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Class Information
Number: 361/234
Name: Electricity: electrical systems and devices > Electric charge generating or conducting means (e.g., charging of gases) > Use of forces of electric charge or field > Pinning
Description: Subject matter relating to the utilization of the forces generated to effect the holding or pinning of an object or material on a surface.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7623333 |
Ion chip operating module |
Nov. 24, 2009 |
| 7623334 |
Electrostatic chuck device |
Nov. 24, 2009 |
| 7619870 |
Electrostatic chuck |
Nov. 17, 2009 |
| 7620511 |
Method for determining plasma characteristics |
Nov. 17, 2009 |
| 7615133 |
Electrostatic chuck module and cooling system |
Nov. 10, 2009 |
| 7608162 |
Plasma processing apparatus and method |
Oct. 27, 2009 |
| 7606020 |
Light exposure apparatus |
Oct. 20, 2009 |
| 7595972 |
Clamp for use in processing semiconductor workpieces |
Sep. 29, 2009 |
| 7592261 |
Method for suppressing charging of component in vacuum processing chamber of plasma processing system and plasma processing system |
Sep. 22, 2009 |
| 7589950 |
Detachable electrostatic chuck having sealing assembly |
Sep. 15, 2009 |
| 7586734 |
Electrostatic chuck |
Sep. 8, 2009 |
| 7582367 |
Ceramic member and manufacturing method for the same |
Sep. 1, 2009 |
| 7583491 |
Electrostatic chuck to limit particle deposits thereon |
Sep. 1, 2009 |
| 7583492 |
Method of determining the correct average bias compensation voltage during a plasma process |
Sep. 1, 2009 |
| 7580238 |
Electrostatic chuck structure for semiconductor manufacturing apparatus |
Aug. 25, 2009 |
| 7576967 |
Electrostatic chuck |
Aug. 18, 2009 |
| 7567421 |
Bipolar electrostatic chuck |
Jul. 28, 2009 |
| 7567422 |
Plasma processing apparatus and plasma processing method |
Jul. 28, 2009 |
| 7567423 |
Pressure assisted wafer holding apparatus and control method |
Jul. 28, 2009 |
| 7564672 |
Transfer-ESC based on a wafer |
Jul. 21, 2009 |
| 7558045 |
Electrostatic chuck assembly with capacitive sense feature, and related operating method |
Jul. 7, 2009 |
| 7554787 |
Wall crawling devices |
Jun. 30, 2009 |
| 7551419 |
Electroadhesion |
Jun. 23, 2009 |
| 7544251 |
Method and apparatus for controlling temperature of a substrate |
Jun. 9, 2009 |
| 7544393 |
Substrate table, production method therefor and plasma treating device |
Jun. 9, 2009 |
| 7542263 |
Overlay correction by reducing wafer slipping after alignment |
Jun. 2, 2009 |
| 7528935 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
May. 5, 2009 |
| 7525787 |
Electrostatic chuck assembly with dielectric material and/or cavity having varying thickness, profile and/or shape, method of use and apparatus incorporating same |
Apr. 28, 2009 |
| 7511936 |
Method and apparatus for dynamic plasma treatment of bipolar ESC system |
Mar. 31, 2009 |
| 7511935 |
Electrostatic chuck and method of its manufacture |
Mar. 31, 2009 |
| 7508646 |
Substrate holding technique |
Mar. 24, 2009 |
| 7505118 |
Wafer carrier |
Mar. 17, 2009 |
| 7495881 |
Chucking method and processing method using the same |
Feb. 24, 2009 |
| 7488543 |
Aluminum nitride conjugate body and method of producing the same |
Feb. 10, 2009 |
| 7489494 |
Guard wafer for semiconductor structure fabrication |
Feb. 10, 2009 |
| 7483256 |
Electrostatic chuck |
Jan. 27, 2009 |
| 7480129 |
Detachable electrostatic chuck for supporting a substrate in a process chamber |
Jan. 20, 2009 |
| 7468880 |
Electrostatic chuck |
Dec. 23, 2008 |
| 7469165 |
Machined part and method of manufacture |
Dec. 23, 2008 |
| 7466531 |
Substrate holding system and exposure apparatus using the same |
Dec. 16, 2008 |
| 7455735 |
Width adjustable substrate support for plasma processing |
Nov. 25, 2008 |
| 7457097 |
Pressure assisted wafer holding apparatus and control method |
Nov. 25, 2008 |
| 7457098 |
Electrostatic chuck |
Nov. 25, 2008 |
| 7450365 |
Electrostatic chuck |
Nov. 11, 2008 |
| 7446284 |
Etch resistant wafer processing apparatus and method for producing the same |
Nov. 4, 2008 |
| 7446993 |
Alumina sintered body |
Nov. 4, 2008 |
| 7436645 |
Method and apparatus for controlling temperature of a substrate |
Oct. 14, 2008 |
| 7430037 |
Reticle cassette and exposure apparatus using reticle cassette |
Sep. 30, 2008 |
| 7430104 |
Electrostatic chuck for wafer metrology and inspection equipment |
Sep. 30, 2008 |
| 7422656 |
Dry etching method and apparatus for use in the LCD device |
Sep. 9, 2008 |
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