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Class Information
Number: 356/516
Name: Optics: measuring and testing > By light interference (e.g., interferometer) > For dimensional measurement > Contour or profile > Step height (differential, between points)
Description: Contour or profile measurement wherein points on a surface are measured and the difference between points is indicative of the profile.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8643847 Interferometric technique for measuring patterned sapphire substrates Feb. 4, 2014
8547557 Apparatus for determining a height map of a surface through both interferometric and non-interferometric measurements Oct. 1, 2013
8514406 Measurement apparatus, exposure apparatus, and device fabrication method Aug. 20, 2013
8493570 Three-dimensional shape measuring apparatus Jul. 23, 2013
8426857 Semiconductor device and method for producing the same Apr. 23, 2013
8289525 Optical surface measuring apparatus and method Oct. 16, 2012
7986414 Measurement of multiple surface test objects with frequency scanning interferometer Jul. 26, 2011
7956630 Real-time effective-wavelength error correction for HDVSI Jun. 7, 2011
7898672 Real-time scanner-nonlinearity error correction for HDVSI Mar. 1, 2011
7812966 Method of determining the depth profile of a surface structure and system for determining the depth profile of a surface structure Oct. 12, 2010
7782468 Method and device for measuring heights of patterns Aug. 24, 2010
7773232 Apparatus and method for determining trench parameters Aug. 10, 2010
7551291 Interferometric height measurement Jun. 23, 2009
7551292 Interferometric Height Measurement Jun. 23, 2009
7522290 Apparatus and method for inspecting semiconductor wafer Apr. 21, 2009
7468799 Scanning interferometry for thin film thickness and surface measurements Dec. 23, 2008
7453577 Apparatus and method for inspecting a patterned part of a sample Nov. 18, 2008
7411667 Method for correcting disturbances in a level sensor light path Aug. 12, 2008
7397569 Method and system for interferometric height measurement Jul. 8, 2008
7345771 Apparatus and method for measurement of critical dimensions of features and detection of defects in UV, VUV, and EUV lithography masks Mar. 18, 2008
7286238 Feature isolation for frequency-shifting interferometry Oct. 23, 2007
7221459 Method and system for interferometric height measurement May. 22, 2007
7095507 Method and apparatus using microscopic and interferometric based detection Aug. 22, 2006
7030997 Characterizing aberrations in an imaging lens and applications to visual testing and integrated circuit mask analysis Apr. 18, 2006
7019840 Dual-beam interferometer for ultra-smooth surface topographical measurements Mar. 28, 2006
7019841 System and method for inspecting a component using interferometry Mar. 28, 2006
7002695 Dual-spot phase-sensitive detection Feb. 21, 2006
6989905 Phase gap analysis for scanning interferometry Jan. 24, 2006
6943898 Apparatus and method for dual spot inspection of repetitive patterns Sep. 13, 2005
6934027 Interferometric measuring device Aug. 23, 2005
6813031 Method of determining material using intensity of light Nov. 2, 2004
6775009 Differential interferometric scanning near-field confocal microscopy Aug. 10, 2004
6710883 Apparatus and method for measuring flatness of thin plate Mar. 23, 2004
6667809 Scanning interferometric near-field confocal microscopy with background amplitude reduction and compensation Dec. 23, 2003
6654130 Method and apparatus for determining temperature and temperature distribution in a slider Nov. 25, 2003
6643027 Optical measurement system and method for determining height differential between two surfaces Nov. 4, 2003
6580515 Surface profiling using a differential interferometer Jun. 17, 2003
6433876 Multiple wavelength or multiple shear distance quantitative differential interference contrast microscopy Aug. 13, 2002
6392752 Phase-measuring microlens microscopy May. 21, 2002
6259530 Method and device for measuring the depths of bottoms of craters in a physico-chemical analyzer Jul. 10, 2001
6229618 Method of improving registration accuracy and method of forming patterns on a substrate using the same May. 8, 2001
6034814 Differential interference microscope Mar. 7, 2000
5914782 Differential polarization interference microscope for surface feature imaging Jun. 22, 1999
5710631 Apparatus and method for storing interferometric images of scanned defects and for subsequent static analysis of such defects Jan. 20, 1998
5699160 Optical apparatus for inspecting laser texture Dec. 16, 1997
5694220 Minute step measuring method Dec. 2, 1997
5523839 Differential optical interferometric profilomenty for real time manufacturing control Jun. 4, 1996
5481360 Optical device for measuring surface shape Jan. 2, 1996
5426504 Optical depth gauge for optically rough surfaces Jun. 20, 1995
5392116 Interferometric phase measurement Feb. 21, 1995

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