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Class Information
Number: 356/630
Name: Optics: measuring and testing > Dimension > Thickness
Description: Subject matter comprising means to measure the distance between opposite surfaces in a direction perpendicular to the length and breath of an object.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7626712 |
Methods and systems for characterizing semiconductor materials |
Dec. 1, 2009 |
| 7619753 |
Method for measuring dimensions and optical system using the same |
Nov. 17, 2009 |
| 7612894 |
Fiber laser for ultrasonic testing |
Nov. 3, 2009 |
| 7599076 |
Method for optically detecting height of a specimen and charged particle beam apparatus using the same |
Oct. 6, 2009 |
| 7595896 |
Thin films measurement method and system |
Sep. 29, 2009 |
| 7593119 |
Generation of a library of periodic grating diffraction signals |
Sep. 22, 2009 |
| 7580138 |
Methods and systems for characterizing semiconductor materials |
Aug. 25, 2009 |
| 7573582 |
Method for monitoring film thickness, a system for monitoring film thickness, a method for manufacturing a semiconductor device, and a program product for controlling film thickness monitoring |
Aug. 11, 2009 |
| 7573586 |
Method and system for measuring a coating thickness |
Aug. 11, 2009 |
| 7570373 |
System and method to measure parameters distribution in sheet-like objects |
Aug. 4, 2009 |
| 7570372 |
Optical device for measuring the thickness of an at least partially transparent medium |
Aug. 4, 2009 |
| 7567351 |
High resolution monitoring of CD variations |
Jul. 28, 2009 |
| 7508531 |
System and method for measuring germanium concentration for manufacturing control of BiCMOS films |
Mar. 24, 2009 |
| RE40676 |
Scanner unit for an optical position measuring device |
Mar. 24, 2009 |
| 7505154 |
Optical method for the characterization of laterally patterned samples in integrated circuits |
Mar. 17, 2009 |
| 7499185 |
Measuring device for workpiece held on chuck table |
Mar. 3, 2009 |
| 7495782 |
Method and system for measuring patterned structures |
Feb. 24, 2009 |
| 7495762 |
High-density channels detecting device |
Feb. 24, 2009 |
| 7495772 |
Multi-cavity Fabry-Perot interferometric thin-film sensor with built-in temperature compensation |
Feb. 24, 2009 |
| 7492465 |
Method for determining optimal resist thickness |
Feb. 17, 2009 |
| 7477408 |
System and method for thickness measurement |
Jan. 13, 2009 |
| 7477407 |
Confocal optical device and spherical-aberration correction method |
Jan. 13, 2009 |
| 7477385 |
Method of determining physical properties of an optical layer or layer system |
Jan. 13, 2009 |
| 7474420 |
In-die optical metrology |
Jan. 6, 2009 |
| 7469164 |
Method and apparatus for process control with in-die metrology |
Dec. 23, 2008 |
| 7468800 |
Method and apparatus for determining surface properties |
Dec. 23, 2008 |
| 7468799 |
Scanning interferometry for thin film thickness and surface measurements |
Dec. 23, 2008 |
| 7466428 |
Method of measuring thickness of thin layer in semiconductor device and apparatus for performing method |
Dec. 16, 2008 |
| 7460236 |
Analytical method and apparatus |
Dec. 2, 2008 |
| 7460251 |
Dimension monitoring method and system |
Dec. 2, 2008 |
| 7450233 |
Measuring device for the measurement of optical properties of coated substrates |
Nov. 11, 2008 |
| 7446889 |
Method of evaluating film thickness, method of detecting polishing terminal, and device-manufacturing apparatus |
Nov. 4, 2008 |
| 7443517 |
Measuring instrument and laser beam machine for wafer |
Oct. 28, 2008 |
| 7436527 |
Systems and methods for immersion metrology |
Oct. 14, 2008 |
| 7436526 |
Real-time system for monitoring and controlling film uniformity and method of applying the same |
Oct. 14, 2008 |
| 7433060 |
Method for correlating a structural parameter of a plurality of gratings and method for determining a structural parameter value of an unknown grating using the same |
Oct. 7, 2008 |
| 7428064 |
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus |
Sep. 23, 2008 |
| 7420690 |
End point detection in workpiece processing |
Sep. 2, 2008 |
| 7420691 |
Method and apparatus for measuring interfacial positions, method and apparatus for measuring layer thickness, and method and apparatus for manufacturing optical discs |
Sep. 2, 2008 |
| 7417749 |
Method and apparatus for protecting an optical transmission measurement when sensing transparent materials |
Aug. 26, 2008 |
| 7414740 |
Method and apparatus for contactless optical measurement of the thickness of a hot glass body by optical dispersion |
Aug. 19, 2008 |
| 7414739 |
Calibration system for sawmill scanning systems |
Aug. 19, 2008 |
| 7414738 |
Measuring device for measuring the degree of transmission of a coating |
Aug. 19, 2008 |
| 7414721 |
In-situ metrology system and method for monitoring metalization and other thin film formation |
Aug. 19, 2008 |
| 7411665 |
Method for wavelength calibration of an optical measurement system |
Aug. 12, 2008 |
| 7407821 |
Substrate processing method |
Aug. 5, 2008 |
| 7405819 |
Optical substrate for enhanced detectability of fluorescence |
Jul. 29, 2008 |
| 7399975 |
Method and apparatus for performing highly accurate thin film measurements |
Jul. 15, 2008 |
| 7400417 |
Diffraction method for measuring thickness of a workpart |
Jul. 15, 2008 |
| 7394532 |
Surface inspection method and apparatus |
Jul. 1, 2008 |
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