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Class Information
Number: 361/283.4
Name: Electricity: electrical systems and devices > Electrostatic capacitors > Variable > Responsive to external condition > Pressure > By diaphragm
Description: Subject matter in which the pressure condition is sensed by a flexible wall or plate.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7418871 |
Method for detecting a pressure of a medium and pressure measuring device |
Sep. 2, 2008 |
| 7395719 |
Preformed sensor housings and methods to produce thin metal diaphragms |
Jul. 8, 2008 |
| 7356913 |
Process for manufacturing a microsystem |
Apr. 15, 2008 |
| 7319581 |
Capacitive pressure sensor |
Jan. 15, 2008 |
| 7316163 |
Method of forming a seal between a housing and a diaphragm of a capacitance sensor |
Jan. 8, 2008 |
| 7252011 |
Surface area deposition trap |
Aug. 7, 2007 |
| 7254008 |
Integrated capacitive microfluidic sensors method and apparatus |
Aug. 7, 2007 |
| 7242570 |
Vacuum capacitor |
Jul. 10, 2007 |
| 7176390 |
Capacitive load cell with multi-layer dielectric for extended range |
Feb. 13, 2007 |
| 7159465 |
Fluororesin thin film diaphragm pressure sensor and method of fabricating the same |
Jan. 9, 2007 |
| 7140085 |
Process for manufacturing a capacitive vacuum measuring cell |
Nov. 28, 2006 |
| 7135749 |
Pressure sensor |
Nov. 14, 2006 |
| 7107855 |
Membrane for capacitive vacuum measuring cell |
Sep. 19, 2006 |
| 6993973 |
Contaminant deposition control baffle for a capacitive pressure transducer |
Feb. 7, 2006 |
| 6992492 |
Capacitive sensor |
Jan. 31, 2006 |
| 6903915 |
Variable capacitor voltage-controllable by use of coulomb blocking phenomenon |
Jun. 7, 2005 |
| 6892582 |
Semiconductor pressure sensor and pressure sensing device |
May. 17, 2005 |
| 6883377 |
Measurement device including a pressure sensor |
Apr. 26, 2005 |
| 6874367 |
Pressure sensor |
Apr. 5, 2005 |
| 6865799 |
Method of manufacturing strain-detecting devices |
Mar. 15, 2005 |
| 6828801 |
Capacitive sensor |
Dec. 7, 2004 |
| 6802222 |
Diaphragm-type semiconductor device and method for manufacturing diaphragm-type semiconductor device |
Oct. 12, 2004 |
| 6791342 |
Electrostatic capacitance sensor |
Sep. 14, 2004 |
| 6781814 |
Capacitive pressure transducer |
Aug. 24, 2004 |
| 6776046 |
Pressure sensor with foresighted maintenance control and monitoring for diaphragm fracture and to a method for monitoring for diaphragm fracture |
Aug. 17, 2004 |
| 6725724 |
Manufacturing method for a thin-film high-pressure sensor |
Apr. 27, 2004 |
| 6725725 |
Micromechanical differential pressure sensor device |
Apr. 27, 2004 |
| 6704185 |
Capacitive pressure-responsive devices and their fabrication |
Mar. 9, 2004 |
| 6688181 |
Membrane pressure sensor comprising silicon carbide and method for making same |
Feb. 10, 2004 |
| 6690569 |
Capacitive sensor |
Feb. 10, 2004 |
| 6684711 |
Three-phase excitation circuit for compensated capacitor industrial process control transmitters |
Feb. 3, 2004 |
| 6687643 |
In-situ sensor system and method for data acquisition in liquids |
Feb. 3, 2004 |
| 6658938 |
Electret transducer |
Dec. 9, 2003 |
| 6651506 |
Differential capacitive pressure sensor and fabricating method therefor |
Nov. 25, 2003 |
| 6626044 |
Freeze resistant sensor |
Sep. 30, 2003 |
| 6622368 |
Method of manufacturing a transducer having a diaphragm with a predetermined tension |
Sep. 23, 2003 |
| 6615665 |
Pressure measuring device |
Sep. 9, 2003 |
| 6606911 |
Pressure sensors |
Aug. 19, 2003 |
| 6604426 |
Variable capacitance pressure sensor |
Aug. 12, 2003 |
| 6606235 |
Photolithographically-patterned variable capacitor structures and method of making |
Aug. 12, 2003 |
| 6564643 |
Capacitive pressure sensor |
May. 20, 2003 |
| 6556418 |
Micromechanical component and process for its fabrication |
Apr. 29, 2003 |
| 6541833 |
Micromechanical component with sealed membrane openings and method of fabricating a micromechanical component |
Apr. 1, 2003 |
| 6532834 |
Capacitive pressure sensor having encapsulated resonating components |
Mar. 18, 2003 |
| 6527961 |
Method of manufacturing pressure microsensors |
Mar. 4, 2003 |
| 6465271 |
Method of fabricating silicon capacitive sensor |
Oct. 15, 2002 |
| 6456477 |
Linear capacitance detection circuit |
Sep. 24, 2002 |
| 6441449 |
MEMS variable capacitor with stabilized electrostatic drive and method therefor |
Aug. 27, 2002 |
| 6418006 |
Wide tuning range variable MEMs capacitor |
Jul. 9, 2002 |
| 6363790 |
Pressure sensor |
Apr. 2, 2002 |
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