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Class Information
Number: 372/56
Name: Coherent light generators > Particular active media > Gas > Metal vapor
Description: Subject matter wherein the gas is a vaporized metal.










Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8611390 Gas laser having radial and axial gas bearings Dec. 17, 2013
8411720 System and method for automatic gas optimization in a two-chamber gas discharge laser system Apr. 2, 2013
8295316 Method and system for managing light source operation Oct. 23, 2012
8258884 System for charging a vapor cell Sep. 4, 2012
8217347 System and method for detecting at least one contamination species in a lithographic apparatus Jul. 10, 2012
8199789 Arrangement for RF power delivery to a gas discharge laser with cascaded transmission line sections Jun. 12, 2012
8126027 Line narrowing module Feb. 28, 2012
7970037 Arrangement for RF power delivery to a gas discharge laser with cascaded transmission line sections Jun. 28, 2011
7957449 Two-stage laser system for aligners Jun. 7, 2011
7929586 Electromagnetically pumped alkali metal vapor cell system Apr. 19, 2011
7852899 Timing control for two-chamber gas discharge laser system Dec. 14, 2010
7804877 Atomic lasers with exciplex assisted absorption Sep. 28, 2010
7804876 Optically pumped alkali laser and amplifier using helium-3 buffer gas Sep. 28, 2010
7738752 Optical waveguide system Jun. 15, 2010
7643528 Immersion lithography laser light source with pulse stretcher Jan. 5, 2010
7586968 Heater-attached alkali-encapsulated cell and alkali laser apparatus Sep. 8, 2009
7567607 Very narrow band, two chamber, high rep-rate gas discharge laser system Jul. 28, 2009
7518787 Drive laser for EUV light source Apr. 14, 2009
7505504 Laser processing device Mar. 17, 2009
7382816 Two-stage laser pulse energy control device and two-stage laser system Jun. 3, 2008
7283576 Optically-pumped DUV atomic vapor lasers Oct. 16, 2007
7154928 Laser output beam wavefront splitter for bandwidth spectrum control Dec. 26, 2006
7145931 Diode pumped alkali-molecular lasers and amplifiers Dec. 5, 2006
7106776 Discharge-pumped "dressed-atom" coherent light amplifier and generators Sep. 12, 2006
7085302 Laser apparatus, exposure apparatus and method Aug. 1, 2006
7061958 Diode-pumped alkali lasers (DPALs) and amplifiers (DPAAs) with reduced buffer gas pressures Jun. 13, 2006
7061960 Diode-pumped alkali amplifier Jun. 13, 2006
7058110 Excited state atomic line filters Jun. 6, 2006
7058109 Image amplification for laser systems Jun. 6, 2006
6987790 Excimer or molecular fluorine laser with several discharge chambers Jan. 17, 2006
6963595 Automatic gas control system for a gas discharge laser Nov. 8, 2005
6931049 Laser plasma generation method and system Aug. 16, 2005
6879617 Two stage laser system Apr. 12, 2005
6865210 Timing control for two-chamber gas discharge laser system Mar. 8, 2005
6856639 High power slab type gas laser Feb. 15, 2005
6826221 Laser oscillator Nov. 30, 2004
6738400 Large diameter lasing tube cooling arrangement May. 18, 2004
6693944 Sputtering metal ion laser Feb. 17, 2004
6693942 Diode-pumped visible wavelength alkali laser Feb. 17, 2004
6643311 Diode-pumped alkali laser Nov. 4, 2003
6529539 Molecular light emission device Mar. 4, 2003
6229837 Metal-vapor pulsed laser May. 8, 2001
6175583 Metal vapour laser Jan. 16, 2001
6001664 Method for making closely-spaced VCSEL and photodetector on a substrate Dec. 14, 1999
5912914 Insulated laser tube structure and method of making same Jun. 15, 1999
5898723 Metal vapor laser device Apr. 27, 1999
5682397 Er:YALO upconversion laser Oct. 28, 1997
5544191 Metal vapor laser capable of cold operation Aug. 6, 1996
5504770 Liquid metal confinement cylinder for optical discharge devices Apr. 2, 1996
5450433 Laser arrangement including effeciency improving gas reservoirs in thermal insulation Sep. 12, 1995

1 2 3 4










 
 
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