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Class Information
Number: 356/512
Name: Optics: measuring and testing > By light interference (e.g., interferometer) > For dimensional measurement > Contour or profile > By wavefront detection
Description: Contour or profile measurement wherein a wavefront representative of an area of a surface is one of the interfering beams.

Sub-classes under this class:

Class Number Class Name Patents
356/513 Of highly reflective surface (e.g., mirror) 156
356/515 Of transmission (e.g., lens) 171

Patents under this class:
1 2 3 4 5 6 7 8

Patent Number Title Of Patent Date Issued
8692999 Crosstalk cancellation for a simultaneous phase shifting interferometer Apr. 8, 2014
8675205 Optical coherence tomography using spectrally controlled interferometry Mar. 18, 2014
8646911 Compensation optical apparatus and image sensing apparatus Feb. 11, 2014
8593622 Serially addressed sub-pupil screen for in situ electro-optical sensor wavefront measurement Nov. 26, 2013
8593642 Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device Nov. 26, 2013
8526009 Apparatus for measuring rotationally symmetric aspheric surface Sep. 3, 2013
8514406 Measurement apparatus, exposure apparatus, and device fabrication method Aug. 20, 2013
8514407 Surface shape measurement apparatus Aug. 20, 2013
8508749 Method of measuring a deviation of an optical surface from a target shape using interferometric measurement results Aug. 13, 2013
8441650 Grazing incidence interferometer May. 14, 2013
8441651 Defect inspection apparatus and defect inspection method May. 14, 2013
8411280 Surface shape measurement apparatus Apr. 2, 2013
8390821 Three-dimensional sensing using speckle patterns Mar. 5, 2013
8390822 Intra-oral three-dimensional imaging system Mar. 5, 2013
8379222 Fizeau interferometer and measurement method using Fizeau interferometer Feb. 19, 2013
8363227 Measurement apparatus and method of manufacturing optical system Jan. 29, 2013
8363977 Deformation measurement method and apparatus Jan. 29, 2013
8345262 Method and apparatus for determining a deviation of an actual shape from a desired shape of an optical surface Jan. 1, 2013
8319975 Methods and apparatus for wavefront manipulations and improved 3-D measurements Nov. 27, 2012
8275573 Large-surface defect detection by single-frame spatial-carrier interferometry Sep. 25, 2012
8269981 Method and an apparatus for measuring a deviation of an optical test surface from a target shape Sep. 18, 2012
8264694 Quantitative phase-contrast and excitation-emission systems Sep. 11, 2012
8264695 Method of measuring a deviation of an optical surface from a target shape Sep. 11, 2012
8243282 Interferometric shape measurement of different signs of curvature Aug. 14, 2012
8203109 High energy laser beam director system and method Jun. 19, 2012
8203719 Stitching of near-nulled subaperture measurements Jun. 19, 2012
8198604 System and method for providing enhanced background rejection in thick tissue with differential-aberration two-photon microscopy Jun. 12, 2012
8184263 Measurement apparatus and exposure apparatus May. 22, 2012
8174706 System for dispersion-force-based actuation May. 8, 2012
8158917 Optical wavefront sensor and optical wavefront sensing method Apr. 17, 2012
8159678 Method of measuring a deviation of an optical surface from a target shape Apr. 17, 2012
8149422 System and method for dispersion-force-based actuation Apr. 3, 2012
8144335 Vibration-insensitive interferometer using high-speed camera and continuous phase scanning method Mar. 27, 2012
8134771 Spatial light modulators with changeable phase masks for use in holographic data storage Mar. 13, 2012
8126677 Analyzing surface structure using scanning interferometry Feb. 28, 2012
8120783 Biosensing apparatus and method using optical interference Feb. 21, 2012
8120765 Observation device Feb. 21, 2012
8076624 Non-cooperative laser target enhancement system and method Dec. 13, 2011
8068235 Systems and methods for multi-function coherent imaging Nov. 29, 2011
8044332 Hybrid architecture active wavefront sensing and control system, and method Oct. 25, 2011
8022345 Adaptive optics systems using pixelated spatial phase shifters Sep. 20, 2011
8018602 Metrology of optics with high aberrations Sep. 13, 2011
7990543 Surface characterization based on optical phase shifting interferometry Aug. 2, 2011
7952725 Surface shape measurement apparatus and exposure apparatus May. 31, 2011
7948637 Error compensation in phase shifting interferometry May. 24, 2011
7928351 Near field diversity method for estimation and correction of aberrations Apr. 19, 2011
7925056 Optical speckle pattern investigation Apr. 12, 2011
7894076 Electro-optical measurement of hysteresis in interferometric modulators Feb. 22, 2011
7859683 Fast three-dimensional shape measuring apparatus and method Dec. 28, 2010
7847954 Measuring the shape and thickness variation of a wafer with high slopes Dec. 7, 2010

1 2 3 4 5 6 7 8

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