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Class Information
Number: 356/612
Name: Optics: measuring and testing > Shape or surface configuration > By specular reflection
Description: Subject matter wherein the shape of the surface of the surface is determined by measuring the angle or direction that a beam of light is specularly reflected from the surface.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8705050 Providing thermal compensation for topographic measurement at an elevated temperature using a non-contact vibration transducer Apr. 22, 2014
8670114 Device and method for measuring six degrees of freedom Mar. 11, 2014
8625110 Methods of inspecting structures Jan. 7, 2014
8614796 Measuring station for high-gloss surfaces Dec. 24, 2013
8599371 Method of and apparatus for obtaining high dynamic range spectrally, spatially and angularly resolved radiation data Dec. 3, 2013
8576410 Method and apparatus for determining a height of a number of spatial positions on a sample Nov. 5, 2013
8525983 Device and method for measuring six degrees of freedom Sep. 3, 2013
8526012 Noncontact scanning system Sep. 3, 2013
8520219 Non-contact sensor having improved laser spot Aug. 27, 2013
8520220 Apparatus for measuring the dimensions of an object Aug. 27, 2013
8514408 Method and apparatus for real-time determination of curvature and azimuthal asymmetry of a surface Aug. 20, 2013
8456646 Vision recognition system for produce labeling Jun. 4, 2013
8264696 Measuring instrument and method for determining geometric properties of profile sections Sep. 11, 2012
8243288 Object detection system and object detection method Aug. 14, 2012
8229242 Method for reconstructing surfaces of specular object from sparse reflection correspondences Jul. 24, 2012
8227265 Method of measuring pattern shape, method of manufacturing semiconductor device, and process control system Jul. 24, 2012
8194251 Method for operating a dual beam chromatic point sensor system for simultaneously measuring two surface regions Jun. 5, 2012
8107737 Shape evaluation method, shape evaluation device, and 3D inspection device Jan. 31, 2012
8089045 Method and apparatus for raised material detection Jan. 3, 2012
8089636 Inspecting system and inspecting method Jan. 3, 2012
8064069 Method and system for measuring the shape of a reflective surface Nov. 22, 2011
7990549 Method and apparatus for optically measuring periodic structures using orthogonal azimuthal sample orientation Aug. 2, 2011
7929153 Device for acquiring a three-dimensional video constituted by 3-D frames which contain the shape and color of the acquired body Apr. 19, 2011
7901096 Illumination for projecting an image Mar. 8, 2011
7873488 On-site calibration method and object for chromatic point sensors Jan. 18, 2011
7855354 Measuring device and method for the 3D-measurement of dental models Dec. 21, 2010
7821650 Lithographic apparatus and device manufacturing method with reduced scribe lane usage for substrate measurement Oct. 26, 2010
7796276 Apparatus and method for examining a curved surface Sep. 14, 2010
7733504 Shape evaluation method, shape evaluation device, and device having the shape evaluation device Jun. 8, 2010
7724377 Apparatus and method for detecting tire shape May. 25, 2010
7715022 Apparatus and method for measuring shape May. 11, 2010
7711182 Method and system for sensing 3D shapes of objects with specular and hybrid specular-diffuse surfaces May. 4, 2010
7701591 Portable electronic measurement Apr. 20, 2010
7692144 Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus Apr. 6, 2010
7672485 Method and device for measuring at least a geometric quantity of an optically reflecting surface Mar. 2, 2010
7663745 Plural light source and camera to detect surface flaws Feb. 16, 2010
7633632 Laser measurement device and laser measurement method Dec. 15, 2009
7616330 Geometric measurement system and method of measuring a geometric characteristic of an object Nov. 10, 2009
7605927 Apparatus for optically determining the profile and/or upper surface properties of flat workpieces in a wide belt abrading machine Oct. 20, 2009
7583392 Surface profile measuring apparatus Sep. 1, 2009
7532333 Method and apparatus for determining the shape and the local surface normals of specular surfaces May. 12, 2009
7525667 Portable electronic measurement Apr. 28, 2009
7518724 Image acquisition, processing, and display Apr. 14, 2009
7505149 Apparatus for surface inspection and method and apparatus for inspecting substrate Mar. 17, 2009
7505150 Device and method for the measurement of the curvature of a surface Mar. 17, 2009
7492470 Method for three-dimensional shape measurement of a body Feb. 17, 2009
7486408 Lithographic apparatus and device manufacturing method with reduced scribe lane usage for substrate measurement Feb. 3, 2009
7414733 Azimuthal scanning of a structure formed on a semiconductor wafer Aug. 19, 2008
7391523 Curvature/tilt metrology tool with closed loop feedback control Jun. 24, 2008
7362450 Specular surface flaw detection Apr. 22, 2008

1 2 3

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