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Class Information
Number: 356/620
Name: Optics: measuring and testing > Position or displacement > Position transverse to viewing axis > Special mark or target on object
Description: Subject matter wherein a target or other mark on an object is viewed to determine the position of the object.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7619737 |
Method of measurement, an inspection apparatus and a lithographic apparatus |
Nov. 17, 2009 |
| 7619752 |
Sample orientation system and method |
Nov. 17, 2009 |
| 7607616 |
Docking device |
Oct. 27, 2009 |
| 7608468 |
Apparatus and methods for determining overlay and uses of same |
Oct. 27, 2009 |
| 7590561 |
Method and system for online purchasing using processing sensor |
Sep. 15, 2009 |
| 7586626 |
Measurement method, exposure method, exposure apparatus, and device fabrication method |
Sep. 8, 2009 |
| 7586625 |
Position verifying apparatus and method, position measuring apparatus and method, and computer program for position verification or position measurement |
Sep. 8, 2009 |
| 7573574 |
Lithographic apparatus and device manufacturing method |
Aug. 11, 2009 |
| 7573580 |
Optical position measuring system and method using a low coherence light source |
Aug. 11, 2009 |
| 7573584 |
Method and apparatus for angular-resolved spectroscopic lithography characterization |
Aug. 11, 2009 |
| 7573585 |
Detection apparatus detecting predetermined positions of member |
Aug. 11, 2009 |
| 7568727 |
Airbag deployment monitoring system |
Aug. 4, 2009 |
| 7561282 |
Techniques for determining overlay and critical dimension using a single metrology tool |
Jul. 14, 2009 |
| 7557936 |
Digitizer adapter |
Jul. 7, 2009 |
| 7545518 |
Method and probe for determining displacement |
Jun. 9, 2009 |
| 7541595 |
Electromagnetic radiation detecting apparatus, radiation detecting apparatus, radiation detecting system and laser processing method |
Jun. 2, 2009 |
| 7538312 |
Method for determining the position of a first moving component relatively to a second component and device for applying said method |
May. 26, 2009 |
| 7528965 |
Lithographic apparatus and method for calibrating the same |
May. 5, 2009 |
| 7525671 |
Registration method and apparatus therefor |
Apr. 28, 2009 |
| 7502128 |
Monitoring arrangement for rotating components |
Mar. 10, 2009 |
| 7495779 |
Level detection apparatus |
Feb. 24, 2009 |
| 7495780 |
Position measurement apparatus, imaging apparatus, exposure apparatus, and Device manufacturing method |
Feb. 24, 2009 |
| 7489411 |
Apparatus and methods for calibrating a laser projection device |
Feb. 10, 2009 |
| 7476843 |
Method for determining the position of a first moving component relative to a second component and device for applying said method |
Jan. 13, 2009 |
| 7474419 |
Stage assembly, particle-optical apparatus comprising such a stage assembly, and method of treating a sample in such an apparatus |
Jan. 6, 2009 |
| 7473884 |
Orientation determination utilizing a cordless device |
Jan. 6, 2009 |
| 7466414 |
Position detection apparatus and method |
Dec. 16, 2008 |
| 7456977 |
Wireless substrate-like sensor |
Nov. 25, 2008 |
| 7450249 |
Position sensor |
Nov. 11, 2008 |
| 7450250 |
Method and apparatus for determining surface displacement based on an image of a retroreflector attached to the surface |
Nov. 11, 2008 |
| 7450251 |
Fanned laser beam metrology system |
Nov. 11, 2008 |
| 7446884 |
Method for optically detecting the spatial form of inside spaces and a device for carrying out said method |
Nov. 4, 2008 |
| 7414736 |
Position measuring arrangement and method for controlling scanning signals of the position measuring arrangement |
Aug. 19, 2008 |
| 7414737 |
Positioning device for positioning a user by using both eyes as position markers |
Aug. 19, 2008 |
| 7408655 |
Lithographic apparatus and method for calibrating the same |
Aug. 5, 2008 |
| 7359054 |
Overlay target and measurement method using reference and sub-grids |
Apr. 15, 2008 |
| 7349105 |
Method and apparatus for measuring alignment of layers in photolithographic processes |
Mar. 25, 2008 |
| 7339685 |
Method and apparatus for electronically generating an outline indicating the size of an energy zone imaged onto the IR detector of a radiometer |
Mar. 4, 2008 |
| 7336352 |
Position detection apparatus |
Feb. 26, 2008 |
| 7317515 |
Method of localizing fluorescent markers |
Jan. 8, 2008 |
| 7315038 |
Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as an alignment target |
Jan. 1, 2008 |
| 7315348 |
Exposure apparatus, focal point detecting method, exposure method and device manufacturing method |
Jan. 1, 2008 |
| 7307707 |
Method and system for measuring the imaging quality of an optical imaging system |
Dec. 11, 2007 |
| 7307737 |
Three-dimensional (3D) measuring with multiple reference frames |
Dec. 11, 2007 |
| 7301648 |
Self-referenced tracking |
Nov. 27, 2007 |
| 7298500 |
Position sensor |
Nov. 20, 2007 |
| 7297972 |
Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as a metrology target |
Nov. 20, 2007 |
| 7292388 |
Lens made of a crystalline material |
Nov. 6, 2007 |
| 7289213 |
Apparatus and methods for detecting overlay errors using scatterometry |
Oct. 30, 2007 |
| 7283240 |
Spectrophotometer target distance variation compensation |
Oct. 16, 2007 |
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