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Class Information
Number: 361/283.4
Name: Electricity: electrical systems and devices > Electrostatic capacitors > Variable > Responsive to external condition > Pressure > By diaphragm
Description: Subject matter in which the pressure condition is sensed by a flexible wall or plate.










Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8704538 Capacitance sensors Apr. 22, 2014
8667849 Pressure sensor Mar. 11, 2014
8656787 Electrostatic capacitive pressure sensor Feb. 25, 2014
8640547 Pressure sensor with a flexible membrane Feb. 4, 2014
8631709 Pressure transducer structures having a plurality of conductive traces for curved surfaces Jan. 21, 2014
8631708 Apparatus and method for minimizing drift of a piezo-resistive pressure sensor due to the progressive release of mechanical stress over time Jan. 21, 2014
8627559 Media-compatible electrically isolated pressure sensor for high temperature applications Jan. 14, 2014
8590387 Absolute capacitive micro pressure sensor Nov. 26, 2013
8587565 Position indicator, variable capacitor and input device Nov. 19, 2013
8522620 Pressure sensor and use thereof in a fluid tank Sep. 3, 2013
8516894 Electronic circuit for controlling a capacitive pressure sensor and capacitive pressure sensor system Aug. 27, 2013
8511170 Pressure transducer having structure for monitoring surface charge Aug. 20, 2013
8511168 Sensor element for capacitively measuring differential pressure Aug. 20, 2013
8511169 Monolithic vacuum manometer utilizing electrostatic interference as a means of detection Aug. 20, 2013
8471346 Semiconductor device including a cavity Jun. 25, 2013
8429979 Capacitance type pressure sensor Apr. 30, 2013
8413518 Sensor membrane Apr. 9, 2013
8393222 Apparatus and method for minimizing drift of a piezo-resistive pressure sensor due to progressive release of mechanical stress over time Mar. 12, 2013
8393223 Pressure sensor with resistance strain gages Mar. 12, 2013
8371174 Micro-deformable piezoresistive material and manufacturing method thereof and pressure sensor using the same Feb. 12, 2013
8358047 Buried traces for sealed electrostatic membrane actuators or sensors Jan. 22, 2013
8272272 Pressure measurement module Sep. 25, 2012
8256299 Pressure sensor having a cap above a first diaphragm connected to a hollow space below a second diaphragm Sep. 4, 2012
8250925 Workpiece composite having a preform and a gel Aug. 28, 2012
8240217 Diaphragm isolation forming through subtractive etching Aug. 14, 2012
8234926 Pressure sensor with a closed cavity containing an inert filling medium Aug. 7, 2012
8215176 Pressure sensor for harsh media sensing and flexible packaging Jul. 10, 2012
8156817 Pressure detection device Apr. 17, 2012
8146437 Diaphragm structure and MEMS device Apr. 3, 2012
8141430 Monolithic vacuum manometer utilizing electrostatic interference as a means of detection Mar. 27, 2012
8141429 High temperature capacitive static/dynamic pressure sensors and methods of making the same Mar. 27, 2012
8132465 Sensor element placement for package stress compensation Mar. 13, 2012
8096189 Physical quantity sensor and method for manufacturing the same Jan. 17, 2012
8079269 Electrostatic pressure sensor with porous dielectric diaphragm Dec. 20, 2011
8042401 Isolation system for process pressure measurement Oct. 25, 2011
8012360 Pressure sensor Sep. 6, 2011
7942062 Pressure sensor and method for manufacturing the same May. 17, 2011
7900518 Microfabricated implantable wireless pressure sensor for use in biomedical applications and pressure measurement and sensor implantation methods Mar. 8, 2011
7864503 Capacitive type touch panel Jan. 4, 2011
7841238 Pressure sensor with temperature compensation Nov. 30, 2010
7798007 Hydraulic pressure intermediary Sep. 21, 2010
7775118 Sensor element assembly and method Aug. 17, 2010
7762140 Combined fluid pressure and temperature sensor apparatus Jul. 27, 2010
7681457 Micromechanical pressure sensing device Mar. 23, 2010
7614308 Diaphragm pressure measuring cell arrangement Nov. 10, 2009
7607355 Semiconductor device Oct. 27, 2009
7581447 Temperature compensating pressure sensing arrangement Sep. 1, 2009
7571650 Piezo resistive pressure sensor Aug. 11, 2009
7568394 Enhanced diaphragm for pressure sensing system and method Aug. 4, 2009
7559247 Pressure sensor with reduced size strain gauge mounting structure and manufacturing method of the same Jul. 14, 2009

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