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Browse by Category: Main > Optical & Optics
Class Information
Number: 359/224
Name: Optical: systems and elements > Deflection using a moving element or medium (offsetting or changing at least a portion of the beam) > By moving a reflective element > Reflective element moved by deformable support
Description: Subject matter wherein a support element is extended or contracted to modify the position of the reflecting element.










Patents under this class:
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Patent Number Title Of Patent Date Issued
6844952 Actuator-controlled mirror with Z-stop mechanism Jan. 18, 2005
6843574 Gimbaled micromechanical rotation system Jan. 18, 2005
6842277 Deformable mirror with high-bandwidth servo for rigid body control Jan. 11, 2005
6840642 Thermally actuated micro mirror and electronic device Jan. 11, 2005
6831768 Using time and/or power modulation to achieve dose gray-scaling in optical maskless lithography Dec. 14, 2004
6831765 Tiltable-body apparatus, and method of fabricating the same Dec. 14, 2004
6831390 Microelectromechanical system with stiff coupling Dec. 14, 2004
6831391 Microelectromechanical system for tilting a platform Dec. 14, 2004
6829077 Diffractive light modulator with dynamically rotatable diffraction plane Dec. 7, 2004
6829069 Two-dimensional free-space optical wavelength routing element based on stepwise controlled tilting mirrors Dec. 7, 2004
6820988 Bulk silicon mirrors with hinges underneath Nov. 23, 2004
6822776 Scanning micromirror for optical communication systems and method of manufacturing the same Nov. 23, 2004
6822779 Method of finding drive values for an actuation mechanism Nov. 23, 2004
6819822 Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing Nov. 16, 2004
6817725 Micro mirror unit and method of making the same Nov. 16, 2004
6813054 Micro-electro-mechanical device having improved torsional members and a method of manufacturing therefor Nov. 2, 2004
6813055 Optical beam steering device Nov. 2, 2004
6808276 Suspended high reflectivity coating on release structure and fabrication process therefor Oct. 26, 2004
6809851 MEMS driver Oct. 26, 2004
6805454 MEMS structure with mechanical overdeflection limiter Oct. 19, 2004
6806991 Fully released MEMs XYZ flexure stage with integrated capacitive feedback Oct. 19, 2004
6794793 Microelectromechnical system for tilting a platform Sep. 21, 2004
6795225 Micromirror unit with torsion connector having nonconstant width Sep. 21, 2004
6791731 Micro-optical switch and method for manufacturing the same Sep. 14, 2004
6784771 MEMS optical mirror array Aug. 31, 2004
6781279 Micro-actuator with interdigitated combs perpendicular to a base Aug. 24, 2004
6781208 Functional device, method of manufacturing therefor and driver circuit Aug. 24, 2004
6781732 Electromagnetically actuated micromirror actuator and fabrication method thereof Aug. 24, 2004
6781731 Micromirror device and projector employing the same Aug. 24, 2004
6778728 Micro-electro-mechanical mirror devices having a high linear mirror fill factor Aug. 17, 2004
6778306 Surface micromachined optical system with reinforced mirror microstructure Aug. 17, 2004
6778305 Surface micromachined optical system with reinforced mirror microstructure Aug. 17, 2004
6775050 Micromirror actuator Aug. 10, 2004
6775043 Reflector assemblies for optical cross-connect switches and switches fabricated therefrom Aug. 10, 2004
6775039 Driving circuit for an optical scanner Aug. 10, 2004
6774535 Micromechanical platform pivotal on a compliant member Aug. 10, 2004
6771859 Self-aligning optical micro-mechanical device package Aug. 3, 2004
6768571 Orientation stabilization for MEMS devices Jul. 27, 2004
6765706 Optical deflector Jul. 20, 2004
6765710 Interference tabs for avoiding snapdown of optical membrane and fabrication process Jul. 20, 2004
6765712 Lithographic apparatus, device manufacturing method, and device manufactured thereby Jul. 20, 2004
6763161 Optical microdevice with rotatable microactuator Jul. 13, 2004
6762873 Methods of driving an array of optical elements Jul. 13, 2004
6758571 Scanning MEMS mirror with reluctance force motor Jul. 6, 2004
6760145 Actuator for dual-axis rotation micromirror Jul. 6, 2004
6753638 Electrostatic actuator for micromechanical systems Jun. 22, 2004
6751006 Processing techniques for superimposing images for image projection Jun. 15, 2004
6749346 Miniature scanning confocal microscope Jun. 15, 2004
6747784 Compliant mechanism and method of forming same Jun. 8, 2004
6744173 Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods Jun. 1, 2004

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