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Class Information
Number: 372/57
Name: Coherent light generators > Particular active media > Gas > Excimer or exciplex
Description: Subject matter wherein the active media is a dimer or hetero nuclear complex, which is bound in the excited state and free or essentially free in the lower state.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6466601 |
Beam seal for line narrowed production laser |
Oct. 15, 2002 |
| 6466602 |
Gas discharge laser long life electrodes |
Oct. 15, 2002 |
| 6466598 |
F2-laser with line selection |
Oct. 15, 2002 |
| 6466599 |
Discharge unit for a high repetition rate excimer or molecular fluorine laser |
Oct. 15, 2002 |
| 6463084 |
Device for on-line control of output power of vacuum-UV laser |
Oct. 8, 2002 |
| 6463086 |
Molecular fluorine laser with spectral linewidth of less than 1 pm |
Oct. 8, 2002 |
| 6459720 |
Excimer laser |
Oct. 1, 2002 |
| 6456642 |
Optical coupling device |
Sep. 24, 2002 |
| 6442181 |
Extreme repetition rate gas discharge laser |
Aug. 27, 2002 |
| 6430205 |
Discharge unit for a high repetition rate excimer or molecular fluorine laser |
Aug. 6, 2002 |
| 6426966 |
Molecular fluorine (F2) laser with narrow spectral linewidth |
Jul. 30, 2002 |
| 6421365 |
Narrow band excimer or molecular fluorine laser having an output coupling interferometer |
Jul. 16, 2002 |
| 6417591 |
Magnetic coupling mechanism for use in laser apparatus |
Jul. 9, 2002 |
| 6414979 |
Gas discharge laser with blade-dielectric electrode |
Jul. 2, 2002 |
| 6414978 |
Discharge unit for a high repetition rate excimer or molecular fluorine laser |
Jul. 2, 2002 |
| 6408260 |
Laser lithography quality alarm system |
Jun. 18, 2002 |
| 6404796 |
Laser resonator for improving narrow band emission of an excimer laser |
Jun. 11, 2002 |
| 6404795 |
Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption lines |
Jun. 11, 2002 |
| 6404794 |
Excimer laser apparatus |
Jun. 11, 2002 |
| 6396582 |
Wavelength reference for laser |
May. 28, 2002 |
| 6393042 |
Beam homogenizer and laser irradiation apparatus |
May. 21, 2002 |
| 6393040 |
Molecular fluorine (F2) excimer laser with reduced coherence length |
May. 21, 2002 |
| 6393037 |
Wavelength selector for laser with adjustable angular dispersion |
May. 21, 2002 |
| 6392743 |
Control technique for microlithography lasers |
May. 21, 2002 |
| 6389048 |
Detector with frequency converting coating |
May. 14, 2002 |
| 6381256 |
Molecular fluorine laser with spectral linewidth of less than 1 pm |
Apr. 30, 2002 |
| 6381257 |
Very narrow band injection seeded F2 lithography laser |
Apr. 30, 2002 |
| 6373869 |
System and method for generating coherent radiation at ultraviolet wavelengths |
Apr. 16, 2002 |
| 6370174 |
Injection seeded F2 lithography laser |
Apr. 9, 2002 |
| 6359922 |
Single chamber gas discharge laser with line narrowed seed beam |
Mar. 19, 2002 |
| 6345065 |
F2-laser with line selection |
Feb. 5, 2002 |
| 6337872 |
Once through fan for excimer laser apparatus |
Jan. 8, 2002 |
| 6331994 |
Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube |
Dec. 18, 2001 |
| 6330267 |
Performance control system and method for gas discharge lasers |
Dec. 11, 2001 |
| 6330261 |
Reliable, modular, production quality narrow-band high rep rate ArF excimer laser |
Dec. 11, 2001 |
| 6330260 |
F2 laser with visible red and IR control |
Dec. 11, 2001 |
| 6327290 |
Beam delivery system for molecular fluorine (F2) laser |
Dec. 4, 2001 |
| 6320892 |
Energy efficient lithography laser |
Nov. 20, 2001 |
| 6317447 |
Electric discharge laser with acoustic chirp correction |
Nov. 13, 2001 |
| 6317448 |
Bandwidth estimating technique for narrow band laser |
Nov. 13, 2001 |
| 6314119 |
Excimer laser with pulse and beam multiplier |
Nov. 6, 2001 |
| 6310903 |
Gas laser device and integrated gas purifying means |
Oct. 30, 2001 |
| 6301284 |
Narrow band UV laser with visible light guide laser |
Oct. 9, 2001 |
| 6298080 |
Narrow band excimer or molecular fluorine laser with adjustable bandwidth |
Oct. 2, 2001 |
| 6285701 |
Laser resonator for improving narrow band emission of an excimer laser |
Sep. 4, 2001 |
| 6282221 |
Excimer laser oscillation apparatus |
Aug. 28, 2001 |
| 6282222 |
Electron beam irradiation of gases and light source using the same |
Aug. 28, 2001 |
| 6272158 |
Method and apparatus for wavelength calibration |
Aug. 7, 2001 |
| 6269110 |
Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption lines |
Jul. 31, 2001 |
| 6243405 |
Very stable excimer or molecular fluorine laser |
Jun. 5, 2001 |
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