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Browse by Category: Main > Optical & Optics
Class Information
Number: 356/511
Name: Optics: measuring and testing > By light interference (e.g., interferometer) > For dimensional measurement > Contour or profile
Description: Dimensional measurement including means for determining a contour, profile, or shape of a surface.










Sub-classes under this class:

Class Number Class Name Patents
356/512 By wavefront detection 365
356/516 Step height (differential, between points) 62


Patents under this class:
1 2 3 4 5 6 7 8

Patent Number Title Of Patent Date Issued
8681341 Shape measuring method and shape measuring apparatus Mar. 25, 2014
8675206 Measurement method for measuring shape of test surface, measurement apparatus, and method for manufacturing optical element Mar. 18, 2014
8660324 Textured pattern sensing using partial-coherence speckle interferometry Feb. 25, 2014
8643847 Interferometric technique for measuring patterned sapphire substrates Feb. 4, 2014
8643848 Method and apparatus for measuring shape Feb. 4, 2014
8638445 Imaging apparatus and method thereof Jan. 28, 2014
8593644 White light optical profilometer for measuring complex surfaces Nov. 26, 2013
8573075 Liquid droplet discharging apparatus Nov. 5, 2013
8553231 Method and apparatus for determining the height of a number of spatial positions on a sample defining a profile of a surface through white light interferometry Oct. 8, 2013
8553232 Interference objective lens unit and light-interference measuring apparatus using thereof Oct. 8, 2013
8537369 Method and apparatus for measuring the shape and thickness variation of a wafer by two single-shot phase-shifting interferometers Sep. 17, 2013
8531677 Frequency-shifting interferometer with selective data processing Sep. 10, 2013
8526008 Interferometer with paraboloidal illumination and imaging optic and tilted imaging plane Sep. 3, 2013
8520216 Shape measuring apparatus Aug. 27, 2013
8514406 Measurement apparatus, exposure apparatus, and device fabrication method Aug. 20, 2013
8508748 Inspection system with fiber coupled OCT focusing Aug. 13, 2013
8482740 Computer generated reference for measurements of aspheric surfaces Jul. 9, 2013
8482741 Interferometric measurement of non-homogeneous multi-material surfaces Jul. 9, 2013
8477318 Optical fiber-based three-dimensional imaging system Jul. 2, 2013
8432553 Phase from defocused color images Apr. 30, 2013
8422028 Scanning microscope using an I/Q-interferometer Apr. 16, 2013
8416399 Optical measuring instrument using both reflectometry and white-light interferometry Apr. 9, 2013
8416425 Interferometric measurement of non-homogeneous multi-material surfaces Apr. 9, 2013
8400641 Interferometer for aspherical or spherical surface measurements Mar. 19, 2013
8390822 Intra-oral three-dimensional imaging system Mar. 5, 2013
8366232 Method of measuring landed dot, measuring apparatus for landed dot, liquid droplet ejection apparatus, method of manufacturing electro-optic apparatus, electro-optic apparatus, and electronic Feb. 5, 2013
8363977 Deformation measurement method and apparatus Jan. 29, 2013
8355140 Systems configured to generate output corresponding to defects on a specimen Jan. 15, 2013
8345261 Optical coherence tomography imaging Jan. 1, 2013
8314938 Method and apparatus for measuring surface profile of an object Nov. 20, 2012
8294903 Surface shape measurement apparatus and method Oct. 23, 2012
8294902 Measuring method and measuring device for measuring a shape of a measurement surface using a reference standard for calibration Oct. 23, 2012
8279448 Shape measurement apparatus and method Oct. 2, 2012
8274661 Shape calculation method Sep. 25, 2012
8275573 Large-surface defect detection by single-frame spatial-carrier interferometry Sep. 25, 2012
8259305 Surface shape measuring system and surface shape measuring method using the same Sep. 4, 2012
8243281 Method and system for measuring a surface of an object Aug. 14, 2012
8239163 Apparatus for and a method of determining surface characteristics Aug. 7, 2012
8233140 Measuring apparatus, exposure apparatus, and device fabrication method Jul. 31, 2012
8223343 Interferometric confocal microscope Jul. 17, 2012
8213021 Interferometric measurement of non-homogeneous multi-material surfaces Jul. 3, 2012
8189203 Reticle inspection systems and method May. 29, 2012
8184263 Measurement apparatus and exposure apparatus May. 22, 2012
8144336 Optical coherence tomography imaging Mar. 27, 2012
8107085 Methods and systems for interferometric analysis of surfaces and related applications Jan. 31, 2012
8081317 Electrostatic chuck with anti-reflective coating, measuring method and use of said chuck Dec. 20, 2011
8077324 Surface characteristic determining apparatus Dec. 13, 2011
8072611 Interferometric analysis of under-resolved features Dec. 6, 2011
8068234 Method and apparatus for measuring shape or thickness information of a substrate Nov. 29, 2011
8059278 Optical wave interference measuring apparatus Nov. 15, 2011

1 2 3 4 5 6 7 8










 
 
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