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Class Information
Number: 356/616
Name: Optics: measuring and testing > Position or displacement > Position transverse to viewing axis > Having scale or grid
Description: Subject matter wherein a scale or grating is placed on the object to determine position or displacement.

Sub-classes under this class:

Class Number Class Name Patents
356/617 Coded scale 119
356/618 Moire 115

Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8710425 Encoder that optically detects positional information of a moving body from different optical paths lengths Apr. 29, 2014
8681313 Diffraction elements for alignment targets Mar. 25, 2014
8674288 Motor assembly sensor capture systems and methods Mar. 18, 2014
8665455 Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method Mar. 4, 2014
8666261 Photoelectric encoder Mar. 4, 2014
8610050 Optical displacement detection apparatus Dec. 17, 2013
8598509 Optical encoder Dec. 3, 2013
8582120 Measurement device and method Nov. 12, 2013
8570533 Position measuring device Oct. 29, 2013
8554510 Method of measuring properties of dynamic positioning errors in a lithographic apparatus, data processing apparatus, and computer program product Oct. 8, 2013
8553204 Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method Oct. 8, 2013
8537370 Optical position measuring device Sep. 17, 2013
8537377 Absolute position encoder Sep. 17, 2013
8514373 Movable body system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method Aug. 20, 2013
8493572 Optical encoder having contamination and defect resistant signal processing Jul. 23, 2013
8492703 Lens aberration correction in a doubly telecentric displacement sensor Jul. 23, 2013
8488131 Scale, displacement detection apparatus provided with the same, and imaging apparatus provided with the same Jul. 16, 2013
8422015 Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method Apr. 16, 2013
8396681 Prediction algorithm for scanning an object Mar. 12, 2013
8390824 Laser based focusing method Mar. 5, 2013
8358423 Contactless measurement of an offset of the functional components of a travel path of a magnetic levitation railway Jan. 22, 2013
8339614 Method of measuring shot shape and mask Dec. 25, 2012
8288709 Optical encoder device Oct. 16, 2012
8278616 Position detector and exposure apparatus Oct. 2, 2012
8274639 Stage device, pattern formation apparatus, exposure apparatus, stage drive method, exposure method, and device manufacturing method Sep. 25, 2012
8242434 Optoelectronic angle sensor for determining a rotational angle about an axis and including a code carrier having a planar self-luminous coding Aug. 14, 2012
8237788 Methods of automatic geometric calibration using laser scanning reflectometry Aug. 7, 2012
8174671 Lithographic projection apparatus and method for controlling a support structure May. 8, 2012
8154735 Apparatus for measuring quasi-static error of rotation driving shaft Apr. 10, 2012
8094323 Displacement encoder including phosphor illumination source Jan. 10, 2012
8081321 Scanning unit of an optical position measuring arrangement and position measuring arrangement having this scanning unit Dec. 20, 2011
8040530 Automatic geometric calibration using laser scanning reflectometry Oct. 18, 2011
8013982 Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on fl Sep. 6, 2011
8010414 Method for online purchasing using printed form Aug. 30, 2011
7995884 Device consisting of at least one optical element Aug. 9, 2011
7982175 Miniaturized single track optical encoder system with integrated index channel(s) Jul. 19, 2011
7978344 System and method for the inspection of micro and nanomechanical structures Jul. 12, 2011
7973942 Optical displacement detection mechanism and surface information measurement device using the same Jul. 5, 2011
7903262 Optical position measuring arrangement Mar. 8, 2011
7903263 Position detection sensor Mar. 8, 2011
7898670 Distortion measurement imaging system Mar. 1, 2011
7858922 Position-measuring device Dec. 28, 2010
7825368 Absolute position length-measurement type encoder Nov. 2, 2010
7820956 Optical position transducer systems and methods employing reflected illumination for limited rotation motor systems Oct. 26, 2010
7804579 Control system, lithographic projection apparatus, method of controlling a support structure, and a computer program product Sep. 28, 2010
7804604 In-flight drop location verification system Sep. 28, 2010
7759634 Position detecting device capable of improving detection accuracy Jul. 20, 2010
7719075 Scanning head for optical position-measuring systems May. 18, 2010
7714272 Optical absolute rotary encoder May. 11, 2010
7714273 Position-measuring device May. 11, 2010

1 2 3 4 5

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