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Class Information
Number: 356/513
Name: Optics: measuring and testing > By light interference (e.g., interferometer) > For dimensional measurement > Contour or profile > By wavefront detection > Of highly reflective surface (e.g., mirror)
Description: Wavefront detection wherein the wavefront is specularly reflected from a highly reflective surface such as a mirror.










Sub-classes under this class:

Class Number Class Name Patents
356/514 Planar surface 79


Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8687203 Method and apparatus for determining a shape of an optical test surface Apr. 1, 2014
8675206 Measurement method for measuring shape of test surface, measurement apparatus, and method for manufacturing optical element Mar. 18, 2014
8675205 Optical coherence tomography using spectrally controlled interferometry Mar. 18, 2014
8593642 Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device Nov. 26, 2013
8576408 Surface figure test method for large convex optical surfaces Nov. 5, 2013
8526009 Apparatus for measuring rotationally symmetric aspheric surface Sep. 3, 2013
8526008 Interferometer with paraboloidal illumination and imaging optic and tilted imaging plane Sep. 3, 2013
8514406 Measurement apparatus, exposure apparatus, and device fabrication method Aug. 20, 2013
8472030 Surface profile measuring apparatus, method of measuring surface profile, and method of manufacturing optical element Jun. 25, 2013
8456644 Measurement of changes in surfaces of objects Jun. 4, 2013
8446458 Miniaturized all-reflective holographic fourier transform imaging spectrometer based on a new all-reflective interferometer May. 21, 2013
8422029 Test method for surface figure of large convex mirrors Apr. 16, 2013
8373865 Method of detecting a topology of a reflective surface Feb. 12, 2013
8345263 Measurement method and measurement apparatus that measure a surface figure of an aspheric surface based on an interference pattern Jan. 1, 2013
8314937 Measurement method and measurement apparatus that measure a surface figure of an aspheric surface based on an interference pattern Nov. 20, 2012
8275573 Large-surface defect detection by single-frame spatial-carrier interferometry Sep. 25, 2012
8269975 Computer generated hologram system for wavefront measurement system calibration Sep. 18, 2012
8269982 Surface deformation measuring system with a retro-reflective surface treatment Sep. 18, 2012
8213017 Analytical system comprising an arrangement for temporally variable spatial light modulation and detection method executable therewith Jul. 3, 2012
8203109 High energy laser beam director system and method Jun. 19, 2012
8169620 Sub-pixel spatial resolution wavefront phase imaging May. 1, 2012
8154733 Method and system for the optical measurement of large radii of curvature of optical functional surfaces Apr. 10, 2012
8089634 Optical element and method of calibrating a measuring apparatus comprising a wave shaping structure Jan. 3, 2012
8089633 Test method for surface figure of large convex mirrors Jan. 3, 2012
7948638 Scanning interferometric methods and apparatus for measuring aspheric surfaces and wavefronts May. 24, 2011
7920275 Optical system of a microlithographic projection exposure apparatus Apr. 5, 2011
7880897 Light wave interferometer apparatus Feb. 1, 2011
7808653 Apparatus for measuring defects in a glass sheet Oct. 5, 2010
7733501 Optical system of a microlithographic projection exposure apparatus Jun. 8, 2010
7719738 Method and apparatus for reducing laser speckle May. 18, 2010
7612893 Scanning interferometric methods and apparatus for measuring aspheric surfaces and wavefronts Nov. 3, 2009
7570366 Apparatus for measuring defects in a glass sheet Aug. 4, 2009
7514667 Variable transmittance optical element and imaging optical system including the same arranged at distal end of an endoscope Apr. 7, 2009
7497578 Monitoring scan mirror motion in electro-optical readers and image projectors Mar. 3, 2009
7423765 Optical system of a microlithographic projection exposure apparatus Sep. 9, 2008
7405830 Vibration-insensitive interferometer Jul. 29, 2008
7400388 Method for determining distortion and/or image surface Jul. 15, 2008
7375824 Interferometer for measurement of dome-like objects May. 20, 2008
7315380 Laser interferometer for repeatable mounting on the wall of a vacuum chamber Jan. 1, 2008
7218403 Scanning interferometer for aspheric surfaces and wavefronts May. 15, 2007
7154612 Method for calibrating a radius test bench Dec. 26, 2006
7123365 Method of calibrating an interferometer optics and method of processing an optical element having an aspherical surface Oct. 17, 2006
7106455 Interferometer and interferance measurement method Sep. 12, 2006
7072042 Apparatus for and method of measurement of aspheric surfaces using hologram and concave surface Jul. 4, 2006
7061626 Method of manufacturing an optical element using a hologram Jun. 13, 2006
7057742 Frequency-scanning interferometer with non-specular reference surface Jun. 6, 2006
6999182 Method and system for characterizing aspheric surfaces of optical elements Feb. 14, 2006
6972849 Scanning interferometer for aspheric surfaces and wavefronts Dec. 6, 2005
6965435 Interferometer system for measuring surface shape Nov. 15, 2005
6943896 Reconfigurable interferometer system Sep. 13, 2005

1 2 3 4










 
 
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