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Class Information
Number: 372/58
Name: Coherent light generators > Particular active media > Gas > With means for controlling gas flow
Description: Subject matter having means for moving gas through an activation area.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7372887 |
Excimer laser device, laser gas exchange method and partial gas exchange quantity calculation method |
May. 13, 2008 |
| 7369596 |
Chamber for a high energy excimer laser source |
May. 6, 2008 |
| 7366219 |
Line narrowing module |
Apr. 29, 2008 |
| 7342948 |
Blower used for laser oscillator |
Mar. 11, 2008 |
| 7315561 |
Laser generator |
Jan. 1, 2008 |
| 7277466 |
High power gas discharge laser with helium purged line narrowing unit |
Oct. 2, 2007 |
| 7260134 |
Dielectric coupled CO.sub.2 slab laser |
Aug. 21, 2007 |
| 7257144 |
Rare gas-halogen excimer lasers with baffles |
Aug. 14, 2007 |
| 7209507 |
Method and apparatus for controlling the output of a gas discharge MOPA laser system |
Apr. 24, 2007 |
| 7203216 |
Timing control for two-chamber gas discharge laser system |
Apr. 10, 2007 |
| 7203217 |
Narrow band electric discharge gas laser having improved beam direction stability |
Apr. 10, 2007 |
| 7194015 |
Laser oscillating apparatus and laser working machine |
Mar. 20, 2007 |
| 7190708 |
Annealed copper alloy electrodes for fluorine containing gas discharge lasers |
Mar. 13, 2007 |
| 7158553 |
Master oscillator/power amplifier excimer laser system with pulse energy and pointing control |
Jan. 2, 2007 |
| 7139301 |
Laser spectral engineering for lithographic process |
Nov. 21, 2006 |
| 7130324 |
Axial flow type gas laser oscillator |
Oct. 31, 2006 |
| 7116695 |
Laser output light pulse beam parameter transient correction system |
Oct. 3, 2006 |
| 7095773 |
Injection locking type or MOPA type of laser device |
Aug. 22, 2006 |
| 7088759 |
Resonator box to laser cavity interface for chemical laser |
Aug. 8, 2006 |
| 7085302 |
Laser apparatus, exposure apparatus and method |
Aug. 1, 2006 |
| 7075963 |
Tunable laser with stabilized grating |
Jul. 11, 2006 |
| 7068697 |
Adjustable flow guide to accommodate electrode erosion in a gas discharge laser |
Jun. 27, 2006 |
| 7061961 |
Very narrow band, two chamber, high rep-rate gas discharge laser system |
Jun. 13, 2006 |
| 7035306 |
Method of assaying fluorite sample and method of producing fluorite crystal |
Apr. 25, 2006 |
| 7031364 |
Gas laser device and exposure apparatus using the same |
Apr. 18, 2006 |
| 7016388 |
Laser lithography light source with beam delivery |
Mar. 21, 2006 |
| 6985508 |
Very narrow band, two chamber, high reprate gas discharge laser system |
Jan. 10, 2006 |
| 6973111 |
Injection locking type or MOPA type of gas laser device |
Dec. 6, 2005 |
| 6973112 |
Passive gas flow management and filtration device for use in an excimer or transverse discharge laser |
Dec. 6, 2005 |
| 6965624 |
Laser gas replenishment method |
Nov. 15, 2005 |
| 6963595 |
Automatic gas control system for a gas discharge laser |
Nov. 8, 2005 |
| 6937635 |
High rep-rate laser with improved electrodes |
Aug. 30, 2005 |
| 6931046 |
High power laser having a trivalent liquid host |
Aug. 16, 2005 |
| 6924600 |
Laser plasma generation method and structure thereof |
Aug. 2, 2005 |
| 6922428 |
Gas laser apparatus for lithography |
Jul. 26, 2005 |
| 6920170 |
Orthogonally excited-type laser oscillator |
Jul. 19, 2005 |
| 6914927 |
Laser discharge chamber passivation by plasma |
Jul. 5, 2005 |
| 6914919 |
Six to ten KHz, or greater gas discharge laser system |
Jul. 5, 2005 |
| 6898229 |
Gas circulation fan for excimer laser apparatus |
May. 24, 2005 |
| 6882674 |
Four KHz gas discharge laser system |
Apr. 19, 2005 |
| 6879617 |
Two stage laser system |
Apr. 12, 2005 |
| 6865210 |
Timing control for two-chamber gas discharge laser system |
Mar. 8, 2005 |
| 6847672 |
Laser gas supply path structure in an exposure apparatus |
Jan. 25, 2005 |
| 6847671 |
Blower for gas laser |
Jan. 25, 2005 |
| 6839372 |
Gas discharge ultraviolet laser with enclosed beam path with added oxidizer |
Jan. 4, 2005 |
| 6839373 |
Ultra-narrow band flourine laser apparatus |
Jan. 4, 2005 |
| 6834069 |
Molecular fluorine laser with intracavity polarization enhancer |
Dec. 21, 2004 |
| 6826221 |
Laser oscillator |
Nov. 30, 2004 |
| 6819698 |
Energy monitor for F2 molecular fluorine laser and method of energy stabilization |
Nov. 16, 2004 |
| 6819699 |
Arf excimer laser device, scanning type exposure device and ultraviolet laser device |
Nov. 16, 2004 |
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