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Browse by Category: Main > Optical & Optics
Class Information
Number: 356/515
Name: Optics: measuring and testing > By light interference (e.g., interferometer) > For dimensional measurement > Contour or profile > By wavefront detection > Of transmission (e.g., lens)
Description: Wavefront detection wherein the wavefront is transmitted through an object under test.










Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8675206 Measurement method for measuring shape of test surface, measurement apparatus, and method for manufacturing optical element Mar. 18, 2014
8659751 External light glare assessment device, line of sight detection device and external light glare assessment method Feb. 25, 2014
8654346 Optical scattering disk, use thereof, and wavefront measuring apparatus Feb. 18, 2014
8593642 Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device Nov. 26, 2013
8576408 Surface figure test method for large convex optical surfaces Nov. 5, 2013
8520217 Talbot interferometer, its adjustment method, and measurement method Aug. 27, 2013
8488127 System for measuring the image quality of an optical imaging system Jul. 16, 2013
8472030 Surface profile measuring apparatus, method of measuring surface profile, and method of manufacturing optical element Jun. 25, 2013
8462351 Measurement method and measurement apparatus Jun. 11, 2013
8400612 Wavefront aberration measurement apparatus, exposure apparatus, and method of manufacturing device Mar. 19, 2013
8373866 Wavefront aberration measuring apparatus, wavefront aberration measuring method, exposure apparatus, and device manufacturing method Feb. 12, 2013
8351050 Wavefront-aberration-measuring device and exposure apparatus Jan. 8, 2013
8345263 Measurement method and measurement apparatus that measure a surface figure of an aspheric surface based on an interference pattern Jan. 1, 2013
8325349 Focal plane adjustment by back propagation in optofluidic microscope devices Dec. 4, 2012
8314937 Measurement method and measurement apparatus that measure a surface figure of an aspheric surface based on an interference pattern Nov. 20, 2012
8294904 Fizeau lens having aspheric compensation Oct. 23, 2012
8294875 Exposure apparatus and device fabrication method Oct. 23, 2012
8223314 Method for measuring wavefront aberration Jul. 17, 2012
8199333 Optical scattering disk, use thereof, and wavefront measuring apparatus Jun. 12, 2012
8184263 Measurement apparatus and exposure apparatus May. 22, 2012
8169603 Lens-testing apparatus and lens-testing method having a plurality of combinations of object distances May. 1, 2012
8169620 Sub-pixel spatial resolution wavefront phase imaging May. 1, 2012
8089633 Test method for surface figure of large convex mirrors Jan. 3, 2012
8076624 Non-cooperative laser target enhancement system and method Dec. 13, 2011
7995213 Measurement method, measurement apparatus, exposure apparatus, and device fabrication method Aug. 9, 2011
7948638 Scanning interferometric methods and apparatus for measuring aspheric surfaces and wavefronts May. 24, 2011
7924436 Method for approximating an influence of an optical system on the state of polarization of optical radiation Apr. 12, 2011
7924437 Measurement method and apparatus, exposure apparatus Apr. 12, 2011
7911624 Device and method for the interferometric measurement of phase masks Mar. 22, 2011
7907263 Apparatuses and methods using measurement of a flare generated in an optical system Mar. 15, 2011
7869058 Apparatuses and methods for evaluating performance of optical systems Jan. 11, 2011
7821648 Measurement method, a measurement apparatus, and a computer-readable recording medium Oct. 26, 2010
7804601 Methods for making holographic reticles for characterizing optical systems Sep. 28, 2010
7796274 System for measuring the image quality of an optical imaging system Sep. 14, 2010
7773233 Method of measuring wavefront retardance aberration based on wavefront and birefringent characteristics Aug. 10, 2010
7768653 Method and system for wavefront measurements of an optical system Aug. 3, 2010
7760365 Aspheric lens surface-decenter measuring method and apparatus Jul. 20, 2010
7760366 System for measuring the image quality of an optical imaging system Jul. 20, 2010
7746479 Wavefront-aberration measuring device and exposure apparatus including the device Jun. 29, 2010
7724376 Wavefront-aberration measuring method and device, and exposure apparatus including the device May. 25, 2010
7705998 Method for evaluating an optical imaging process Apr. 27, 2010
7692799 Measurement apparatus, exposure apparatus, and device fabrication method Apr. 6, 2010
7688453 Interferometry testing of lenses, and systems and devices for same Mar. 30, 2010
7675629 Exposure apparatus and device manufacturing method using a common path interferometer to form an interference pattern and a processor to calculate optical characteristics of projection optics Mar. 9, 2010
7663765 Refractive-index measurement system and method for measuring refractive-index Feb. 16, 2010
7626708 Phase shifting grating-slit test for optical surface reconstruction Dec. 1, 2009
7623247 Wavefront-aberration measuring device and exposure apparatus including the device Nov. 24, 2009
7619747 Lithographic apparatus, analyzer plate, subassembly, method of measuring a parameter of a projection system and patterning device Nov. 17, 2009
7619748 Exposure apparatus mounted with measuring apparatus Nov. 17, 2009
7609390 Measurement method and apparatus, exposure apparatus Oct. 27, 2009

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