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Class Information
Number: 372/57
Name: Coherent light generators > Particular active media > Gas > Excimer or exciplex
Description: Subject matter wherein the active media is a dimer or hetero nuclear complex, which is bound in the excited state and free or essentially free in the lower state.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6956885 |
Electromagnetic radiation generation using a laser produced plasma |
Oct. 18, 2005 |
| 6944195 |
Laser irradiation method, laser irradiation apparatus, and semiconductor device |
Sep. 13, 2005 |
| 6941259 |
Laser software control system |
Sep. 6, 2005 |
| 6937635 |
High rep-rate laser with improved electrodes |
Aug. 30, 2005 |
| 6922428 |
Gas laser apparatus for lithography |
Jul. 26, 2005 |
| 6914927 |
Laser discharge chamber passivation by plasma |
Jul. 5, 2005 |
| 6914919 |
Six to ten KHz, or greater gas discharge laser system |
Jul. 5, 2005 |
| 6914920 |
Method for energy stabilization of gas discharged pumped in selected impulse following driven beam sources |
Jul. 5, 2005 |
| 6907058 |
Energy monitor for molecular fluorine laser |
Jun. 14, 2005 |
| 6904073 |
High power deep ultraviolet laser with long life optics |
Jun. 7, 2005 |
| 6898220 |
Gas laser machining apparatus |
May. 24, 2005 |
| 6882704 |
Radiation source for generating extreme ultraviolet radiation |
Apr. 19, 2005 |
| 6882674 |
Four KHz gas discharge laser system |
Apr. 19, 2005 |
| 6879617 |
Two stage laser system |
Apr. 12, 2005 |
| 6868106 |
Resonator optics for high power UV lasers |
Mar. 15, 2005 |
| 6865210 |
Timing control for two-chamber gas discharge laser system |
Mar. 8, 2005 |
| 6865212 |
Method for energy control of pulsed driven, gas discharged-coupled beam sources |
Mar. 8, 2005 |
| 6862307 |
Electrical excitation circuit for a pulsed gas laser |
Mar. 1, 2005 |
| 6859482 |
Modular gas laser discharge unit |
Feb. 22, 2005 |
| 6856639 |
High power slab type gas laser |
Feb. 15, 2005 |
| 6856638 |
Resonator arrangement for bandwidth control |
Feb. 15, 2005 |
| 6847670 |
Gas laser apparatus emitting ultraviolet radiation |
Jan. 25, 2005 |
| 6847672 |
Laser gas supply path structure in an exposure apparatus |
Jan. 25, 2005 |
| 6847671 |
Blower for gas laser |
Jan. 25, 2005 |
| 6839372 |
Gas discharge ultraviolet laser with enclosed beam path with added oxidizer |
Jan. 4, 2005 |
| 6839374 |
Barium fluoride high repetition rate UV excimer laser |
Jan. 4, 2005 |
| 6839373 |
Ultra-narrow band flourine laser apparatus |
Jan. 4, 2005 |
| 6836455 |
Recording/reproducing apparatus, and method of detecting state thereof |
Dec. 28, 2004 |
| 6834069 |
Molecular fluorine laser with intracavity polarization enhancer |
Dec. 21, 2004 |
| 6829279 |
Laser oscillating apparatus, exposure apparatus using the same and device fabrication method |
Dec. 7, 2004 |
| 6826221 |
Laser oscillator |
Nov. 30, 2004 |
| 6822977 |
Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser |
Nov. 23, 2004 |
| 6819698 |
Energy monitor for F2 molecular fluorine laser and method of energy stabilization |
Nov. 16, 2004 |
| 6819699 |
Arf excimer laser device, scanning type exposure device and ultraviolet laser device |
Nov. 16, 2004 |
| 6813301 |
Structure of reflux fan for excimer laser apparatus |
Nov. 2, 2004 |
| 6804285 |
Gas supply path structure for a gas laser |
Oct. 12, 2004 |
| 6804284 |
Optical element holding and extraction device |
Oct. 12, 2004 |
| 6801561 |
Laser system and method for spectral narrowing through wavefront correction |
Oct. 5, 2004 |
| 6801554 |
Laser oscillating apparatus, exposure apparatus, and device fabrication method |
Oct. 5, 2004 |
| 6801562 |
High repetition rate excimer laser system |
Oct. 5, 2004 |
| 6798812 |
Two chamber F2 laser system with F2 pressure based line selection |
Sep. 28, 2004 |
| 6795473 |
Narrow band excimer laser with a prism-grating as line-narrowing optical element |
Sep. 21, 2004 |
| 6795456 |
157 nm laser system and method for multi-layer semiconductor failure analysis |
Sep. 21, 2004 |
| 6795474 |
Gas discharge laser with improved beam path |
Sep. 21, 2004 |
| 6792023 |
Method and apparatus for reduction of spectral fluctuations |
Sep. 14, 2004 |
| 6785314 |
Electric discharge gas laser |
Aug. 31, 2004 |
| 6785316 |
Excimer or molecular laser with optimized spectral purity |
Aug. 31, 2004 |
| 6782030 |
Gas laser |
Aug. 24, 2004 |
| 6778584 |
High power gas discharge laser with helium purged line narrowing unit |
Aug. 17, 2004 |
| 6771683 |
Intra-cavity beam homogenizer resonator |
Aug. 3, 2004 |
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