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Class Information
Number: 361/234
Name: Electricity: electrical systems and devices > Electric charge generating or conducting means (e.g., charging of gases) > Use of forces of electric charge or field > Pinning
Description: Subject matter relating to the utilization of the forces generated to effect the holding or pinning of an object or material on a surface.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5996218 |
Method of forming an electrostatic chuck suitable for magnetic flux processing |
Dec. 7, 1999 |
| 5998932 |
Focus ring arrangement for substantially eliminating unconfined plasma in a plasma processing chamber |
Dec. 7, 1999 |
| 5995357 |
Ceramic member-electric power supply connector coupling structure |
Nov. 30, 1999 |
| 5986873 |
Creating surface topography on an electrostatic chuck with a mandrel |
Nov. 16, 1999 |
| 5986874 |
Electrostatic support assembly having an integral ion focus ring |
Nov. 16, 1999 |
| 5986875 |
Puncture resistant electrostatic chuck |
Nov. 16, 1999 |
| 5985035 |
Method of holding substrate and substrate holding system |
Nov. 16, 1999 |
| 5982607 |
Monopolar electrostatic chuck having an electrode in contact with a workpiece |
Nov. 9, 1999 |
| 5978202 |
Electrostatic chuck having a thermal transfer regulator pad |
Nov. 2, 1999 |
| 5969934 |
Electrostatic wafer clamp having low particulate contamination of wafers |
Oct. 19, 1999 |
| 5961774 |
Method of holding substrate and substrate holding system |
Oct. 5, 1999 |
| 5956837 |
Method of detaching object to be processed from electrostatic chuck |
Sep. 28, 1999 |
| 5953200 |
Multiple pole electrostatic chuck with self healing mechanism for wafer clamping |
Sep. 14, 1999 |
| 5948986 |
Monitoring of wafer presence and position in semiconductor processing operations |
Sep. 7, 1999 |
| 5946183 |
Electrostatic chuck |
Aug. 31, 1999 |
| 5946184 |
Electrostatic chuck, and method of and apparatus for processing sample |
Aug. 31, 1999 |
| 5936829 |
Thermally conductive chuck for vacuum processor |
Aug. 10, 1999 |
| 5933314 |
Method and an apparatus for offsetting plasma bias voltage in bi-polar electro-static chucks |
Aug. 3, 1999 |
| 5930661 |
Substrate clamp design for minimizing substrate to clamp sticking during thermal processing of thermally flowable layers |
Jul. 27, 1999 |
| 5923521 |
Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck |
Jul. 13, 1999 |
| 5916689 |
Electrostatic chuck with an impregnated, porous layer that exhibits the Johnson-Rahbeck effect |
Jun. 29, 1999 |
| 5917327 |
Technique and apparatus for testing electrostatic chucks |
Jun. 29, 1999 |
| 5914568 |
Plasma processing apparatus |
Jun. 22, 1999 |
| 5909355 |
Ceramic electrostatic chuck and method of fabricating same |
Jun. 1, 1999 |
| 5909354 |
Electrostatic chuck member having an alumina-titania spray coated layer and a method of producing the same |
Jun. 1, 1999 |
| 5909086 |
Plasma generator for generating unipolar plasma |
Jun. 1, 1999 |
| 5906684 |
Method of holding substrate and substrate holding system |
May. 25, 1999 |
| 5905626 |
Electrostatic chuck with ceramic pole protection |
May. 18, 1999 |
| 5903428 |
Hybrid Johnsen-Rahbek electrostatic chuck having highly resistive mesas separating the chuck from a wafer supported thereupon and method of fabricating same |
May. 11, 1999 |
| 5901030 |
Electrostatic chuck employing thermoelectric cooling |
May. 4, 1999 |
| 5900062 |
Lift pin for dechucking substrates |
May. 4, 1999 |
| 5894400 |
Method and apparatus for clamping a substrate |
Apr. 13, 1999 |
| 5886865 |
Method and apparatus for predicting failure of an eletrostatic chuck |
Mar. 23, 1999 |
| 5886866 |
Electrostatic chuck having a combination electrode structure for substrate chucking, heating and biasing |
Mar. 23, 1999 |
| 5886863 |
Wafer support member |
Mar. 23, 1999 |
| 5886864 |
Substrate support member for uniform heating of a substrate |
Mar. 23, 1999 |
| 5883778 |
Electrostatic chuck with fluid flow regulator |
Mar. 16, 1999 |
| 5880921 |
Monolithically integrated switched capacitor bank using micro electro mechanical system (MEMS) technology |
Mar. 9, 1999 |
| 5880922 |
Multilayered electrostatic chuck and method of manufacture thereof |
Mar. 9, 1999 |
| 5880923 |
Method and apparatus for improved retention of a semiconductor wafer within a semiconductor wafer processing system |
Mar. 9, 1999 |
| 5880924 |
Electrostatic chuck capable of rapidly dechucking a substrate |
Mar. 9, 1999 |
| 5872694 |
Method and apparatus for determining wafer warpage for optimized electrostatic chuck clamping voltage |
Feb. 16, 1999 |
| 5870271 |
Pressure actuated sealing diaphragm for chucks |
Feb. 9, 1999 |
| 5867359 |
Electrostatic chuck |
Feb. 2, 1999 |
| 5864459 |
Process for providing a glass dielectric layer on an electrically conductive substrate and electrostatic chucks made by the process |
Jan. 26, 1999 |
| 5856906 |
Backside gas quick dump apparatus for a semiconductor wafer processing system |
Jan. 5, 1999 |
| 5851641 |
Electrostatic chucking device |
Dec. 22, 1998 |
| 5847918 |
Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors |
Dec. 8, 1998 |
| 5841623 |
Chuck for substrate processing and method for depositing a film in a radio frequency biased plasma chemical depositing system |
Nov. 24, 1998 |
| 5841624 |
Cover layer for a substrate support chuck and method of fabricating same |
Nov. 24, 1998 |
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