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Class Information
Number: 372/57
Name: Coherent light generators > Particular active media > Gas > Excimer or exciplex
Description: Subject matter wherein the active media is a dimer or hetero nuclear complex, which is bound in the excited state and free or essentially free in the lower state.










Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12

Patent Number Title Of Patent Date Issued
8675707 Gas laser apparatus equipped with power calculation unit Mar. 18, 2014
8675700 Laser system and laser light generation method Mar. 18, 2014
8624209 Controlling spatial properties in an excimer ring amplifier Jan. 7, 2014
8611390 Gas laser having radial and axial gas bearings Dec. 17, 2013
8611393 Laser apparatus Dec. 17, 2013
8576891 Gas laser oscillator and gas exchange method for gas laser oscillator Nov. 5, 2013
8563956 Intracavity loss element for power amplifier Oct. 22, 2013
8502178 Extreme ultraviolet light source apparatus, method for controlling extreme ultraviolet light source apparatus, and recording medium with program recorded thereon Aug. 6, 2013
8422528 Ceramic slab, free-space and waveguide lasers Apr. 16, 2013
8416827 Gas laser oscillator Apr. 9, 2013
8411720 System and method for automatic gas optimization in a two-chamber gas discharge laser system Apr. 2, 2013
8391329 Gas laser discharge pre-ionization using a simmer-discharge Mar. 5, 2013
8379687 Gas discharge laser line narrowing module Feb. 19, 2013
8265117 Bandwidth-limited and long pulse master oscillator power oscillator laser systems Sep. 11, 2012
8254420 Advanced laser wavelength control Aug. 28, 2012
8223815 Multiple discharge CO.sub.2 laser with improved repetition rate Jul. 17, 2012
8199789 Arrangement for RF power delivery to a gas discharge laser with cascaded transmission line sections Jun. 12, 2012
8170078 Laser system May. 1, 2012
8165181 Polarization purity control device and gas laser apparatus provided with the same Apr. 24, 2012
8144740 Laser system Mar. 27, 2012
8135051 Gas laser oscillator Mar. 13, 2012
8126027 Line narrowing module Feb. 28, 2012
8116347 Two-stage laser system for aligners Feb. 14, 2012
8098698 Active spectral control of DUV laser light source Jan. 17, 2012
8050306 Acousto-optically Q-switched CO.sub.2 laser Nov. 1, 2011
8005126 Gas-discharge laser Aug. 23, 2011
8000361 Laser system Aug. 16, 2011
7999915 Laser system Aug. 16, 2011
RE42588 Control system for a two chamber gas discharge laser system Aug. 2, 2011
7970037 Arrangement for RF power delivery to a gas discharge laser with cascaded transmission line sections Jun. 28, 2011
7957449 Two-stage laser system for aligners Jun. 7, 2011
7920616 Laser system Apr. 5, 2011
7903699 Acousto-optically Q-switched CO.sub.2 laser Mar. 8, 2011
7903715 Slab type laser apparatus Mar. 8, 2011
7894500 Non-linear waveguided laser channel for a gas laser Feb. 22, 2011
7894494 Method and apparatus to control output spectrum bandwidth of MOPO or MOPA laser Feb. 22, 2011
7889775 Particle damage protection for high power CO.sub.2 slab laser mirrors Feb. 15, 2011
7885309 Laser system Feb. 8, 2011
7868999 Lithographic apparatus, source, source controller and control method Jan. 11, 2011
7852889 Active spectral control of DUV light source Dec. 14, 2010
7848378 Apparatus and method for monitoring power of a UV laser Dec. 7, 2010
7830942 Ultraviolet laser light source pulse energy control system Nov. 9, 2010
7822092 Laser system Oct. 26, 2010
7804877 Atomic lasers with exciplex assisted absorption Sep. 28, 2010
7792176 Narrow-band laser device for exposure apparatus Sep. 7, 2010
7782922 Excimer laser device operable at high repetition rate and having high band-narrowing efficiency Aug. 24, 2010
7778302 Laser system Aug. 17, 2010
7773656 Molecular hydrogen laser Aug. 10, 2010
7760788 Bandwidth-limited and long pulse master oscillator power oscillator laser systems Jul. 20, 2010
7756185 Hardened pump laser and method of making the same Jul. 13, 2010

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