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Class Information
Number: 372/57
Name: Coherent light generators > Particular active media > Gas > Excimer or exciplex
Description: Subject matter wherein the active media is a dimer or hetero nuclear complex, which is bound in the excited state and free or essentially free in the lower state.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6768762 |
High repetition rate UV excimer laser |
Jul. 27, 2004 |
| 6768765 |
High power excimer or molecular fluorine laser system |
Jul. 27, 2004 |
| 6765946 |
Fan for gas discharge laser |
Jul. 20, 2004 |
| 6765945 |
Injection seeded F2 laser with pre-injection filter |
Jul. 20, 2004 |
| 6763048 |
Line narrowing of molecular fluorine laser emission |
Jul. 13, 2004 |
| 6763049 |
Very high repetition rate power supply system and method |
Jul. 13, 2004 |
| 6757315 |
Corona preionization assembly for a gas laser |
Jun. 29, 2004 |
| 6757316 |
Four KHz gas discharge laser |
Jun. 29, 2004 |
| 6754247 |
ArF excimer laser devices, KrF excimer laser devices and fluorine alser devices |
Jun. 22, 2004 |
| 6741627 |
Photolithographic molecular fluorine laser system |
May. 25, 2004 |
| 6738406 |
Precision measurement of wavelengths emitted by a molecular fluorine laser at 157nm |
May. 18, 2004 |
| 6735225 |
Chirp compensation method and apparatus |
May. 11, 2004 |
| 6735232 |
Laser with versatile output energy |
May. 11, 2004 |
| 6735233 |
Gas discharge laser with means for removing gas impurities |
May. 11, 2004 |
| 6735236 |
High power gas discharge laser with line narrowing unit |
May. 11, 2004 |
| 6721345 |
Electrostatic precipitator corona discharge ignition voltage probe for gas status detection and control system for gas discharge lasers |
Apr. 13, 2004 |
| 6721340 |
Bandwidth control technique for a laser |
Apr. 13, 2004 |
| 6714576 |
Excimer laser and method of operating an excimer laser |
Mar. 30, 2004 |
| 6714577 |
Energy stabilized gas discharge laser |
Mar. 30, 2004 |
| 6704339 |
Lithography laser with beam delivery and beam pointing control |
Mar. 9, 2004 |
| 6700916 |
E-diagnostic, laser simulator, automated testing and deconvolution of spectra for lithographic exposure radiation generating systems such as excimer or molecular fluorine laser or EUV source s |
Mar. 2, 2004 |
| 6700915 |
Narrow band excimer laser with a resonator containing an optical element for making wavefront corrections |
Mar. 2, 2004 |
| 6690703 |
Molecular fluorine laser system |
Feb. 10, 2004 |
| 6690706 |
High rep-rate laser with improved electrodes |
Feb. 10, 2004 |
| 6690702 |
Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube |
Feb. 10, 2004 |
| 6678291 |
Molecular fluorine laser |
Jan. 13, 2004 |
| 6671294 |
Laser spectral engineering for lithographic process |
Dec. 30, 2003 |
| 6671302 |
Device for self-initiated UV pre-ionization of a repetitively pulsed gas laser |
Dec. 30, 2003 |
| RE38372 |
Narrow band excimer laser and wavelength detecting apparatus |
Dec. 30, 2003 |
| 6665326 |
Light source device |
Dec. 16, 2003 |
| 6661826 |
Laser chamber insulator with sealed electrode feedthrough |
Dec. 9, 2003 |
| 6650666 |
Laser wavelength control unit with piezoelectric driver |
Nov. 18, 2003 |
| 6643312 |
ArF excimer laser device and a fluoride laser device |
Nov. 4, 2003 |
| 6639929 |
Pulse oscillating gas laser device |
Oct. 28, 2003 |
| 6636546 |
ArF and KrF excimer laser apparatus and fluorine laser apparatus for lithography |
Oct. 21, 2003 |
| 6628682 |
Wavelength detection device for line-narrowed laser apparatus and ultra line-narrowed fluorine laser apparatus |
Sep. 30, 2003 |
| 6621846 |
Electric discharge laser with active wavelength chirp correction |
Sep. 16, 2003 |
| 6621847 |
Narrow-band excimer laser apparatus |
Sep. 16, 2003 |
| 6614828 |
Wavelength selector for laser with adjustable angular dispersion |
Sep. 2, 2003 |
| 6609540 |
Method and apparatus for supplying fluorine gas |
Aug. 26, 2003 |
| 6608853 |
Discharge electrodes structure for laser apparatus and laser apparatus therewith |
Aug. 19, 2003 |
| 6608848 |
Method and apparatus for wavelength calibration |
Aug. 19, 2003 |
| 6603786 |
Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube |
Aug. 5, 2003 |
| 6603787 |
Discharge-pumped excimer laser device |
Aug. 5, 2003 |
| 6603790 |
Gas laser and a dedusting unit thereof |
Aug. 5, 2003 |
| 6603789 |
Narrow band excimer or molecular fluorine laser with improved beam parameters |
Aug. 5, 2003 |
| 6603788 |
Resonator for single line selection |
Aug. 5, 2003 |
| 6594291 |
Ultra narrow band fluorine laser apparatus and fluorine exposure apparatus |
Jul. 15, 2003 |
| 6590922 |
Injection seeded F2 laser with line selection and discrimination |
Jul. 8, 2003 |
| 6590921 |
Narrow beam ArF excimer laser device |
Jul. 8, 2003 |
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