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Class Information
Number: 356/630
Name: Optics: measuring and testing > Dimension > Thickness
Description: Subject matter comprising means to measure the distance between opposite surfaces in a direction perpendicular to the length and breath of an object.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7414721 |
In-situ metrology system and method for monitoring metalization and other thin film formation |
Aug. 19, 2008 |
| 7414740 |
Method and apparatus for contactless optical measurement of the thickness of a hot glass body by optical dispersion |
Aug. 19, 2008 |
| 7414739 |
Calibration system for sawmill scanning systems |
Aug. 19, 2008 |
| 7414738 |
Measuring device for measuring the degree of transmission of a coating |
Aug. 19, 2008 |
| 7411665 |
Method for wavelength calibration of an optical measurement system |
Aug. 12, 2008 |
| 7407821 |
Substrate processing method |
Aug. 5, 2008 |
| 7405819 |
Optical substrate for enhanced detectability of fluorescence |
Jul. 29, 2008 |
| 7399975 |
Method and apparatus for performing highly accurate thin film measurements |
Jul. 15, 2008 |
| 7400417 |
Diffraction method for measuring thickness of a workpart |
Jul. 15, 2008 |
| 7394532 |
Surface inspection method and apparatus |
Jul. 1, 2008 |
| 7388680 |
Gap monitor arrangement |
Jun. 17, 2008 |
| 7385174 |
Apparatus and method for measuring sidewall thickness of non-round transparent containers |
Jun. 10, 2008 |
| 7382456 |
Spectroscopic sensor for measuring sheet properties |
Jun. 3, 2008 |
| 7379194 |
Method and system for determining mail piece dimensions using swept laser beam |
May. 27, 2008 |
| 7375830 |
Method and instrument for measuring semiconductor wafers |
May. 20, 2008 |
| 7375829 |
Method for inspecting an insulator with a library of optic images |
May. 20, 2008 |
| 7375828 |
Modal method modeling of binary gratings with improved eigenvalue computation |
May. 20, 2008 |
| 7372584 |
Dual photo-acoustic and resistivity measurement system |
May. 13, 2008 |
| 7369255 |
Apparatus and method for capacitive measurement of materials |
May. 6, 2008 |
| 7369254 |
System and method for measuring dimension of patterns formed on photomask |
May. 6, 2008 |
| 7362454 |
Method and system for measuring overcoat layer thickness on a thin film disk |
Apr. 22, 2008 |
| 7362453 |
Method for the characterization of a film |
Apr. 22, 2008 |
| 7362435 |
Method of determining initial thickness value for sample surface layer, and use of splines for fitting ellipsometric data |
Apr. 22, 2008 |
| 7359069 |
Polishing pad surface shape measuring instrument, method of using polishing pad surface shape measuring instrument, method of measuring apex angle of cone of polishing pad, method of measuring |
Apr. 15, 2008 |
| 7359068 |
Laser triangulation method for measurement of highly reflective solder balls |
Apr. 15, 2008 |
| 7355729 |
Apparatus and method for measuring a thickness of a substrate |
Apr. 8, 2008 |
| RE40225 |
Two-dimensional beam deflector |
Apr. 8, 2008 |
| 7353141 |
Method and system for monitoring component consumption |
Apr. 1, 2008 |
| 7349107 |
System and method for correction for angular spread in determining optical properties of materials |
Mar. 25, 2008 |
| 7349106 |
Apparatus and method for thin-layer metrology |
Mar. 25, 2008 |
| 7345761 |
Film measurement |
Mar. 18, 2008 |
| 7338581 |
Sputtering apparatus |
Mar. 4, 2008 |
| 7339676 |
Optical method and system for the characterization of laterally-patterned samples in integrated circuits |
Mar. 4, 2008 |
| 7333200 |
Overlay metrology method and apparatus using more than one grating per measurement direction |
Feb. 19, 2008 |
| 7327476 |
Thin films measurement method and system |
Feb. 5, 2008 |
| 7327444 |
Substrate inspection apparatus and method |
Feb. 5, 2008 |
| 7319521 |
Measuring device |
Jan. 15, 2008 |
| 7319530 |
System and method for measuring germanium concentration for manufacturing control of BiCMOS films |
Jan. 15, 2008 |
| 7319531 |
Method for measuring a thickness of a coating |
Jan. 15, 2008 |
| 7312881 |
Parametric profiling using optical spectroscopic systems to adjust processing parameter |
Dec. 25, 2007 |
| 7310148 |
Automatic material measurement system |
Dec. 18, 2007 |
| 7304751 |
Apparatus and method for automatically measuring characteristics of a hard disk drive carriage arm |
Dec. 4, 2007 |
| 7301649 |
System for scatterometric measurements and applications |
Nov. 27, 2007 |
| 7301623 |
Transferring, buffering and measuring a substrate in a metrology system |
Nov. 27, 2007 |
| 7301619 |
Evaluating a multi-layered structure for voids |
Nov. 27, 2007 |
| 7295330 |
Film mapping system |
Nov. 13, 2007 |
| 7289234 |
Method and system for thin film characterization |
Oct. 30, 2007 |
| 7289233 |
Optical film measuring device |
Oct. 30, 2007 |
| 7283256 |
Method and apparatus for measuring wafer thickness |
Oct. 16, 2007 |
| 7282703 |
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement |
Oct. 16, 2007 |
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