| |
 |
|
Class Information
Number: 356/635
Name: Optics: measuring and testing > Dimension > Width or diameter
Description: Subject matter comprising means for measuring width or diameter of an object.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7612896 |
Optically measuring interior cavities |
Nov. 3, 2009 |
| 7609393 |
Filling test method and device |
Oct. 27, 2009 |
| 7599064 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method, substrate for use in the methods |
Oct. 6, 2009 |
| 7595482 |
Standard component for length measurement, method for producing the same, and electron beam metrology system using the same |
Sep. 29, 2009 |
| 7578068 |
Detecting apparatus for workpiece |
Aug. 25, 2009 |
| 7580137 |
Method and apparatus for determining one or more physical properties of a rolled smoking article or filter rod |
Aug. 25, 2009 |
| 7564569 |
Optical wheel evaluation |
Jul. 21, 2009 |
| 7543371 |
Apparatus for a disk drive actuator pivot set height tooling with an active servo compensation |
Jun. 9, 2009 |
| 7505155 |
Apparatus and method for inspecting poly-silicon |
Mar. 17, 2009 |
| 7485859 |
Charged beam apparatus and method that provide charged beam aerial dimensional map |
Feb. 3, 2009 |
| 7483156 |
Method for measuring overlay and overlay mark used therefor |
Jan. 27, 2009 |
| 7461463 |
Eccentricity gauge for wire and cable and method for measuring concentricity |
Dec. 9, 2008 |
| 7463367 |
Estimating overlay error and optical aberrations |
Dec. 9, 2008 |
| 7456978 |
Shape measuring apparatus |
Nov. 25, 2008 |
| 7440121 |
Optically measuring interior cavities |
Oct. 21, 2008 |
| 7436527 |
Systems and methods for immersion metrology |
Oct. 14, 2008 |
| 7423269 |
Automated feature analysis with off-axis tilting |
Sep. 9, 2008 |
| 7420670 |
Measuring instrument and method for operating a measuring instrument for optical inspection of an object |
Sep. 2, 2008 |
| 7409309 |
Method of deciding the quality of the measurement value by the edge width |
Aug. 5, 2008 |
| 7400418 |
Method and an apparatus for determining the clearance between a turbine casing and the tip of a moving turbine blade |
Jul. 15, 2008 |
| 7397252 |
Measurement of critical dimension and quantification of electron beam size at real time using electron beam induced current |
Jul. 8, 2008 |
| 7391524 |
System and method for efficient characterization of diffracting structures with incident plane parallel to grating lines |
Jun. 24, 2008 |
| 7379185 |
Evaluation of openings in a dielectric layer |
May. 27, 2008 |
| 7379194 |
Method and system for determining mail piece dimensions using swept laser beam |
May. 27, 2008 |
| 7375831 |
Line width measuring method, substrate processing method, substrate processing apparatus and substrate cooling processing unit |
May. 20, 2008 |
| 7349106 |
Apparatus and method for thin-layer metrology |
Mar. 25, 2008 |
| 7336377 |
Foot measuring device |
Feb. 26, 2008 |
| 7301623 |
Transferring, buffering and measuring a substrate in a metrology system |
Nov. 27, 2007 |
| 7297930 |
Device for measuring width by light attenuation difference |
Nov. 20, 2007 |
| 7285781 |
Characterizing resist line shrinkage due to CD-SEM inspection |
Oct. 23, 2007 |
| 7280233 |
Method and apparatus for inspecting an edge exposure area of a wafer |
Oct. 9, 2007 |
| 7276380 |
Transparent liquid inspection apparatus, transparent liquid inspection method, and transparent liquid application method |
Oct. 2, 2007 |
| 7274472 |
Resolution enhanced optical metrology |
Sep. 25, 2007 |
| 7262868 |
Method of and apparatus for ascertaining the transverse dimensions of rod-shaped articles |
Aug. 28, 2007 |
| 7215431 |
Systems and methods for immersion metrology |
May. 8, 2007 |
| 7079263 |
Method and apparatus for on-line log diameter measurement and closed-loop control |
Jul. 18, 2006 |
| 7072051 |
Laser diffraction process and apparatus for width measurement of elongated objects |
Jul. 4, 2006 |
| 7046376 |
Overlay targets with isolated, critical-dimension features and apparatus to measure overlay |
May. 16, 2006 |
| 7042551 |
Method of patterning process metrology based on the intrinsic focus offset |
May. 9, 2006 |
| 7038767 |
Three-dimensional micropattern profile measuring system and method |
May. 2, 2006 |
| 7032740 |
Device for sensing the wear state of wheels or rollers |
Apr. 25, 2006 |
| 7020324 |
Precision measurement of tube wall thickness |
Mar. 28, 2006 |
| 6986280 |
Integrated measuring instrument |
Jan. 17, 2006 |
| 6980937 |
Method and system for quantifying the step profile characteristics semiconductor features using surface analysis data |
Dec. 27, 2005 |
| 6968847 |
Method of and apparatus for measuring the diameters of rod-shaped articles |
Nov. 29, 2005 |
| 6965438 |
Vehicle measuring apparatus and method for toll collection system |
Nov. 15, 2005 |
| 6960416 |
Method and apparatus for controlling etch processes during fabrication of semiconductor devices |
Nov. 1, 2005 |
| 6956659 |
Measurement of critical dimensions of etched features |
Oct. 18, 2005 |
| 6947152 |
High speed laser micrometer |
Sep. 20, 2005 |
| 6929110 |
Coin chute with optical coin discrimination |
Aug. 16, 2005 |
|
|
|
