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Class Information
Number: 356/514
Name: Optics: measuring and testing > By light interference (e.g., interferometer) > For dimensional measurement > Contour or profile > By wavefront detection > Of highly reflective surface (e.g., mirror) > Planar surface
Description: Highly reflective surface having a physical characteristic of being confined to two dimensional space.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7548322 |
Multi-axis interferometers and methods and systems using multi-axis interferometers |
Jun. 16, 2009 |
| 7545512 |
Method for automated measurement of three-dimensional shape of circuit boards |
Jun. 9, 2009 |
| 7504625 |
Substrate inspection method, manufacturing method of semiconductor device and substrate inspection apparatus |
Mar. 17, 2009 |
| 7492469 |
Interferometry systems and methods using spatial carrier fringes |
Feb. 17, 2009 |
| 7471396 |
Dual polarization interferometers for measuring opposite sides of a workpiece |
Dec. 30, 2008 |
| 7446883 |
Method and apparatus for tilt corrected lateral shear in a lateral shear plus rotational shear absolute flat test |
Nov. 4, 2008 |
| 7405833 |
Method for calibration and removal of wavefront errors |
Jul. 29, 2008 |
| 7400388 |
Method for determining distortion and/or image surface |
Jul. 15, 2008 |
| 7388675 |
Interferometers for the measurement of large diameter thin wafers |
Jun. 17, 2008 |
| 7375825 |
Light intensity ratio adjustment filter for an interferometer, interferometer, and light interference measurement method |
May. 20, 2008 |
| 7369251 |
Full-field optical measurements of surface properties of panels, substrates and wafers |
May. 6, 2008 |
| 7319528 |
Surface texture measuring instrument |
Jan. 15, 2008 |
| 7289222 |
Interferometer apparatus and method of processing a substrate having an optical surface |
Oct. 30, 2007 |
| 7188046 |
Form measuring device, form measuring method, form analysis device, form analysis program, and recording medium storing the program |
Mar. 6, 2007 |
| 7173715 |
Reduced coherence symmetric grazing incidence differential interferometer |
Feb. 6, 2007 |
| 7123365 |
Method of calibrating an interferometer optics and method of processing an optical element having an aspherical surface |
Oct. 17, 2006 |
| 7102762 |
Surface inspection apparatus |
Sep. 5, 2006 |
| 7042578 |
Method and apparatus for absolute figure metrology |
May. 9, 2006 |
| 6999180 |
Optical film topography and thickness measurement |
Feb. 14, 2006 |
| 6963406 |
Fused off-axis object illumination direct-to-digital holography with a plurality of illumination sources |
Nov. 8, 2005 |
| 6885460 |
Apparatus for and method of measuring surface shape of an object |
Apr. 26, 2005 |
| 6885461 |
Weighted least-square interferometric measurement of multiple surfaces |
Apr. 26, 2005 |
| 6882432 |
Frequency transform phase shifting interferometry |
Apr. 19, 2005 |
| 6806962 |
Tilted interferometer |
Oct. 19, 2004 |
| 6806966 |
Copper CMP flatness monitor using grazing incidence interferometry |
Oct. 19, 2004 |
| 6788422 |
Method and apparatus for using quasi-stable light sources in interferometry applications |
Sep. 7, 2004 |
| 6771375 |
Apparatus and method for measuring aspherical optical surfaces and wavefronts |
Aug. 3, 2004 |
| 6717680 |
Apparatus and method for phase-shifting interferometry |
Apr. 6, 2004 |
| 6473185 |
Alignment free interferometer and alignment free method of profiling object surfaces |
Oct. 29, 2002 |
| 6456384 |
Moire interferometer with overlapping illumination and imaging systems |
Sep. 24, 2002 |
| 6323951 |
Apparatus and method for determining the active dopant profile in a semiconductor wafer |
Nov. 27, 2001 |
| 6147764 |
Optical interference profiler having shadow compensation |
Nov. 14, 2000 |
| 6072581 |
Geometrically-desensitized interferometer incorporating an optical assembly with high stray-beam management capability |
Jun. 6, 2000 |
| 6038026 |
Apparatus and method for the determination of grain size in thin films |
Mar. 14, 2000 |
| 6018990 |
Flatness measuring and analyzing method |
Feb. 1, 2000 |
| 6010538 |
In situ technique for monitoring and controlling a process of chemical-mechanical-polishing via a radiative communication link |
Jan. 4, 2000 |
| 5894370 |
Inclination monitoring system |
Apr. 13, 1999 |
| 5790253 |
Method and apparatus for correcting linearity errors of a moving mirror and stage |
Aug. 4, 1998 |
| 5689337 |
Coaxial disc-mount for measuring flatness of computer-drive discs by interferometry |
Nov. 18, 1997 |
| 5680214 |
Horizontal-post/vertical-flexure arrangement for supporting large reference optics in phase-shifting scanning |
Oct. 21, 1997 |
| 5650853 |
Vibration-resistant interferometer |
Jul. 22, 1997 |
| 5583632 |
Apparatus for two or three dimensional optical inspection of a sample |
Dec. 10, 1996 |
| 5563706 |
Interferometric surface profiler with an alignment optical member |
Oct. 8, 1996 |
| 5557408 |
Method of and system for measurement of direction of surface and refractive index variations using interference fringes |
Sep. 17, 1996 |
| 5555472 |
Method and apparatus for measuring film thickness in multilayer thin film stack by comparison to a reference library of theoretical signatures |
Sep. 10, 1996 |
| 5506672 |
System for measuring slip dislocations and film stress in semiconductor processing utilizing an adjustable height rotating beam splitter |
Apr. 9, 1996 |
| 5502566 |
Method and apparatus for absolute optical measurement of entire surfaces of flats |
Mar. 26, 1996 |
| 5488477 |
Methods and apparatus for profiling surfaces of transparent objects |
Jan. 30, 1996 |
| 5473434 |
Phase shifting interferometer and method for surface topography measurement |
Dec. 5, 1995 |
| 5473433 |
Method of high yield manufacture of VLSI type integrated circuit devices by determining critical surface characteristics of mounting films |
Dec. 5, 1995 |
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