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Class Information
Number: 356/508
Name: Optics: measuring and testing > By light interference (e.g., interferometer) > For dimensional measurement > For orientation or alignment
Description: Dimensional measurement including means for determining an alignment or orientation of a surface relative to a reference line or plane.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7411678 |
Alignment apparatus, control method thereof, exposure apparatus and method of manufacturing semiconductor device by exposure apparatus controlled by the same control method |
Aug. 12, 2008 |
| 7397039 |
Real-time compensation of mechanical position error in pattern generation or imaging applications |
Jul. 8, 2008 |
| 7382469 |
Exposure apparatus for manufacturing semiconductor device, method of exposing a layer of photoresist, and method of detecting vibrations and measuring relative position of substrate during an |
Jun. 3, 2008 |
| 7382435 |
Exposure apparatus |
Jun. 3, 2008 |
| 7379183 |
Apparatus and methods for detecting overlay errors using scatterometry |
May. 27, 2008 |
| 7375823 |
Interferometry systems and methods of using interferometry systems |
May. 20, 2008 |
| 7362446 |
Position measurement unit, measurement system and lithographic apparatus comprising such position measurement unit |
Apr. 22, 2008 |
| 7349105 |
Method and apparatus for measuring alignment of layers in photolithographic processes |
Mar. 25, 2008 |
| 7330275 |
Method and system for determining the position and alignment of a surface of an object in relation to a laser beam |
Feb. 12, 2008 |
| 7319506 |
Alignment system and method |
Jan. 15, 2008 |
| 7289226 |
Characterization and compensation of errors in multi-axis interferometry systems |
Oct. 30, 2007 |
| 7277185 |
Method of measuring overlay |
Oct. 2, 2007 |
| 7274464 |
Position measuring device |
Sep. 25, 2007 |
| 7224469 |
Optical system alignment system and method with high accuracy and simple operation |
May. 29, 2007 |
| 7221460 |
Optical system in exposure apparatus, and device manufacturing method |
May. 22, 2007 |
| 7202491 |
Method for sensing wafers located inside a closed wafer cassette |
Apr. 10, 2007 |
| 7177031 |
Grating array systems having a plurality of gratings operative in a coherently additive mode and methods for making such grating array systems |
Feb. 13, 2007 |
| 7141080 |
Method and apparatus for assembling an array of micro-devices |
Nov. 28, 2006 |
| 7120514 |
Method and apparatus for performing field-to-field compensation |
Oct. 10, 2006 |
| 7101053 |
Multidirectional retroreflectors |
Sep. 5, 2006 |
| 7084987 |
Method and system to interferometrically detect an alignment mark |
Aug. 1, 2006 |
| 7079259 |
Optical alignment for a multi-mirror telescope |
Jul. 18, 2006 |
| 7016049 |
Alignment apparatus, control method therefor, exposure apparatus, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method |
Mar. 21, 2006 |
| 7003200 |
PM fiber alignment |
Feb. 21, 2006 |
| 6961116 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Nov. 1, 2005 |
| 6950194 |
Alignment sensor |
Sep. 27, 2005 |
| 6937344 |
Method of measuring overlay |
Aug. 30, 2005 |
| 6930783 |
Method of aligning optical system using a hologram and apparatus therefor |
Aug. 16, 2005 |
| 6927861 |
Simple deterministic method for array based optical component packaging |
Aug. 9, 2005 |
| 6924897 |
Point source module and methods of aligning and using the same |
Aug. 2, 2005 |
| 6912054 |
Interferometric stage system |
Jun. 28, 2005 |
| 6897963 |
Stage device and exposure apparatus |
May. 24, 2005 |
| 6888638 |
Interferometry system having a dynamic beam steering assembly for measuring angle and distance |
May. 3, 2005 |
| 6882901 |
Ultra-precision robotic system |
Apr. 19, 2005 |
| 6864956 |
Dual phase grating alignment marks |
Mar. 8, 2005 |
| 6856404 |
Scanning exposure method and apparatus, and device manufacturing method using the same |
Feb. 15, 2005 |
| 6856931 |
Mark detection method and unit, exposure method and apparatus, and device manufacturing method and device |
Feb. 15, 2005 |
| 6847460 |
Alignment and correction template for optical profilometric measurement |
Jan. 25, 2005 |
| 6809827 |
Self referencing mark independent alignment sensor |
Oct. 26, 2004 |
| 6778281 |
Phase shift fringe analysis method and apparatus using the same |
Aug. 17, 2004 |
| 6738147 |
Autostigmatic far field simulator |
May. 18, 2004 |
| 6707559 |
Method of detecting posture of object and apparatus using the same |
Mar. 16, 2004 |
| 6628406 |
Self referencing mark independent alignment sensor |
Sep. 30, 2003 |
| 6618147 |
Aligning device for assembling microsystems |
Sep. 9, 2003 |
| 6603539 |
Method for detecting the spatial position of a tracking mirror and a mirror arrangement for carrying out said method |
Aug. 5, 2003 |
| 6587209 |
Measurement method and apparatus of an external digital camera imager assembly |
Jul. 1, 2003 |
| 6563592 |
Interferometric alignment device |
May. 13, 2003 |
| 6559955 |
Straightness measuring apparatus for moving stage |
May. 6, 2003 |
| 6552798 |
Position detecting method and system for use in exposure apparatus |
Apr. 22, 2003 |
| 6522776 |
Method for automated determination of reticle tilt in a lithographic system |
Feb. 18, 2003 |
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