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Class Information
Number: 356/601
Name: Optics: measuring and testing > Shape or surface configuration
Description: Subject matter for determining the general shape of an object or surface.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7627170 |
Process for the identification of objects |
Dec. 1, 2009 |
| 7623248 |
Automatic asset detection, location measurement and recognition |
Nov. 24, 2009 |
| 7623249 |
Automated product profiling apparatus and product slicing system using same |
Nov. 24, 2009 |
| 7619751 |
High-accuracy pattern shape evaluating method and apparatus |
Nov. 17, 2009 |
| 7619740 |
Microgloss measurement of paper and board |
Nov. 17, 2009 |
| 7619749 |
Methods and apparatus of aligning surfaces |
Nov. 17, 2009 |
| 7619750 |
Measurement method and device for bead cutting shape in electric resistance welded pipes |
Nov. 17, 2009 |
| 7616330 |
Geometric measurement system and method of measuring a geometric characteristic of an object |
Nov. 10, 2009 |
| 7616325 |
Optical metrology optimization for repetitive structures |
Nov. 10, 2009 |
| 7617068 |
Method for determining relative mobility or regions of an object |
Nov. 10, 2009 |
| 7609374 |
Method and system for determining the properties of a surface of revolution |
Oct. 27, 2009 |
| 7605927 |
Apparatus for optically determining the profile and/or upper surface properties of flat workpieces in a wide belt abrading machine |
Oct. 20, 2009 |
| 7602505 |
Method for the automatic parameterization of measuring systems |
Oct. 13, 2009 |
| 7602506 |
Method for contactlessly and dynamically detecting the profile of a solid body |
Oct. 13, 2009 |
| 7599072 |
Method for determining physical properties of a multilayered periodic structure |
Oct. 6, 2009 |
| 7599064 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method, substrate for use in the methods |
Oct. 6, 2009 |
| 7595893 |
Shape measurement method and shape measurement apparatus |
Sep. 29, 2009 |
| 7595869 |
Optical metrology system optimized with a plurality of design goals |
Sep. 29, 2009 |
| 7595878 |
Spectroscopic methods for component particle analysis |
Sep. 29, 2009 |
| 7593099 |
Method and device for configuration examination |
Sep. 22, 2009 |
| 7589844 |
Shape inspection method and apparatus |
Sep. 15, 2009 |
| 7589845 |
Process control using an optical metrology system optimized with signal criteria |
Sep. 15, 2009 |
| 7583392 |
Surface profile measuring apparatus |
Sep. 1, 2009 |
| 7583391 |
Three-dimensional measuring apparatus, three-dimensional measuring method, and three-dimensional measuring program |
Sep. 1, 2009 |
| 7582855 |
High-speed measuring device and method based on a confocal microscopy principle |
Sep. 1, 2009 |
| 7573569 |
System for 2-D and 3-D vision inspection |
Aug. 11, 2009 |
| 7570368 |
Method and apparatus for measuring the curvature of reflective surfaces |
Aug. 4, 2009 |
| 7570369 |
Method and a device for measurement of edges |
Aug. 4, 2009 |
| 7566894 |
Device and method for the quantified evaluation of surface characteristics |
Jul. 28, 2009 |
| 7567350 |
Apparatus and method for measuring displacement, surface profile and inner radius |
Jul. 28, 2009 |
| 7567352 |
Controlling a fabrication tool using support vector machine |
Jul. 28, 2009 |
| 7567353 |
Automated process control using optical metrology and photoresist parameters |
Jul. 28, 2009 |
| 7564571 |
Method for calibrating a camera-laser-unit in respect to a calibration-object |
Jul. 21, 2009 |
| 7564569 |
Optical wheel evaluation |
Jul. 21, 2009 |
| 7561282 |
Techniques for determining overlay and critical dimension using a single metrology tool |
Jul. 14, 2009 |
| 7557910 |
System and method for controlling a beam source in a workpiece surface inspection system |
Jul. 7, 2009 |
| 7557933 |
Measuring probe, sample surface measuring apparatus and sample surface measuring method |
Jul. 7, 2009 |
| 7557934 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method |
Jul. 7, 2009 |
| 7555163 |
Systems and methods for representing signed distance functions |
Jun. 30, 2009 |
| 7548305 |
Shallow angle shape sensor |
Jun. 16, 2009 |
| 7545514 |
Pick and place machine with improved component pick image processing |
Jun. 9, 2009 |
| 7545515 |
Object shaping device |
Jun. 9, 2009 |
| 7541974 |
Managed traverse system and method to acquire accurate survey data in absence of precise GPS data |
Jun. 2, 2009 |
| 7542135 |
Device for inspecting countersunk holes |
Jun. 2, 2009 |
| 7538893 |
Method of microscopically examining a spatial finestructure |
May. 26, 2009 |
| 7532331 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method |
May. 12, 2009 |
| 7532317 |
Scatterometry method with characteristic signatures matching |
May. 12, 2009 |
| 7532333 |
Method and apparatus for determining the shape and the local surface normals of specular surfaces |
May. 12, 2009 |
| 7528968 |
Optical measuring machine |
May. 5, 2009 |
| 7525673 |
Optimizing selected variables of an optical metrology system |
Apr. 28, 2009 |
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