus, exposure apparatus, and device fabrication method Oct. 5, 2004
6798812 Two chamber F2 laser system with F2 pressure based line selection Sep. 28, 2004
6798814 Gas discharge laser, method of operating a gas discharge laser, and use of a sintered filter Sep. 28, 2004
6795473 Narrow band excimer laser with a prism-grating as line-narrowing optical element Sep. 21, 2004
6785314 Electric discharge gas laser Aug. 31, 2004
6778584 High power gas discharge laser with helium purged line narrowing unit Aug. 17, 2004
6771684 Compact, flexible, rapid-pulsed, molecular gas laser Aug. 3, 2004

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