| |
 |
|
Class Information
Number: 372/57
Name: Coherent light generators > Particular active media > Gas > Excimer or exciplex
Description: Subject matter wherein the active media is a dimer or hetero nuclear complex, which is bound in the excited state and free or essentially free in the lower state.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6584132 |
Spinodal copper alloy electrodes |
Jun. 24, 2003 |
| 6584131 |
ArF excimer laser device for exposure |
Jun. 24, 2003 |
| 6577663 |
Narrow bandwidth oscillator-amplifier system |
Jun. 10, 2003 |
| 6577664 |
Excimer laser device |
Jun. 10, 2003 |
| 6577665 |
Molecular fluorine laser |
Jun. 10, 2003 |
| 6570901 |
Excimer or molecular fluorine laser having lengthened electrodes |
May. 27, 2003 |
| 6567450 |
Very narrow band, two chamber, high rep rate gas discharge laser system |
May. 20, 2003 |
| 6567451 |
Narrow band excimer or molecular fluorine laser having an output coupling interferometer |
May. 20, 2003 |
| 6563853 |
Gas performance control system for gas discharge lasers |
May. 13, 2003 |
| 6558991 |
Laser irradiation apparatus and laser irradiation method |
May. 6, 2003 |
| 6560263 |
Discharge laser having electrodes with sputter cavities and discharge peaks |
May. 6, 2003 |
| 6560254 |
Line-narrowing module for high power laser |
May. 6, 2003 |
| 6556613 |
F2-laser with line selection |
Apr. 29, 2003 |
| 6556609 |
Discharge unit for a high repetition rate excimer or molecular fluorine laser |
Apr. 29, 2003 |
| 6556600 |
Injection seeded F2 laser with centerline wavelength control |
Apr. 29, 2003 |
| 6553050 |
Narrow band excimer or molecular fluorine laser having an output coupling interferometer |
Apr. 22, 2003 |
| 6553049 |
ArF laser with low pulse energy and high rep rate |
Apr. 22, 2003 |
| 6549551 |
Injection seeded laser with precise timing control |
Apr. 15, 2003 |
| 6549555 |
Gas performance control system for gas discharge lasers |
Apr. 15, 2003 |
| 6546037 |
Molecular fluorine laser with spectral linewidth of less than 1 pm |
Apr. 8, 2003 |
| 6546036 |
Roof configuration for laser discharge electrodes |
Apr. 8, 2003 |
| 6539042 |
Ultra pure component purge system for gas discharge laser |
Mar. 25, 2003 |
| 6539043 |
Discharge-pumped excimer laser device |
Mar. 25, 2003 |
| 6535535 |
Laser irradiation method, laser irradiation apparatus, and semiconductor device |
Mar. 18, 2003 |
| 6535539 |
Excimer laser device |
Mar. 18, 2003 |
| 6532247 |
Laser wavelength control unit with piezoelectric driver |
Mar. 11, 2003 |
| 6532246 |
Excimer laser apparatus |
Mar. 11, 2003 |
| 6529531 |
Fast wavelength correction technique for a laser |
Mar. 4, 2003 |
| 6529533 |
Beam parameter monitoring unit for a molecular fluorine (F2) laser |
Mar. 4, 2003 |
| 6526084 |
Detection of F2-concentration for power stabilization of an F2-157 NM excimer laser by using red laser emission of F-atom |
Feb. 25, 2003 |
| 6526085 |
Performance control system and method for gas discharge lasers |
Feb. 25, 2003 |
| 6522674 |
Pulsed laser control system |
Feb. 18, 2003 |
| 6516012 |
Narrow band excimer or molecular fluorine laser having an output coupling interferometer |
Feb. 4, 2003 |
| 6516009 |
Laser irradiating device and laser irradiating method |
Feb. 4, 2003 |
| 6504860 |
Purge monitoring system for gas discharge laser |
Jan. 7, 2003 |
| 6498803 |
Narrow band excimer or molecular fluorine laser with adjustable bandwidth |
Dec. 24, 2002 |
| 6496528 |
Line narrowing unit with flexural grating mount |
Dec. 17, 2002 |
| 6493374 |
Smart laser with fast deformable grating |
Dec. 10, 2002 |
| 6490310 |
Laser discharge electrodes with current return plate structure |
Dec. 3, 2002 |
| 6490307 |
Method and procedure to automatically stabilize excimer laser output parameters |
Dec. 3, 2002 |
| 6490306 |
Molecular fluorine laser with spectral linewidth of less than 1 pm |
Dec. 3, 2002 |
| 6490305 |
Beam delivery system for molecular fluorine (F2) laser |
Dec. 3, 2002 |
| 6490304 |
Excimer laser device |
Dec. 3, 2002 |
| 6487233 |
Fiber-coupled microsphere laser |
Nov. 26, 2002 |
| 6487228 |
Narrow band excimer or molecular fluorine laser with adjustable bandwidth |
Nov. 26, 2002 |
| 6487229 |
Beam delivery system for molecular fluorine (F2) laser |
Nov. 26, 2002 |
| 6480517 |
Shadow device for a gas laser |
Nov. 12, 2002 |
| 6480518 |
Synthetic quartz glass member for use in ArF excimer laser lithography |
Nov. 12, 2002 |
| 6477192 |
Device for on-line control of output power of vacuum-UV laser |
Nov. 5, 2002 |
| 6477187 |
F2-laser with line selection |
Nov. 5, 2002 |
|
|
|
