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Class Information
Number: 372/57
Name: Coherent light generators > Particular active media > Gas > Excimer or exciplex
Description: Subject matter wherein the active media is a dimer or hetero nuclear complex, which is bound in the excited state and free or essentially free in the lower state.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5277040 |
Circulation type gas purification apparatus and method of operating the same |
Jan. 11, 1994 |
| 5260961 |
Sealed excimer laser with longitudinal discharge and transverse preionization for low-average-power uses |
Nov. 9, 1993 |
| 5255282 |
Open waveguide excimer laser |
Oct. 19, 1993 |
| 5251226 |
Discharge exciting excimer laser device |
Oct. 5, 1993 |
| 5243614 |
Wavelength stabilizer for narrow bandwidth laser |
Sep. 7, 1993 |
| 5239551 |
Microwave-driven UV solid-state laser |
Aug. 24, 1993 |
| 5237583 |
Excimer laser assembly and an optic mount therefor |
Aug. 17, 1993 |
| 5220574 |
Excimer laser with hydrogen chloride and method for producing hydrogen chloride for an excimer laser |
Jun. 15, 1993 |
| 5199267 |
Gas circulation type gas laser apparatus and method of operating the same |
Apr. 6, 1993 |
| 5200970 |
Methods and compositions for protecting laser excitation gases from contamination |
Apr. 6, 1993 |
| 5187716 |
Excimer laser device |
Feb. 16, 1993 |
| 5153892 |
High-pressure gas laser apparatus and method of laser processing |
Oct. 6, 1992 |
| 5150370 |
Narrow-band laser apparatus |
Sep. 22, 1992 |
| 5147711 |
Vacuum barrier for excimer lasers |
Sep. 15, 1992 |
| 5142543 |
Method and system for controlling narrow-band oscillation excimer laser |
Aug. 25, 1992 |
| 5138627 |
Preionizationd device, in particular for x-ray preionization in discharge-pumped gas lasers, in particular excimer lasers |
Aug. 11, 1992 |
| 5138622 |
Apparatus and method for generating high-power, high-voltage pulses, particularly for TE gas lasers |
Aug. 11, 1992 |
| 5134625 |
Condensed phase exciplex lasers |
Jul. 28, 1992 |
| 5107516 |
Apparatus for controlled ablation by laser radiation |
Apr. 21, 1992 |
| 5090020 |
Apparatus for controlling the composition of a laser gas or gas mixture |
Feb. 18, 1992 |
| 5081635 |
Apparatus for controlling output from an excimer laser device |
Jan. 14, 1992 |
| 5081638 |
Excimer laser |
Jan. 14, 1992 |
| 5062116 |
Halogen-compatible high-frequency discharge apparatus |
Oct. 29, 1991 |
| 5048041 |
Compact excimer laser |
Sep. 10, 1991 |
| 5033055 |
Compact excimer laser |
Jul. 16, 1991 |
| 5029177 |
Compact excimer laser |
Jul. 2, 1991 |
| 5027366 |
Compact excimer laser |
Jun. 25, 1991 |
| 5023884 |
Compact excimer laser |
Jun. 11, 1991 |
| 5018164 |
Excimer laser ablation method and apparatus for microcircuit fabrication |
May. 21, 1991 |
| 5018162 |
Compact excimer laser |
May. 21, 1991 |
| 5018161 |
Compact excimer laser |
May. 21, 1991 |
| 5005181 |
Method for controlling gas in halogen gas laser and device therefor |
Apr. 2, 1991 |
| 5005180 |
Laser catheter system |
Apr. 2, 1991 |
| 5001873 |
Method and apparatus for in situ cleaning of excimer laser optics |
Mar. 26, 1991 |
| 4991178 |
Laser apparatus |
Feb. 5, 1991 |
| 4985898 |
Narrow-band laser apparatus |
Jan. 15, 1991 |
| 4983039 |
Spectrometer |
Jan. 8, 1991 |
| 4980894 |
Ignitor for the preionization of a gas-discharge laser |
Dec. 25, 1990 |
| 4979181 |
Vacuum laser irradiating apparatus |
Dec. 18, 1990 |
| 4977749 |
Apparatus and method for purification of gases used in exciplex (excimer) lasers |
Dec. 18, 1990 |
| 4977573 |
Excimer laser output control device |
Dec. 11, 1990 |
| 4964137 |
Method of refining rare gas fluoride excimer laser gas |
Oct. 16, 1990 |
| 4959840 |
Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser |
Sep. 25, 1990 |
| 4958356 |
Excimer laser apparatus |
Sep. 18, 1990 |
| 4945546 |
Purely chemical process yielding continuous laser amplification in the visible and ultraviolet spectral ranges |
Jul. 31, 1990 |
| 4932747 |
Fiber bundle homogenizer and method utilizing same |
Jun. 12, 1990 |
| 4891818 |
Rare gas-halogen excimer laser |
Jan. 2, 1990 |
| 4890294 |
Plasma apparatus |
Dec. 26, 1989 |
| 4881231 |
Frequency-stabilized line-narrowed excimer laser source system for high resolution lithography |
Nov. 14, 1989 |
| 4876692 |
Microwave-pumped atomic gas laser |
Oct. 24, 1989 |
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