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Class Information
Number: 361/234
Name: Electricity: electrical systems and devices > Electric charge generating or conducting means (e.g., charging of gases) > Use of forces of electric charge or field > Pinning
Description: Subject matter relating to the utilization of the forces generated to effect the holding or pinning of an object or material on a surface.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7416793 |
Electrostatic chuck and manufacturing method for the same, and alumina sintered member and manufacturing method for the same |
Aug. 26, 2008 |
| 7417236 |
Sheet beam-type testing apparatus |
Aug. 26, 2008 |
| 7414823 |
Holder for use in semiconductor or liquid-crystal manufacturing device and semiconductor or liquid-crystal manufacturing device in which the holder is installed |
Aug. 19, 2008 |
| 7411773 |
Electrostatic chucking device and manufacturing method thereof |
Aug. 12, 2008 |
| 7407559 |
Method of producing liquid crystal display devices |
Aug. 5, 2008 |
| 7408760 |
Charged particle beam application system |
Aug. 5, 2008 |
| 7403386 |
Electrostatic chuck |
Jul. 22, 2008 |
| 7397648 |
Electrostatic chuck including a heater mechanism |
Jul. 8, 2008 |
| 7394640 |
Electrostatic chuck and substrate fixing method using the same |
Jul. 1, 2008 |
| 7393433 |
Plasma processing apparatus, semiconductor manufacturing apparatus and electrostatic chucking unit used thereof |
Jul. 1, 2008 |
| 7385799 |
Offset phase operation on a multiphase AC electrostatic clamp |
Jun. 10, 2008 |
| 7381293 |
Convex insert ring for etch chamber |
Jun. 3, 2008 |
| 7378616 |
Heating apparatus and method for semiconductor devices |
May. 27, 2008 |
| 7375946 |
Method and apparatus for dechucking a substrate |
May. 20, 2008 |
| 7375947 |
Method of feedback control of ESC voltage using wafer voltage measurement at the bias supply output |
May. 20, 2008 |
| 7372690 |
Substrate holder which is self-adjusting for substrate deformation |
May. 13, 2008 |
| 7372689 |
Guard wafer for semiconductor structure fabrication |
May. 13, 2008 |
| 7372691 |
Apparatus and method for joining two substrates |
May. 13, 2008 |
| 7369393 |
Electrostatic chucks having barrier layer |
May. 6, 2008 |
| 7364624 |
Wafer handling apparatus and method of manufacturing thereof |
Apr. 29, 2008 |
| 7361230 |
Substrate processing apparatus |
Apr. 22, 2008 |
| 7359177 |
Dual bias frequency plasma reactor with feedback control of E.S.C. voltage using wafer voltage measurement at the bias supply output |
Apr. 15, 2008 |
| 7352554 |
Method for fabricating a Johnsen-Rahbek electrostatic wafer clamp |
Apr. 1, 2008 |
| 7352555 |
Electrostatic chuck |
Apr. 1, 2008 |
| 7336471 |
Charge eliminating mechanism for stage and testing apparatus |
Feb. 26, 2008 |
| 7330346 |
Etching apparatus, method for measuring self-bias voltage, and method for monitoring etching apparatus |
Feb. 12, 2008 |
| 7327438 |
Lithographic apparatus and method of a manufacturing device |
Feb. 5, 2008 |
| 7317606 |
Particle trap for electrostatic chuck |
Jan. 8, 2008 |
| 7312974 |
Electrostatic chuck |
Dec. 25, 2007 |
| 7292428 |
Electrostatic chuck with smart lift-pin mechanism for a plasma reactor |
Nov. 6, 2007 |
| 7292427 |
Pin lift chuck assembly for warped substrates |
Nov. 6, 2007 |
| 7292426 |
Substrate holding system and exposure apparatus using the same |
Nov. 6, 2007 |
| 7281491 |
Dielectric-coated electrode, plasma discharge treatment apparatus and method for forming thin film |
Oct. 16, 2007 |
| 7283346 |
Electrostatic chuck and its manufacturing method |
Oct. 16, 2007 |
| 7280341 |
Electrostatic chuck |
Oct. 9, 2007 |
| 7265963 |
Holding mechanism of object to be processed |
Sep. 4, 2007 |
| 7265962 |
Electrostatic chuck and production method therefor |
Sep. 4, 2007 |
| 7264676 |
Plasma apparatus and method capable of adaptive impedance matching |
Sep. 4, 2007 |
| 7264699 |
Workpiece holder for processing apparatus, and processing apparatus using the same |
Sep. 4, 2007 |
| 7259955 |
Electrostatic holding device and electrostatic tweezers using the same |
Aug. 21, 2007 |
| 7248456 |
Electrostatic chuck |
Jul. 24, 2007 |
| 7248457 |
Electrostatic chuck |
Jul. 24, 2007 |
| 7245357 |
Lithographic apparatus and device manufacturing method |
Jul. 17, 2007 |
| 7241346 |
Apparatus for vapor deposition |
Jul. 10, 2007 |
| 7235137 |
Conductor treating single-wafer type treating device and method for semi-conductor treating |
Jun. 26, 2007 |
| 7224568 |
Plasma processing method and plasma processing apparatus |
May. 29, 2007 |
| 7220319 |
Electrostatic chucking stage and substrate processing apparatus |
May. 22, 2007 |
| 7221553 |
Substrate support having heat transfer system |
May. 22, 2007 |
| 7218502 |
Bonding member and electrostatic chuck |
May. 15, 2007 |
| 7218503 |
Method of determining the correct average bias compensation voltage during a plasma process |
May. 15, 2007 |
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