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Class Information
Number: 372/57
Name: Coherent light generators > Particular active media > Gas > Excimer or exciplex
Description: Subject matter wherein the active media is a dimer or hetero nuclear complex, which is bound in the excited state and free or essentially free in the lower state.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6021150 |
Laser having baffled enclosure |
Feb. 1, 2000 |
| 6014398 |
Narrow band excimer laser with gas additive |
Jan. 11, 2000 |
| 6014397 |
Laser chamber incorporating ceramic insulators coated with dielectric material |
Jan. 11, 2000 |
| 6005879 |
Pulse energy control for excimer laser |
Dec. 21, 1999 |
| 5991324 |
Reliable. modular, production quality narrow-band KRF excimer laser |
Nov. 23, 1999 |
| 5982800 |
Narrow band excimer laser |
Nov. 9, 1999 |
| 5982795 |
Excimer laser having power supply with fine digital regulation |
Nov. 9, 1999 |
| 5982801 |
Momentum transfer apparatus |
Nov. 9, 1999 |
| 5978409 |
Line narrowing apparatus with high transparency prism beam expander |
Nov. 2, 1999 |
| 5978394 |
Wavelength system for an excimer laser |
Nov. 2, 1999 |
| 5978391 |
Wavelength reference for excimer laser |
Nov. 2, 1999 |
| 5978406 |
Fluorine control system for excimer lasers |
Nov. 2, 1999 |
| 5978405 |
Laser chamber with minimized acoustic and shock wave disturbances |
Nov. 2, 1999 |
| 5970082 |
Very narrow band laser |
Oct. 19, 1999 |
| 5936988 |
High pulse rate pulse power system |
Aug. 10, 1999 |
| 5923693 |
Discharge electrode, shape-restoration thereof, excimer laser oscillator, and stepper |
Jul. 13, 1999 |
| 5901163 |
Narrow band laser with etalon based output coupler |
May. 4, 1999 |
| 5898725 |
Excimer laser with greater spectral bandwidth and beam stability |
Apr. 27, 1999 |
| 5856991 |
Very narrow band laser |
Jan. 5, 1999 |
| 5854803 |
Laser illumination system |
Dec. 29, 1998 |
| 5848089 |
Excimer laser with magnetic bearings supporting fan |
Dec. 8, 1998 |
| 5835520 |
Very narrow band KrF laser |
Nov. 10, 1998 |
| 5828686 |
Cartridge excimer laser system |
Oct. 27, 1998 |
| 5802094 |
Narrow band excimer laser |
Sep. 1, 1998 |
| 5771258 |
Aerodynamic chamber design for high pulse repetition rate excimer lasers |
Jun. 23, 1998 |
| 5764678 |
Wavelength-stabilized narrow band excimer laser |
Jun. 9, 1998 |
| 5764505 |
Gas discharge laser control systems using multiple CPU's with shared memory on a common bus |
Jun. 9, 1998 |
| 5757838 |
Output control method for excimer laser |
May. 26, 1998 |
| 5748656 |
Laser having improved beam quality and reduced operating cost |
May. 5, 1998 |
| 5729565 |
Discharge unit and electrode for a pulsed discharge laser |
Mar. 17, 1998 |
| 5710787 |
Output controller for laser device |
Jan. 20, 1998 |
| 5694411 |
Ultraviolet range laser and method for manufacturing the same |
Dec. 2, 1997 |
| 5663977 |
Gas laser apparatus |
Sep. 2, 1997 |
| 5661744 |
Excimer laser beam irradiation apparatus for optically processing workpiece |
Aug. 26, 1997 |
| 5659567 |
Microwave-driven UV light source and solid-state laser |
Aug. 19, 1997 |
| 5646954 |
Maintenance strategy control system and monitoring method for gas discharge lasers |
Jul. 8, 1997 |
| 5642374 |
Excimer laser device |
Jun. 24, 1997 |
| 5596596 |
Narrow band excimer laser |
Jan. 21, 1997 |
| 5594753 |
Cartridge excimer laser system |
Jan. 14, 1997 |
| 5539764 |
Laser generated X-ray source |
Jul. 23, 1996 |
| 5463650 |
Apparatus for controlling output of an excimer laser device |
Oct. 31, 1995 |
| 5450436 |
Laser gas replenishing apparatus and method in excimer laser system |
Sep. 12, 1995 |
| 5450434 |
Method to work cubic boron nitride article |
Sep. 12, 1995 |
| 5440578 |
Gas replenishment method and apparatus for excimer lasers |
Aug. 8, 1995 |
| 5425045 |
Short wavelength laser optical apparatus |
Jun. 13, 1995 |
| 5408489 |
Optical layer for excimer laser |
Apr. 18, 1995 |
| 5404366 |
Narrow band excimer laser and wavelength detecting apparatus |
Apr. 4, 1995 |
| 5396514 |
Excimer laser comprising a gas reservoir and a collecting receptacle and a method of refilling the gas reservoir of the laser with halogen gas |
Mar. 7, 1995 |
| 5386430 |
Excimer laser processing method and apparatus |
Jan. 31, 1995 |
| 5377215 |
Excimer laser |
Dec. 27, 1994 |
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