 |
|
 |
| |
 |
|
Class Information
Number: 356/513
Name: Optics: measuring and testing > By light interference (e.g., interferometer) > For dimensional measurement > Contour or profile > By wavefront detection > Of highly reflective surface (e.g., mirror)
Description: Wavefront detection wherein the wavefront is specularly reflected from a highly reflective surface such as a mirror.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7612893 |
Scanning interferometric methods and apparatus for measuring aspheric surfaces and wavefronts |
Nov. 3, 2009 |
| 7570366 |
Apparatus for measuring defects in a glass sheet |
Aug. 4, 2009 |
| 7514667 |
Variable transmittance optical element and imaging optical system including the same arranged at distal end of an endoscope |
Apr. 7, 2009 |
| 7497578 |
Monitoring scan mirror motion in electro-optical readers and image projectors |
Mar. 3, 2009 |
| 7423765 |
Optical system of a microlithographic projection exposure apparatus |
Sep. 9, 2008 |
| 7405830 |
Vibration-insensitive interferometer |
Jul. 29, 2008 |
| 7400388 |
Method for determining distortion and/or image surface |
Jul. 15, 2008 |
| 7375824 |
Interferometer for measurement of dome-like objects |
May. 20, 2008 |
| 7315380 |
Laser interferometer for repeatable mounting on the wall of a vacuum chamber |
Jan. 1, 2008 |
| 7218403 |
Scanning interferometer for aspheric surfaces and wavefronts |
May. 15, 2007 |
| 7154612 |
Method for calibrating a radius test bench |
Dec. 26, 2006 |
| 7123365 |
Method of calibrating an interferometer optics and method of processing an optical element having an aspherical surface |
Oct. 17, 2006 |
| 7106455 |
Interferometer and interferance measurement method |
Sep. 12, 2006 |
| 7072042 |
Apparatus for and method of measurement of aspheric surfaces using hologram and concave surface |
Jul. 4, 2006 |
| 7061626 |
Method of manufacturing an optical element using a hologram |
Jun. 13, 2006 |
| 7057742 |
Frequency-scanning interferometer with non-specular reference surface |
Jun. 6, 2006 |
| 6999182 |
Method and system for characterizing aspheric surfaces of optical elements |
Feb. 14, 2006 |
| 6972849 |
Scanning interferometer for aspheric surfaces and wavefronts |
Dec. 6, 2005 |
| 6965435 |
Interferometer system for measuring surface shape |
Nov. 15, 2005 |
| 6943896 |
Reconfigurable interferometer system |
Sep. 13, 2005 |
| 6909510 |
Application of the phase shifting diffraction interferometer for measuring convex mirrors and negative lenses |
Jun. 21, 2005 |
| 6900896 |
Method and system for measuring optical characteristics of a sub-component within a composite optical system |
May. 31, 2005 |
| 6894788 |
Interferometric system for automated radius of curvature measurements |
May. 17, 2005 |
| 6882432 |
Frequency transform phase shifting interferometry |
Apr. 19, 2005 |
| 6879402 |
Scanning interferometer for aspheric surfaces and wavefronts |
Apr. 12, 2005 |
| 6842255 |
Interferometer and interferance measurement method |
Jan. 11, 2005 |
| 6801323 |
Methods and apparatus for interferometric dimensional metrology |
Oct. 5, 2004 |
| 6781700 |
Scanning interferometer for aspheric surfaces and wavefronts |
Aug. 24, 2004 |
| 6771375 |
Apparatus and method for measuring aspherical optical surfaces and wavefronts |
Aug. 3, 2004 |
| 6741362 |
Method, system, and computer program product for determining refractive index distribution |
May. 25, 2004 |
| 6717679 |
Dispersive null-optics for aspheric surface and wavefront metrology |
Apr. 6, 2004 |
| 6714308 |
Rapid in-situ mastering of an aspheric fizeau |
Mar. 30, 2004 |
| 6704112 |
Application of the phase shifting diffraction interferometer for measuring convex mirrors and negative lenses |
Mar. 9, 2004 |
| 6646748 |
Surface profile measurement apparatus |
Nov. 11, 2003 |
| 6633389 |
Profiling method |
Oct. 14, 2003 |
| 6624895 |
Method and apparatus for measuring aspherical shape and method for manufacturing optical element using them |
Sep. 23, 2003 |
| 6577400 |
Interferometer |
Jun. 10, 2003 |
| 6493094 |
Method and apparatus for beam directing |
Dec. 10, 2002 |
| 6456382 |
Interferometer that measures aspherical surfaces |
Sep. 24, 2002 |
| 6417916 |
Method and apparatus for examining test pieces |
Jul. 9, 2002 |
| 6344898 |
Interferometric apparatus and methods for measuring surface topography of a test surface |
Feb. 5, 2002 |
| 6278523 |
Optical sensor on a silicon substrate and application for the in situ measurement of a fluorescent marker in the small bronchia |
Aug. 21, 2001 |
| 6204925 |
Interferometer having a micromirror |
Mar. 20, 2001 |
| 6195168 |
Infrared scanning interferometry apparatus and method |
Feb. 27, 2001 |
| 6175421 |
Method and apparatus for measuring material properties using transient-grating spectroscopy |
Jan. 16, 2001 |
| 6025912 |
Interferometer having a micromirror |
Feb. 15, 2000 |
| 6018393 |
Evaluating system for a dual focus lens |
Jan. 25, 2000 |
| 5933236 |
Phase shifting interferometer |
Aug. 3, 1999 |
| 5898501 |
Apparatus and methods for measuring wavefront aberrations of a microlithography projection lens |
Apr. 27, 1999 |
| 5822066 |
Point diffraction interferometer and pin mirror for use therewith |
Oct. 13, 1998 |
|
|
|
 |
|
 |
|
| |
Randomly Featured Patents |
|
